Chemical sensing device using fluorescent sensing material
The chemical sensing device comprises a substrate of semiconductor material, integrated circuit components and a photodetector formed in the substrate, a dielectric on the substrate, a wiring in the dielectric, and a source of electromagnetic radiation, a waveguide and a fluorescent sensor layer arranged in or above the dielectric. A portion of the waveguide is arranged to allow the electromagnetic radiation emitted by the source of electromagnetic radiation to be coupled into the waveguide. A further portion of the waveguide is arranged between the photodetector and the fluorescent sensor layer.
1. A chemical sensing device, comprising:
a substrate of semiconductor material,
integrated circuit components and a photodetector formed in the substrate,
a dielectric on the substrate,
a wiring in the dielectric, the wiring providing electric connections for the integrated circuit components and the photodetector,
a source of electromagnetic radiation arranged in or above the dielectric, and
a fluorescent sensor layer arranged in or above the dielectric,
wherein
a waveguide is arranged in or above the dielectric,
a portion of the waveguide is arranged at the source of electromagnetic radiation, the electromagnetic radiation emitted by the source of electromagnetic radiation being coupled into the waveguide,
a further portion of the waveguide is arranged between the photodetector and the fluorescent sensor layer, and
a mirror layer arranged between the waveguide and the photodetector, the mirror layer reflecting the electromagnetic radiation emitted by the source of electromagnetic radiation.
2. The chemical sensing device according to claim 1 , further comprising:
a grating in the portion of the waveguide that is arranged at the source of electromagnetic radiation, and
a further grating in the portion of the waveguide that is arranged between the photodetector and the fluorescent sensor layer.
3. The chemical sensing device according to claim 1 , further comprising:
scattering particles at the portion of the waveguide that is arranged between the photodetector and the fluorescent sensor layer.
4. The chemical sensing device according to claim 1 , further comprising:
an optical filter arranged between the waveguide and the photodetector, the optical filter blocking the electromagnetic radiation emitted by the source of electromagnetic radiation and being transparent to radiation generated in the fluorescent sensor layer.
5. The chemical sensing device according to claim 1 , further comprising:
a carrier, which is transparent to the electromagnetic radiation emitted by the source of electromagnetic radiation and to radiation generated in the fluorescent sensor layer, the fluorescent sensor layer being applied on the carrier.
6. The chemical sensing device according to claim 1 , wherein the fluorescent sensor layer is directly applied on the waveguide.
7. The chemical sensing device according to claim 1 , wherein the source of electromagnetic radiation is a vertical-cavity surface-emitting laser.
8. The chemical sensing device according to claim 1 , wherein the waveguide and the photodetector are arranged at a distance from one another that is less than 10 μm.
9. The chemical sensing device according to claim 1 , wherein the fluorescent sensor layer provides a gas sensor.
10. The chemical sensing device according to claim 1 , wherein the fluorescent sensor layer provides a bio sensor.
11. A chemical sensing device, comprising:
a substrate of semiconductor material,
integrated circuit components and a photodetector formed in the substrate,
a dielectric on the substrate,
a wiring in the dielectric, the wiring providing electric connections for the integrated circuit components and the photodetector,
a source of electromagnetic radiation arranged in or above the dielectric, and
a fluorescent sensor layer arranged in or above the dielectric,
wherein a waveguide is arranged in or above the dielectric,
a portion of the waveguide is arranged at the source of electromagnetic radiation, the electromagnetic radiation emitted by the source of electromagnetic radiation being coupled into the waveguide, and
a further portion of the waveguide is arranged between the photodetector and the fluorescent
sensor layer, and
a mirror in the further portion of the waveguide that is arranged between the photodetector and the fluorescent sensor layer, the mirror being inclined with respect to a direction of propagation of the electromagnetic radiation in the waveguide.