Soft X-ray static electricity removal apparatus
Provided is a soft X-ray static electricity removal apparatus that has achieved an increase in the amount of ionized air discharged, with a simple structure. A soft X-ray static electricity removal apparatus ( 1 ) includes a soft X-ray generation device ( 90 ), a container ( 10 ), a soft X-ray shielding sheet ( 20 ), and an insulating layer ( 50 ). The soft X-ray generation device generates soft X-rays ( 92 ). The container ( 10 ) has an outlet ( 12 ) from which ionized air ( 100 ) that has been ionized with the soft X-rays flows out. The soft X-ray shielding sheet ( 20 ) is used at the outlet of the container and includes a first outer sheet ( 30 ), an interlayer sheet ( 34 ), and a second outer sheet ( 40 ) which are formed of a material opaque to the soft X-rays. The first outer sheet has supply ports ( 32 ) for the ionized air formed therein; the interlayer sheet has an ionized air passage ( 38 ) formed therein, which includes ionized air inlet openings ( 36 ) that communicate with the supply ports; and the second outer sheet has a discharge port ( 42 ) formed therein, which communicates with the ionized air passage. The supply ports, the ionized air passage, and the discharge port communicate with each other to provide an ionized air transmission portion ( 44 ). The insulating layer insulates the soft X-ray shielding sheet and the container from each other.
1. A soft X-ray static electricity removal apparatus comprising:
a soft X-ray generation device that generates soft X-rays for ionizing air;
a container having an outlet, ionized air flowing out from the outlet, the ionized air having been ionized with the soft X-rays;
a soft X-ray shielding sheet that is used at the outlet of the container and includes:
a first outer sheet formed of a material opaque to the soft X-rays;
an interlayer sheet formed of a material opaque to the soft X-rays; and
a second outer sheet formed of a material opaque to the soft X-rays;
wherein the first outer sheet has a supply port for the ionized air formed therein;
the interlayer sheet has an ionized air passage formed therein, the ionized air passage having an ionized air inlet opening, the ionized air inlet opening communicating with the supply port; and
the second outer sheet having a discharge port formed therein, the discharge port communicating with the ionized air passage;
and wherein the first outer sheet, the interlayer sheet, and the second outer sheet are stacked and adhered, and the supply port, the ionized air passage, and the discharge port communicate with each other to provide an ionized air transmission portion; and
an insulating layer that insulates the soft X-ray shielding sheet and the container from each other.
2. The soft X-ray static electricity removal apparatus of claim 1 ,
wherein the ionized air passage extending from the supply port to the discharge port has a bent portion.
3. The soft X-ray static electricity removal apparatus of claim 1 ,
wherein the insulating layer is formed of ceramic.
4. The soft X-ray static electricity removal apparatus of claim 3 ,
wherein the soft X-ray shielding sheet has a circular cross section, and
the insulating layer has a plurality of arc-shaped ceramics, the ceramics being arranged so as to surround an outer periphery of the soft X-ray shielding sheet.
5. The soft X-ray static electricity removal apparatus of claim 1 , further comprising:
a power supply device that applies a potential difference to the container and the soft X-ray shielding sheet.
6. The soft X-ray static electricity removal apparatus of claim 1 , further comprising:
a casing that holds the insulating layer at the outlet of the container so as to have the insulating layer and the soft X-ray shielding sheet arranged at the outlet, the casing having a gap between itself and the soft X-ray shielding sheet.