IP Library Granted Patent US 11,638,383
Granted Patent B2
US 11,638,383 · App. 16/892,963 · Granted Apr 25, 2023

Display device and method of manufacturing the same

Inventors: Jongchan Lee (Yongin-si, KR); Kibum Kim (Yongin-si, KR); Myeonghun Song (Yongin-si, KR); Jeonghyun Lee (Yongin-si, KR); Sanghee Jang (Yongin-si, KR); Woonghee Jeong (Yongin-si, KR)
Assignee: SAMSUNG DISPLAY CO., LTD.
H10K59/122H10K50/865H10K59/1213H10K59/1216H10K59/131H10K71/00H10K2102/103
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Quick Facts
Patent No.
US 11,638,383
App. No.
16/892,963
Granted
Apr 25, 2023
Kind
B2
Abstract

A method of manufacturing a display device includes preparing a substrate, wherein the substrate includes a pixel area and a transmission area, forming insulating layers in the pixel area and in the transmission area, forming a pixel electrode on the insulating layers in the pixel area and forming a pixel-defining layer on the pixel electrode, wherein the pixel-defining layer exposes at least part of the pixel electrode, forming a metal layer on the pixel-defining layer in the pixel area, the at least part of the pixel electrode exposed by the pixel-defining layer in the pixel area, and the insulating layers in the transmission area, removing the metal layer on the insulating layers in the transmission area, and removing the insulating layers in the transmission area.

Claims (73)

1. A method of manufacturing a display device, the method comprising:

preparing a substrate including a pixel area and a transmission area;

forming a plurality of insulating layers in the pixel area and in the transmission area;

forming a pixel electrode on the plurality of insulating layers in the pixel area;

forming a pixel-defining layer on the pixel electrode, wherein the pixel-defining layer exposes at least part of the pixel electrode;

forming a metal layer on:

the pixel-defining layer in the pixel area,

the at least part of the pixel electrode exposed by the pixel-defining layer in the pixel area, and

the plurality of insulating layers in the transmission area;

removing the metal layer on the plurality of insulating layers in the transmission area;

removing the plurality of insulating layers in the transmission area; and

removing the metal layer on:

the pixel-defining layer in the pixel area; and

the at least part of the pixel electrode exposed by the pixel-defining layer in the pixel area.

2. The method of claim 1 , wherein, the forming of the metal layer including forming the metal layer of a thickness in a range of about 400 Å to about 1200 Å.

3. The method of claim 2 , wherein the metal layer comprises at least one of indium zinc oxide (IZO), indium tin oxide (ITO), zinc oxide (ZnO), indium oxide (In 2 O 3 ), indium gallium oxide (IGO), and aluminum zinc oxide (AZO).

4. The method of claim 1 , wherein the removing of the metal layer on the plurality of insulating layers in the transmission area comprises:

patterning a photosensitive material on the metal layer in the pixel area;

removing the metal layer on the plurality of insulating layers in the transmission area; and

removing the patterned photosensitive material on the metal layer in the pixel area.

5. The method of claim 4 , wherein the removing of the metal layer on the plurality of insulating layers in the transmission area comprises removing the metal layer in the transmission area by wet etching.

6. The method of claim 1 , wherein the removing of the plurality of insulating layers in the transmission area comprises removing the plurality of insulating layers in the transmission area by dry etching.

7. The method of claim 1 , wherein the removing of the metal layer on the pixel-defining layer in the pixel area and on the at least part of the pixel electrode exposed by the pixel-defining layer in the pixel area comprises removing the metal layer by wet etching.

8. The method of claim 1 , wherein forming of the plurality of insulating layers in the pixel area and in the transmission area comprises:

forming a buffer layer in the pixel area and in the transmission area;

forming a light-shielding layer on the buffer layer in the pixel area;

forming a first insulating layer on the light-shielding layer in the pixel area and on the buffer layer in the transmission area;

forming a semiconductor layer on the first insulating layer in the pixel area;

forming a second insulating layer on the semiconductor layer in the pixel area and on the first insulating layer in the transmission area;

forming a first conductive layer on the second insulating layer in the pixel area;

forming a third insulating layer on the first conductive layer in the pixel area and on the second insulating layer in the transmission area;

forming a second conductive layer on the third insulating layer in the pixel area;

forming a fourth insulating layer on the second conductive layer in the pixel area and on the third insulating layer in the transmission area;

forming a third conductive layer on the fourth insulating layer in the pixel area;

forming a fifth insulating layer on the third conductive layer in the pixel area and on the fourth insulating layer in the transmission area; and

forming a fourth conductive layer and a fifth conductive layer on the fifth insulating layer in the pixel area.

9. The method of claim 8 , further comprising:

forming a first planarization layer on the fourth conductive layer and the fifth conductive layer in the pixel area;

forming a sixth conductive layer on the first planarization layer in the pixel area; and

forming a second planarization layer on the sixth conductive layer in the pixel area.

10. The method of claim 9 , wherein the forming of the fourth conductive layer comprises forming the fourth conductive layer to face the third conductive layer.

11. The method of claim 8 , wherein the forming of the second conductive layer comprises forming the second conductive layer to face the first conductive layer.

12. The method of claim 1 , further comprising:

forming an intermediate layer on the pixel electrode after removing the metal layer on the at least part of the pixel electrode exposed by the pixel-defining layer in the pixel area; and forming an opposite electrode on the intermediate layer.

13. The method of claim 12 , wherein the forming of the opposite electrode comprises forming the opposite electrode to extend into the transmission area.

14. The method of claim 1 , wherein

the pixel area has a first transmittance, and

the transmission area has a second transmittance higher than the first transmittance.

15. A display device comprising:

a substrate comprising a pixel area and a transmission area;

a plurality of insulating layers disposed in the pixel area;

a plurality of planarization layers disposed on the plurality of insulating layers;

a pixel electrode disposed on the plurality of planarization layers; and

a pixel-defining layer disposed on the pixel electrode and exposing at least part of the pixel electrode,

wherein the plurality of insulating layers in the transmission area are removed, and

wherein

the plurality of insulating layers comprise:

a first insulating layer disposed on the substrate;

a second insulating layer disposed on the first insulating layer;

a third insulating layer disposed on the second insulating layer;

a fourth insulating layer disposed on the third insulating layer; and

a fifth insulating layer disposed on the fourth insulating layer.

16. The display device of claim 15 , wherein

the plurality of planarization layers comprise:

a first planarization layer disposed on the fifth insulating layer; and

a second planarization layer disposed on the first planarization layer.

17. The display device of claim 15 , further comprising:

an intermediate layer disposed on the pixel electrode; and

an opposite electrode disposed on the intermediate layer.

18. The display device of claim 17 , wherein at least part of the opposite electrode extends into the transmission area.

19. The display device of claim 15 , wherein

the pixel area has a first transmittance, and

the transmission area has a second transmittance higher than the first transmittance.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 4, 2020
From: LEE, JONGCHAN; KIM, KIBUM; SONG, MYEONGHUN; LEE, JEONGHYUN; JANG, SANGHEE; JEONG, WOONGHEE
To: SAMSUNG DISPLAY CO., LTD.
Reel/Frame 052846/0001 →
Priority Claims (1)
KR 10-2019-0150493 · Nov 21, 2019 · national
Continuity (1)
Related Publication 20210159288A1 · May 27, 2021