Substrate processing device comprising door unit having inclined surface
The substrate processing device according to one embodiment may comprise: a chamber unit provided with a processing space therein and comprising an inclined chamber surface having an opening; a door unit comprising an inclined door surface, which corresponds to the inclined chamber surface, and capable of being coupled to the chamber unit; and a door driving unit for driving the door unit so as to open/close the processing space.
1. A substrate processing apparatus comprising:
a chamber unit provided with a processing space therein and comprising an inclined chamber surface having an opening;
a door unit comprising an inclined door surface, which corresponds to the inclined chamber surface, and configured to be coupled to the chamber unit;
a door driving unit for driving the door unit so as to open/close the processing space; and
a clamp unit enclosing at least a portion of the chamber unit and the door unit when the chamber unit is coupled to the door unit,
wherein the clamp unit comprises:
a lower clamp body contacting the door unit;
an upper clamp body disposed on an upper side of the lower clamp body by being spaced apart; and
a side clamp body for connecting both sides of the lower clamp body to both sides of the upper clamp body.
2. The substrate processing apparatus of claim 1 , wherein an upper surface of the door unit comprises a protrusion protruding upward, and
the chamber unit comprises a recess formed in a corresponding shape for inserting the protrusion.
3. The substrate processing apparatus of claim 2 , wherein one surface of the protrusion comprises at least a portion of the inclined door surface.
4. The substrate processing apparatus of claim 1 , wherein the door unit comprises a clamp insert groove inwardly recessed in a counter surface to the chamber unit, for inserting the lower clamp body.
5. The substrate processing apparatus of claim 4 , wherein an upper surface of the clamp insert groove is downwardly inclined in a moving direction of the clamp unit.
6. The substrate processing apparatus of claim 5 , wherein an upper surface of the lower clamp body is downwardly inclined in the moving direction of the clamp unit to correspond to the upper surface of the clamp insert groove.
7. The substrate processing apparatus of claim 1 , wherein the clamp unit comprises a clamp uneven portion formed on a lower surface of the upper clamp body.
8. The substrate processing apparatus of claim 7 , wherein the chamber unit comprises a chamber uneven portion formed on an upper surface of the chamber unit to be coupled to the clamp uneven portion.
9. The substrate processing apparatus of claim 1 , wherein the clamp unit comprises an inclined connecting part formed in an inclined surface at a connection portion in which the side clamp body is connected to at least one of the lower clamp body and the upper clamp body.
10. The substrate processing apparatus of claim 9 , wherein at least one of the door unit and the chamber unit comprises an inclined chamfer formed in an inclined surface at a corner, for inserting the inclined connecting part.
11. The substrate processing apparatus of claim 1 , further comprising:
a sealing unit installed in a contact portion of the door unit and the chamber unit along a circumference of the opening.
12. The substrate processing apparatus of claim 11 , wherein the sealing unit comprises a U-shaped sealing member and is disposed to connect a U-shaped space to the processing space.
13. The substrate processing apparatus of claim 1 , wherein the door driving unit drives the door unit in a vertical direction.
14. The substrate processing apparatus of claim 1 , further comprising:
a clamp driving unit for driving the clamp in a front-rear direction.