Ceramic, probe guiding member, probe card, and socket for package inspection
View Patent ↗A ceramic contains, in mass percent: Si 3 N 4 : 20.0 to 60.0%, ZrO 2 : 25.0 to 70.0%, and one or more oxides selected from MgO, Y 2 O 3 , CeO 2 , CaO, HfO 2 , TiO 2 , Al 2 O 3 , SiO 2 , MoO 3 , CrO, CoO, ZnO, Ga 2 O 3 , Ta 2 O 5 , NiO, and V 2 O 5 : 5.0 to 15.0%. The ceramic has a coefficient of thermal expansion as high as that of silicon and an excellent mechanical strength, allows fine machining with high precision, and prevents particles from being produced.
1. A ceramic containing, in mass percent:
Si 3 N 4 : 20.0 to 60.0%;
ZrO 2 : 25.0 to 70.0%;
wherein the ceramic contains, in mass percent, 5.0 to 15.0% of:
one or more oxides selected from MgO, Y 2 O 3 , CeO 2 , CaO, and HfO 2 ; and
one or more oxides selected from TiO 2 , Al 2 O 3 , SiO 2 , MoO 3 , CrO, CoO, ZnO, Ga 2 O 3 , Ta 2 O 5 , NiO, and V 2 O 5 ; and
the balance being 10.0% or less.
2. The ceramic according to claim 1 , wherein a crystal phase of ZrO 2 is one of a crystal phase being a tetragonal crystal, a crystal phase being a tetragonal crystal and a monoclinic crystal, a crystal phase being a cubic crystal, a crystal phase being a cubic crystal and a tetragonal crystal, and a crystal phase being a cubic crystal and a monoclinic crystal.
3. The ceramic according to claim 1 , wherein ZrO 2 is a cubic crystal.
4. The ceramic according to claim 1 , wherein the ceramic has a coefficient of thermal expansion at −50 to 5500° C. ranging from 3.0×10 −6 to 6.0×10 −6 /° C. and has a three-point flexural strength of 700 MPa or more.
5. A probe guiding member that guides probes of a probe card, the probe guiding member comprising:
a plate-shaped main body that is made of the ceramic according to claim 1 ; and
the main body includes a plurality of through holes and/or slits through which the probes are to be inserted.
6. The probe guiding member according to claim 5 , wherein a surface roughness of inner surfaces of the plurality of through holes and/or slits is 0.25 μm or less in terms of Ra.
7. A probe card comprising:
a plurality of probes; and
the probe guiding member according to claim 5 .
8. A socket for package inspection, wherein the socket for package inspection is made of the ceramic according to claim 1 .
9. The ceramic according to claim 2 , wherein ZrO 2 is a cubic crystal.
10. The ceramic according to claim 2 , wherein the ceramic has a coefficient of thermal expansion at −50 to 500° C. ranging from 3.0×10 −6 to 6.0×10 −6 /° C. and has a three-point flexural strength of 700 MPa or more.
11. The ceramic according to claim 3 , wherein the ceramic has a coefficient of thermal expansion at −50 to 500° C. ranging from 3.0×10 −6 to 6.0×10 −6 /° C. and has a three-point flexural strength of 700 MPa or more.
12. The ceramic according to claim 9 , wherein the ceramic has a coefficient of thermal expansion at −50 to 500° C. ranging from 3.0×10 −6 to 6.0×10 −6 /° C. and has a three-point flexural strength of 700 MPa or more.