Methods and apparatus for calibrating concentration sensors for precursor delivery

1. A method of controlling an amount of a precursor flowing into a deposition chamber from an apparatus for controlling precursor flow, comprising:

A. forming an enclosed volume having a known volume between an inlet and an outlet of the apparatus for controlling precursor flow, wherein the enclosed volume comprises an ampoule comprising the precursor and a flow-through cell of a sensor assembly, and wherein the enclosed volume is controlled to be isothermal at a known temperature sufficient to produce a portion of the precursor in a gaseous state within the enclosed volume;

B. measuring a signal from the sensor assembly and performing a calibration of the apparatus for controlling precursor flow based on the measured signal from the sensor assembly, a known vapor pressure of the precursor at the known temperature, and the known volume; and

C. flowing a carrier gas at an operative carrier gas flow rate through the inlet, through the ampoule, through the flow-through cell, and through the outlet into the deposition chamber, while measuring the signal from the sensor assembly, and determining an amount of the precursor flowing into the deposition chamber based on the operative carrier gas flow rate, the signal from the sensor assembly, and the calibration of the apparatus for controlling precursor flow, wherein the sensor assembly comprises an infrared light source, a visible light source, or an ultraviolet light source, and a corresponding detector.

2. The method of claim 1 , wherein the ampoule further comprises a known amount of a chemical standard, and wherein the calibration of the apparatus for controlling precursor flow is further based on the measured signal from the sensor assembly correlated to an amount of the chemical standard present within the flow-through cell.

3. The method of claim 1 , wherein the apparatus for controlling precursor flow is configured such that the carrier gas flows from the inlet through the flow-through cell of the sensor assembly and through the outlet bypassing the ampoule; and

flowing the carrier gas through the inlet through the flow-through cell and through the outlet bypassing the ampoule and measuring a signal from the sensor assembly in the absence of the precursor to obtain a background signal from the sensor assembly, wherein the calibration of the apparatus for controlling precursor flow is further based on the background signal from the sensor assembly.

4. The method of claim 3 , wherein the apparatus for controlling precursor flow further comprises a first pressure sensor disposed between the inlet and the ampoule, and a second pressure sensor disposed downstream from the flow-through cell of the sensor assembly; and

flowing the carrier gas through the inlet through the flow-through cell and through the outlet bypassing the ampoule and measuring a first pressure using the first pressure sensor, and a second pressure using the second pressure sensor, under a plurality of different carrier gas flow rates while bypassing the ampoule and determining a background pressure difference between the first pressure and the second pressure for each of the plurality of different carrier gas flow rates; and

flowing the carrier gas at an operative carrier gas flow rate through the inlet of the apparatus for controlling precursor flow, through the ampoule, through the flow-through cell, and through the outlet into the deposition chamber, while measuring the first pressure and the second pressure and determining an operative pressure difference at the operative carrier gas flow rate, wherein the calibration of the apparatus for controlling precursor flow is further based on each of the background pressure differences, and

wherein the determining of the amount of the precursor flowing into the deposition chamber is based on the operative carrier gas flow rate, and the operative pressure difference.

5. The method of claim 2 , wherein the chemical standard is selected based on having a chemical species or moiety having similar absorption spectra to the precursor.

6. The method of claim 1 , wherein the apparatus for controlling precursor flow is periodically calibrated according to A. and B. to compensate for a drift in sensor accuracy.

7. The method of claim 3 , wherein the background signal from the sensor assembly is periodically measured and utilized to recalibrate the apparatus for controlling precursor flow to compensate for a drift in sensor accuracy.

8. A method of controlling an amount of a precursor flowing into a deposition chamber from an apparatus for controlling precursor flow, comprising:

A. forming an enclosed volume having a known volume between an inlet and an outlet of the apparatus for controlling precursor flow, wherein the enclosed volume comprises an ampoule comprising the precursor and a flow-through cell of a sensor assembly, and wherein the enclosed volume is controlled to be isothermal at a known temperature sufficient to produce a portion of the precursor in a gaseous state within the enclosed volume;

B. measuring a signal from the sensor assembly and performing a calibration of the apparatus for controlling precursor flow based on the measured signal from the sensor assembly, a known vapor pressure of the precursor at the known temperature, and the known volume; and

C. flowing a carrier gas at an operative carrier gas flow rate through the inlet, through the ampoule, through the flow-through cell, and through the outlet into the deposition chamber, while measuring the signal from the sensor assembly, and determining an amount of the precursor flowing into the deposition chamber based on the operative carrier gas flow rate, the signal from the sensor assembly, and the calibration of the apparatus for controlling precursor flow, wherein the sensor assembly is disposed upstream of a trap, and wherein the calibration of the apparatus for controlling precursor flow is further based on collecting the precursor in the trap and measuring a total mass of the precursor present in the trap.

9. An apparatus for controlling precursor flow to a deposition chamber, comprising:

an ampoule to output a precursor;

a sensor assembly communicatively coupled to the ampoule; and

a control system, wherein the control system is configured to calibrate the sensor assembly during flow of the precursor or a chemical standard through the sensor assembly, wherein the control system is configured to control the apparatus to:

A. form an enclosed volume having a known volume between an inlet and an outlet of the apparatus for controlling precursor flow, wherein the enclosed volume comprises the ampoule comprising the precursor and a flow-through cell of the sensor assembly, and wherein the enclosed volume is controlled to be isothermal at a known temperature sufficient to produce a portion of the precursor in a gaseous state within the enclosed volume;

B. measure a signal from the sensor assembly and performing a calibration of the apparatus for controlling precursor flow based on the measured signal from the sensor assembly, a known vapor pressure of the precursor at the known temperature, and the known volume; and

C. flow a carrier gas at an operative carrier gas flow rate through the inlet, through the ampoule, through the flow-through cell, and through the outlet into the deposition chamber, while measuring the signal from the sensor assembly, and determining an amount of the precursor flowing into the deposition chamber based on the operative carrier gas flow rate, the signal from the sensor assembly, and the calibration of the apparatus for controlling precursor flow, wherein the sensor assembly comprises an infrared light source, a visible light source, or an ultraviolet light source, and a corresponding detector.

10. The apparatus of claim 9 , wherein the sensor assembly is disposed upstream of a trap and wherein the calibration of the apparatus for controlling precursor flow is further based on collecting the precursor in the trap and measuring a total mass of the precursor present in the trap.

11. The apparatus of claim 9 , wherein a first pressure sensor is disposed between the inlet and the ampoule and a second pressure sensor is disposed downstream from the flow-through cell of the sensor assembly, and

the control system is configured to flow the carrier gas through the inlet through the flow-through cell and through the outlet bypassing the ampoule and measuring a first pressure using the first pressure sensor, and a second pressure using the second pressure sensor, under a plurality of different carrier gas flow rates while bypassing the ampoule and determining a background pressure difference between the first pressure and the second pressure for each of the plurality of different carrier gas flow rates; and

flow the carrier gas at an operative carrier gas flow rate through the inlet of the apparatus for controlling precursor flow, through the ampoule, through the flow-through cell, and through the outlet into the deposition chamber, while measuring the first pressure and the second pressure and determining an operative pressure difference at the operative carrier gas flow rate, wherein the calibration of the apparatus for controlling precursor flow is further based on each of the background pressure differences, and

wherein the determining of the amount of the precursor flowing into the deposition chamber is based on the operative carrier gas flow rate, and the operative pressure difference.

12. The apparatus of claim 9 , wherein the chemical standard is preselected.