Device for measuring plasma ion density and apparatus for diagnosing plasma using the same

1. A device for measuring a plasma ion density, comprising:

a transceiver antenna configured to apply and receive a microwave, of which a frequency is varied, to and from plasma; and

a frequency analyzer configured to analyze one frequency of the microwave received from the transceiver antenna and measure a cut-off frequency of mass center momentum of a plurality of types of ions,

wherein the frequency of the microwave applied to the plasma is varied in a range of 100 kHz to 500 MHz.

2. The device of claim 1 , further comprising a converter configured to convert the cut-off frequency, which is measured by the frequency analyzer, into the plasma ion density.

3. The device of claim 1 , wherein the transceiver antenna includes a probe-type antenna.

4. The device of claim 1 , wherein the transceiver antenna includes a loop-type antenna.

5. The device of claim 1 , wherein the transceiver antenna includes a planar ring-type antenna.

6. The device of claim 1 , wherein the transceiver antenna includes a planar cone-type antenna.

7. The device of claim 1 , wherein the transceiver antenna includes a planar bar-type antenna.

8. A method of diagnosing plasma, comprising:

generating plasma in a vacuum chamber;

applying and receiving a microwave, of which a frequency is varied in the vacuum chamber, to and from the plasma;

analyzing the frequency of the microwave received from a transceiver antenna and measuring a cut-off frequency;

converting the cut-off frequency, which is measured by a frequency analyzer, into a plasma ion density and a plasma electron density; and

comparing the plasma ion density with the plasma electron density, which are converted by a converter.