Rotating light source utilized to modify substrates

1. A system comprising:

a light source that produces a pulsed laser beam with pulse bursts comprising two sub-pulses per pulse burst or more;

an optical system comprising first and second portions; and

first and second torque motors integrated with respective ones of the first and second portions,

wherein the first torque motor is configured to rotate the first portion around a first axis;

wherein the second torque motor is configured to rotate the second portion around a second axis; and

wherein the first axis is perpendicular to the second axis.

2. The system of claim 1 , wherein the optical system comprises:

an aspheric optical element;

a first reflecting optical device;

a first lens, configured to collimate the light;

a second reflecting optical device; and

a second lens, configured to focus the light.

3. The system of claim 1 , wherein the optical system further comprises an aspheric optical element comprising a refractive axicon, a reflective axicon, a negative axicon, a spatial light modulator, a diffractive optic, or a cubically shaped optical element.

4. The system of claim 1 , wherein the optical system comprises first and second reflecting optical devices comprising mirrors.

5. The system of claim 1 , wherein the first portion comprises an aspheric optical element and a reflecting optical device.

6. The system of claim 5 , wherein the first portion further comprises a lens.

7. The system of claim 1 , wherein the first portion comprises a reflecting optical device and a lens.

8. The system of claim 1 , wherein the second portion comprises a reflecting optical device and a lens.

9. The system of claim 8 , wherein the second portion further comprises another lens.

10. The system of claim 1 , wherein the optical system is configured to generate a quasi-non-diffracting beam.

11. The system of claim 10 , wherein the quasi-non-diffracting beam comprises:

a wavelength λ;

a spot size w o ; and

a cross section that comprises a Rayleigh range Z R that is greater than

F

D

⁢

π

⁢

⁢

w

0

,

2

λ

,

where F D is a dimensionless divergence factor comprising a value of 10 or greater.

12. The system of claim 11 wherein the dimensionless divergence factor F D comprises a value of from 10 to 2000.

13. The system of claim 11 , wherein the dimensionless divergence factor comprises a value of from 50 to 1500.

14. The system of claim 11 , wherein the dimensionless divergence factor E D comprises a value of from 100 to 1000.

15. The system of claim 1 , further comprising an encoder configured to track the torque motor.

16. The system of claim 1 , wherein the first axis is vertical Z axis and the second axis is X or Y axis in a Cartesian coordinate system.

17. The system of claim 1 , wherein the system is configured for laser processing a transparent workpiece.

18. The system of claim 17 , wherein the transparent workpiece comprises an alkali aluminosilicate glass material.

19. A method comprising:

generating, by a system, a quasi-non-diffracting beam;

directing the quasi-non-diffracting beam onto a transparent workpiece, generating an induced absorption and producing a defect within the transparent workpiece; and

moving, by the system, the quasi-non-diffracting beam relative to the transparent workpiece along a contour line, forming a contour with a plurality of defects in the transparent workpiece,

wherein the quasi-non-diffracting beam is oriented orthogonal to an impingement surface of the transparent workpiece at an impingement location, and

wherein an orthogonal orientation between the quasi-non-diffracting beam and the impingement surface is maintained as the quasi-non-diffracting beam moves along the contour line to different locations on the curved surface of the transparent workpiece that have different surface orientations.

20. The method of claim 19 , wherein the impingement surface of the transparent workpiece is a curved surface.

21. The method of claim 19 , wherein the system comprises:

a light source;

an optical system comprising first and second portions; and

first and second torque motors integrated with respective ones of the first and second portions,

wherein the first torque motor is configured to rotate the first portion around a first axis;

wherein the second torque motor is configured to rotate the second portion around a second axis; and

wherein the first axis is perpendicular to the second axis.

22. The method of claim 21 , wherein the optical system comprises:

an aspheric optical element;

a first reflecting optical device;

a first lens, configured to collimate the light;

a second reflecting optical device; and

a second lens, configured to focus the light.

23. A system comprising:

a light source;

an optical system comprising first and second portions; and

first and second torque motors integrated with respective ones of the first and second portions,

wherein the first torque motor is configured to rotate the first portion around a first axis;

wherein the second torque motor is configured to rotate the second portion around a second axis; and

wherein the first axis is perpendicular to the second axis, the first axis is vertical Z axis, and the second axis is X or Y axis in a Cartesian coordinate system.