Optical device
An optical device includes: a base that includes a main surface; a movable unit that includes an optical function unit; and an elastic support unit that is connected between the base and the movable unit, and supports the movable unit so that the movable unit is movable along a first direction perpendicular to the main surface. The elastic support unit includes a lever, a first torsion support portion that extends along a second direction perpendicular to the first direction and is connected between the lever and the movable unit, and a second torsion support portion that extends along the second direction and is connected between the lever and the base. A torsional spring constant of the first torsion support portion is greater than a torsional spring constant of the second torsion support portion.
1. An optical device comprising:
a base that includes a main surface;
a movable unit that includes an optical function unit; and
an elastic support unit that is connected between the base and the movable unit, and supports the movable unit so that the movable unit is movable along a first direction perpendicular to the main surface,
wherein the elastic support unit includes a lever, a first torsion support portion, and a second torsion support portion, wherein the first torsion support member extends along a second direction perpendicular to the first direction, the first torsion support member is connected between the lever and the movable unit, the second torsion support portion extends along the second direction, and the second torsion support member is connected between the lever and the base, and
a torsional spring constant of the first torsion support portion is greater than a torsional spring constant of the second torsion support portion.
2. The optical device according to claim 1 ,
wherein a width of the first torsion support portion is wider than a width of the second torsion support portion when viewed from the first direction.
3. The optical device according to claim 1 ,
wherein a length of the first torsion support portion is shorter than a length of the second torsion support portion when viewed from the first direction.
4. The optical device according to claim 1 ,
wherein the base, the movable unit, and the elastic support unit are constituted by an SOI substrate.
5. The optical device according to claim 1 , further comprising:
a fixed comb electrode that is provided to the base and includes a plurality of fixed comb fingers; and
a movable comb electrode that is provided to at least one of the movable unit and the elastic support unit and includes a plurality of movable comb fingers which are disposed alternately with the plurality of fixed comb fingers.
6. The optical device according to claim 1 , consisting of a pair of the elastic support unit.