IP Library Granted Patent US 11,566,341
Granted Patent B2
US 11,566,341 · App. 17/451,845 · Granted Jan 31, 2023

Open czochralski furnace for single crystal growth

Inventors: Yu Wang (Meishan, CN); Weiming Guan (Meishan, CN); Zhenxing Liang (Meishan, CN)
Assignee: MEISHAN BOYA ADVANCED MATERIALS CO., LTD.
C30B15/14C30B15/30
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,566,341
App. No.
17/451,845
Granted
Jan 31, 2023
Kind
B2
Abstract

The present disclosure provides a crystal growth apparatus. The crystal growth apparatus may include a furnace chamber; a temperature field device placed at least partially into the furnace chamber; a pulling rod component that extends into the temperature field device; a pulling component configured to drive the pulling rod component to move up and down; and a rotating component configured to drive the pulling rod component to rotate.

Claims (48)

1. An apparatus for crystal growth, comprising:

a furnace chamber;

a temperature field device placed at least partially into the furnace chamber;

a pulling rod component that extends into the temperature field device;

a pulling component configured to drive the pulling rod component to move up and down; and

a rotating component configured to drive the pulling rod component to rotate.

2. The apparatus of claim 1 , wherein the furnace chamber is a non-closed structure.

3. The apparatus of claim 1 , wherein the furnace chamber includes:

a furnace body; and

a furnace cover, wherein the furnace cover is mounted on a top of the furnace body and includes a through hole through which the temperature field device is placed into the furnace chamber.

4. The apparatus of claim 3 , wherein a cooling structure is mounted on a sidewall of the furnace body or the furnace cover.

5. The apparatus of claim 4 , wherein the cooling structure mounted on the furnace cover includes at least one circle of cooling loop, a cooling medium passing through the cooling loop.

6. The apparatus of claim 1 , wherein a height of the temperature field device is higher than a height of the furnace chamber.

7. The apparatus of claim 1 , wherein a height of the temperature field device is lower than a height of the furnace chamber.

8. The apparatus of claim 1 , wherein the temperature field device is sealed.

9. The apparatus of claim 1 , the temperature field device includes:

a first drum;

a second drum mounted inside the first drum;

the cover plate mounted on a top of the temperature field device and covering an open end of the first drum; and

a bottom plate mounted on a bottom of the temperature field device and covering the other open end of the first drum.

10. The apparatus of claim 9 , wherein the temperature field device further includes:

a filler filled in the second drum and/or a space between the second drum and the first drum.

11. The apparatus of claim 10 , wherein the filler includes a granule shaped material, a brick shaped material, and/or a felt shaped material.

12. The apparatus of claim 1 , wherein a cover plate of the temperature field device includes a first through hole for allowing the pulling rod component to extend into the temperature field device.

13. The apparatus of claim 1 , wherein a cover plate of the temperature field device includes two second through holes for allowing gases to enter into and/or exit from the temperature field device.

14. The apparatus of claim 1 , wherein the pulling component includes a first driving device, a pillar, a slide, and a screw rod, wherein:

the first driving device is mounted on a top of the pillar;

the pillar includes a slide rail;

the screw rod is mounted in parallel with the slide rail and one end of the screw rod is connected to the first driving device; and

the slide is nested on the screw rod, at least a part of the slide is located within the slide rail, and a rotation of the screw rod drives the slide to move up and down along the slide rail.

15. The apparatus of claim 14 , wherein the rotating component is mounted on the slide.

16. The apparatus of claim 15 , wherein the apparatus further comprises a weighing component configured to determine a weight of a crystal being grown on the pulling rod component, the weighing component being mounted on the slide.

17. The apparatus of claim 16 , wherein the rotating component at least includes a second driving device and a transmission component, wherein:

the second driving device drives the weighing component to rotate through the transmission component.

18. The apparatus of claim 17 , wherein the weighing component includes a weighing chamber and a weighing sensor, wherein:

the weighing sensor is mounted inside the weighing chamber;

one end of the weighing sensor is fixedly connected to the pulling rod component; and

the other end of the weighing sensor is fixedly connected to a cover plate of the weighing chamber.

19. The apparatus of claim 18 , wherein:

the transmission component includes a belt pulley and a belt;

an output spin axis of the second driving device is connected to a spin axis of the belt pulley; and

at least one belt pulley is mounted on the belt and the weighing chamber.

20. The apparatus of claim 19 , wherein the pulling rod component at least includes a middle rod and a guide rod, wherein:

one end of the middle rod is fixedly connected to the weighing chamber;

the middle rod passes through a through hole mounted on the slide;

the middle rod includes a hollow structure;

the guide rod passes through the middle rod; and

one end of the guide rod is connected to the weighing sensor and the other end of the guide rod is configured to connect a seed rod.

Assignments (2)
CHANGE OF NAME Recorded May 13, 2026
From: MEISHAN BOYA ADVANCED MATERIALS CO., LTD.
To: BOYA ADVANCED MATERIALS CO., LTD.
Reel/Frame 075565/0780 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 10, 2021
From: WANG, YU; GUAN, WEIMING; LIANG, ZHENXING
To: MEISHAN BOYA ADVANCED MATERIALS CO., LTD.
Reel/Frame 058078/0939 →
Continuity (4)
Continuation 17035741 · Sep 29, 2020
Continuation 16903326 · Jun 16, 2020
Continuation PCTCN2019101698 · Aug 21, 2019
Related Publication 20220042200A1 · Feb 10, 2022