IP Library Granted Patent US 11,577,466
Granted Patent B2
US 11,577,466 · App. 16/770,909 · Granted Feb 14, 2023

Build system, build method, computer program, control apparatus to build an object utilizing an irradiation optical system

Inventor: Kazuki Ueno (Fukaya, JP)
Assignee: NIKON CORPORATION
B29C64/393B22F12/44B29C64/153B29C64/209B29C64/268B29C64/321B33Y30/00B33Y50/02B33Y10/00
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Quick Facts
Patent No.
US 11,577,466
App. No.
16/770,909
Granted
Feb 14, 2023
Kind
B2
Abstract

A build system is provided with: a build apparatus that performs a build process for forming a build object by supplying build materials to an irradiation area of an energy beam from a supply system while irradiating a target object with the energy beam from an irradiation system; and a change apparatus that is configured to change a relative position between the energy beam and the target object, wherein the build system differentiates a condition of the build process that is performed at a first area of the target object and a condition of the build process that is performed at a second area of the target object.

Claims (63)

1. A build system comprising:

a build apparatus that performs a build process for forming a build object by supplying build materials to an irradiation area of an energy beam from a supply system while irradiating a target object with the energy beam from an irradiation optical system; and

a driving system that is configured to drive at least one of the irradiation optical system and the target object to change a relative position between the energy beam and the target object, wherein

the build system builds a first part of the build object extending along a first direction by supplying the build materials to the irradiation area while the driving system changes a positional relationship between the target object and the irradiation area in the first direction,

the build system builds a second part of the build object, which is connected to the first part, extending along a second direction different from the first direction by supplying the build materials to the irradiation area while the driving system changes the positional relationship between the target object and the irradiation area in the second direction, and

the build system controls a condition of the build process for building a first area of the first part so as to be different from the condition of the build process for building a second area of the first part that is located between the first area and the second part.

2. The build system according to claim 1 , wherein the build system controls the conditions so as to be different from each other to reduce a difference between a characteristic of the build object formed at the first area and a characteristic of the build object formed at the second area.

3. The build system according to claim 1 , wherein the build apparatus includes a control apparatus that controls the condition of the build process for building the first area of the first part and the condition of the build process for building the second area of the first part.

4. The build system according to claim 1 , wherein the condition of the build process includes a supplied amount of the build materials to the irradiation area.

5. The build system according to claim 4 , wherein the supplied amount of the build materials to the irradiation area when the build process is performed for building the first area is larger than the supplied amount of the build materials to the irradiation area when the build process is performed for building the second area.

6. The build system according to claim 1 , wherein the condition of the build process includes a transfer amount of heat from the energy beam to an area part of the target object at which the irradiation area is set.

7. The build system according to claim 6 , wherein the transfer amount of the heat from the energy beam to the area part of the target object at which the irradiation area is set when the build process is performed for building the first area is larger than the transfer amount of the heat from the energy beam to the area part of the target object at which the irradiation area is set when the build process is performed for building the second area.

8. The build system according to claim 1 , wherein the condition of the build process includes a relative moving speed between the irradiation area and the target object.

9. The build system according to claim 8 , wherein the relative moving speed when the build process is performed for building the first area is higher than the relative moving speed when the build process is performed for building the second area.

10. The build system according to claim 1 , wherein a transfer characteristic of heat from the energy beam when the first area is built is different from a transfer characteristic of heat from the energy beam when the second area is built.

11. The build system according to claim 10 , wherein the transfer rate of the heat from the energy beam when the first area is built is higher than the transfer rate of the heat from the energy beam when the second area is built.

12. The build system according to claim 4 , wherein the build system controls the supply system to control the supplied amount of the build materials to the irradiation area.

13. The build system according to claim 12 , wherein the build system controls an amount of the build materials that are supplied from the supply system to control the supplied amount of the build materials to the irradiation area.

14. The build system according to claim 12 , wherein the build system controls a direction of supply of the build materials from the supply system to control the supplied amount of the build materials to the irradiation area.

15. The build system according to claim 14 , wherein

the supply system includes a supply nozzle for supplying the build materials in a desired direction, and

the build system controls a direction of the supply nozzle to control the direction of supply.

16. The build system according to claim 1 , further comprising a supply amount change apparatus that prevents at least a part of the build materials that are supplied from the supply system from arriving at the irradiation area.

17. The build system according to claim 16 , wherein the supply amount change apparatus includes: at least one of a gas jet apparatus that sprays a gas to and blows away at least a part of the build materials that are supplied from the supply system; and a blocking member that is intermittently disposed between the supply system and the irradiation area to intermittently block the build materials.

18. The build system according to claim 6 , wherein the build system controls the supply system to control a supplied amount of the build materials, and wherein the build system controls the transfer amount of the heat from the energy beam to the area part of the target object at which the irradiation area is set by controlling a characteristic of the energy beam.

19. The build system according to claim 1 , wherein the condition of the build process includes a characteristic of the energy beam.

20. The build system according to claim 18 , wherein the characteristic of the energy beam includes at least one of an intensity or an energy amount per unit area of the energy beam, a light concentration position of the energy beam, a defocus amount of the energy beam and an intensity distribution of the energy beam.

21. The build system according to claim 18 , wherein

the irradiation optical system emits the energy beam from an energy beam source, and

the build system controls the characteristic of the energy beam by controlling the energy beam source.

22. The build system according to claim 18 , wherein

the build system controls the characteristic of the energy beam by controlling the irradiation optical system.

23. The build system according to claim 22 , wherein the optical system includes at least one of a condensing optical member that condenses the energy beam and a light shielding member that is disposed on an optical path of the energy beam such that the energy beam is at least partially shielded.

24. The build system according to claim 18 , wherein the build system controls the characteristic of the energy beam by controlling a moving aspect of the irradiation optical system.

25. The build system according to claim 2 , wherein the characteristic of the build object includes a height from a surface of the target object and a size of the build object in a direction that is along the surface of the target object.

26. The build system according to claim 25 , wherein the height from the surface of the target object at the first area is higher than the height from the surface of the target object at the second area.

27. The build system according to claim 25 , wherein a size of the build object in the direction that is along the surface of the target object at the first area is smaller than a size of the build object in the direction that is along the surface of the target object at the second area.

28. The build system according to claim 1 , wherein

the build system laminates a plurality of layered structural objects, each of which is an aggregation of the build object, to form a layered structural object, and

a size of a depth of focus of the irradiation optical system is larger than a thickness of one layer of the layered structural object and is smaller than a thickness of two layers of the layered structural objects.

29. A build method comprising:

performing a build process for building a first part of a build object extending along a first direction by supplying build materials to an irradiation area of an energy beam while irradiating a target object with the energy beam and changing a positional relationship between the target object and the irradiation area in the first direction;

performing a build process for building a second part of the build object, which is connected to the first part, extending along a second direction different from the first direction by supplying the build materials to the irradiation area while irradiating the target object with the energy beam and changing the positional relationship between the target object and the irradiation area in the second direction; and

controlling a condition of the build process for building a first area of the first part so as to be different from the condition of the build process for building a second area of the first part that is located between the first area and the second part.

30. The build method according to claim 29 , wherein the controlling of the conditions reduces a difference between a characteristic of the build object formed at the first area and a characteristic of the build object formed at the second area.

31. A non-transitory computer-readable recording medium on which is stored a computer program that is executed by a computer for controlling a build system comprising: a build apparatus that performs a build process for forming a build object by supplying build materials to an irradiation area of an energy beam from a supply system while irradiating a target object with the energy beam from an irradiation optical system; and a driving system that is configured to drive at least one of the irradiation optical system and the target object to change a relative position between the energy beam and the target object, wherein

the computer program causes the computer to execute:

a process of performing a build process of building a first part of the build object extending along a first direction by supplying the build materials to the irradiation area while irradiating the target object with the energy beam while the driving system changes a positional relationship between the target object and the irradiation area in the first direction;

a process of performing a build process of building a second part of the build object, which is connected to the first part, extending along a second direction different from the first direction by supplying the build materials to the irradiation area while irradiating the target object with the energy beam while the driving system changes the positional relationship between the target object and the irradiation area in the second direction; and

a process of controlling a condition of the build process for building a first area of the first part so as to be different from the condition of the build process for building a second area of the first part that is located between the first area and the second part.

32. A build system comprising:

a build apparatus that performs a build process for forming a build object by supplying build materials to an irradiation area of an energy beam from a supply system while irradiating a target object with the energy beam from an irradiation optical system;

a driving system that is configured to drive at least one of the irradiation optical system and the target object to change a relative position between the energy beam and the target object; and

a receiving apparatus that receives:

a control signal for controlling the build apparatus and the driving system to build a first part of the build object extending along a first direction by supplying the build materials to the irradiation area while irradiating the target object with the energy beam while the driving system changes a positional relationship between the target object and the irradiation area in the first direction;

a control signal for controlling the build apparatus and the driving system to build a second part of the build object, which is connected to the first part, extending along a second direction different from the first direction by supplying the build materials to the irradiation area while irradiating the target object with the energy beam while the driving system changes the positional relationship between the target object and the irradiation area in the second direction; and

a control signal for controlling the build apparatus and the driving system to control a condition of the build process for building a first area of the first part so as to be different from the condition of the build process for building a second area of the first part that is located between the first area and the second part.

33. A control apparatus that controls a build system,

the build system comprising: a build apparatus that performs a build process for forming a build object by supplying build materials to an irradiation area of an energy beam from a supply system while irradiating a target object with the energy beam from an irradiation optical system; and a driving system that is configured to drive at least one of the irradiation optical system and the target object to change a relative position between the energy beam and the target object, wherein

the control apparatus is configured to execute:

a process of building a first part of the build object extending along a first direction by supplying the build materials to the irradiation area while irradiating the target object with the energy beam while the driving system changes a positional relationship between the target object and the irradiation area in the first direction;

a process of building a second part of the build object, which is connected to the first part, extending along a second direction different from the first direction by supplying the build materials to the irradiation area while irradiating the target object with the energy beam while the driving system changes the positional relationship between the target object and the irradiation area in the second direction; and

a process of controlling a condition of the build process for building a first area of the first part so as to be different from the condition of the build process for building a second area of the of the first part that is located between the first area and the second part.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 29, 2020
From: UENO, KAZUKI
To: NIKON CORPORATION
Reel/Frame 053347/0456 →
Priority Claims (1)
WO PCT/JP2017/044624 · Dec 12, 2017 · international
Continuity (1)
Related Publication 20210170692A1 · Jun 10, 2021