Composition and method for conducting a material removing operation
A composition suitable for chemical mechanical polishing a substrate can comprise abrasive particles, a multi-valent metal borate, at least one oxidizer and a solvent. The composition can polish a substrate with a high material removal rate and a very smooth surface finish.
1. A composition comprising: abrasive particles; a multi-valent metal borate; at least one oxidizing agent; and a solvent.
2. The composition of claim 1 , wherein the multi-valent metal borate includes iron(III)borate, copper(II)borate, cobalt(II)borate, bismuth(III)borate, aluminum(III)borate, cerium(III)borate, chromium(III)borate, ruthenium(III)borate, titanium(III)borate, lead(II)borate, or any combination thereof.
3. The composition of claim 2 , wherein the multi-valent metal borate consists essentially of iron(III)borate.
4. The composition of claim 1 , wherein the at least one oxidizing agent includes a permanganate, a peroxydisulfate, a peroxide, a chlorite, a perchlorate, a hypochlorite, a nitrite, a hyponitrite, an iodate, a periodate, a chromate, manganese oxide, or any combination thereof.
5. The composition of claim 4 , wherein the at least one oxidizing agent consists essentially of a permanganate.
6. The composition of claim 1 , wherein an amount of the multi-valent metal borate is at least 0.01 wt % and not greater than 20 wt % based on the total weight of the composition.
7. The composition of claim 1 , wherein an amount of the at least one oxidizing agent is at least 0.01 wt % and not greater than 20 wt based on the total weight of the composition.
8. The composition of claim 1 , wherein the abrasive particles include zirconia or alumina.
9. The composition of claim 1 , wherein an amount of the abrasive particles is at least 0.1 wt % and not greater than 10 wt % based on the total weight of the composition.
10. The composition of claim 1 , wherein the composition is adapted for chemical mechanical polishing of a substrate.
11. The composition of claim 10 , wherein the substrate includes a metal, a metal alloy, a group III-V compound, a group IV-IV compound, or a polymer.
12. The composition of claim 11 , wherein the substrate includes silicon carbide.
13. A method of polishing a substrate, comprising:
providing a polishing composition, wherein the polishing composition comprises abrasive particles, a multi-valent metal borate, at least one oxidizing agent and water;
bringing the polishing composition in contact with the substrate; and
polishing the substrate.
14. The method of claim 13 , wherein the multi-valent metal borate includes iron(III)-borate.
15. The method of claim 13 , wherein the substrate includes a metal, a metal alloy, a polymer, a group III-V compound, or a IV-IV compound.
16. The method of claim 13 , wherein the pH is adjusted to a pH of at least 1 and not greater than 5.