IP Library Granted Patent US 11,769,710
Granted Patent B2
US 11,769,710 · App. 16/833,034 · Granted Sep 26, 2023

Heterogeneous integration module comprising thermal management apparatus

Inventors: Gamal Refai-Ahmed (Santa Clara, CA); Suresh Ramalingam (Fremont, CA); Ken Chang (Los Altos Hills, CA); Mayank Raj (Sunnyvale, CA); Chuan Xie (Fremont, CA); Yohan Frans (Palo Alto, CA)
Assignee: XILINX, INC.
H01L23/473H01L23/3675H01L25/167H01L2023/4062
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Quick Facts
Patent No.
US 11,769,710
App. No.
16/833,034
Granted
Sep 26, 2023
Kind
B2
Abstract

Some examples described herein provide for a heterogeneous integration module (HIM) that includes a thermal management apparatus. In an example, an apparatus (e.g., a HIM) includes a wiring substrate, a first component, a second component, and a thermal management apparatus. The first component and the second component are communicatively coupled together via the wiring substrate. The thermal management apparatus is in thermal communication with the first component and the second component. The thermal management apparatus has a first thermal energy flow path for dissipating thermal energy generated by the first component and has a second thermal energy flow path for dissipating thermal energy generated by the second component. The first thermal energy flow path has a lower thermal resistivity than the second thermal energy flow path.

Claims (115)

1. An apparatus comprising:

a wiring substrate;

a first component;

a second component, the first component and the second component being communicatively coupled together via the wiring substrate;

a stiffener configured to be mechanically attached to a package substrate; and

a thermal management apparatus in thermal communication with the first component and the second component, the thermal management apparatus comprises:

a monolithic main portion overlying the first component and the second component;

a first separate island attached to the main portion, and contacting a first thermal interface material disposed on the second component, the first separate island being spring-biased against the main portion, wherein the thermal management apparatus has a first thermal energy flow path for dissipating thermal energy generated by the first component and a second thermal energy flow path for dissipating thermal energy generated by the second component, the first thermal energy flow path having a lower thermal resistivity than the second thermal energy flow path; and

a flange portion extending perpendicularly from a support portion of the thermal management apparatus and away from the main portion, the flange portion coupled to the stiffener via a first fastener capturing a first spring and a second fastener capturing a second spring, wherein the stiffener is configured to apply a downward force between the first separate island and the second component.

2. The apparatus of claim 1 , wherein the first component is an optical device, photonic device, or a combination thereof, and the second component is an electrical device.

3. The apparatus of claim 1 , wherein:

a second thermal interface material is disposed on the first component; and

the thermal management apparatus is disposed on and contacting the second thermal interface material, and wherein:

the thermal management apparatus further comprises:

an integral island portion integrally formed with the main portion; and

a third thermal interface material disposed between the first separate island and the main portion;

the integral island portion contacts the second thermal interface material;

the first thermal energy flow path is through the integral island portion and the main portion;

and

the second thermal energy flow path is through the first separate island, the third thermal interface material, and the main portion.

4. The apparatus of claim 1 , wherein:

a second thermal interface material is disposed on the first component; and

the thermal management apparatus is disposed on and contacting the second thermal interface material, and wherein:

the thermal management apparatus further comprises:

a second separate island attached to the main portion, the second separate island being spring-biased against the main portion;

a third thermal interface material disposed between the second separate island and the main portion; and

a fourth thermal interface material disposed between the first separate island and the main portion;

the second separate island contacts the second thermal interface material;

the first thermal energy flow path is through the second separate island, the third thermal interface material, and the main portion; and

the second thermal energy flow path is through the first separate island, the fourth thermal interface material, and the main portion.

5. The apparatus of claim 1 further comprising a heat exchanger attached to the thermal management apparatus, the heat exchanger including a fluid pump, a compressor, or a combination thereof.

6. The apparatus of claim 1 further comprising:

the package substrate wherein the stiffener is mechanically attached to the package substrate, and

wherein:

the wiring substrate is an interposer;

the first component and the second component are each attached to the interposer;

the interposer is attached to the package substrate;

the stiffener is laterally around the interposer; and

the support portion extends perpendicularly from the main portion, and the flange portion extends away from the main portion;

the main portion is in thermal communication with the first component and the second component.

7. A system comprising:

a heterogeneous integration module comprising:

a wiring substrate;

a stiffener configured to be mechanically attached to a package substrate

a first component attached to the wiring substrate;

a second component attached to the wiring substrate, the first component and the second component being communicatively coupled together through the wiring substrate;

a first thermal interface material disposed on the first component;

a second thermal interface material disposed on the second component; and

a thermal management apparatus contacting the first thermal interface material and the second thermal interface material, the thermal management apparatus comprises:

a monolithic main portion overlying the first component and the second component;

a first separate island attached to the main portion, and contacting the second thermal interface material, the first separate island being spring-biased against the main portion, wherein the thermal management apparatus has a first thermal energy flow path from where the thermal management apparatus contacts the first thermal interface material and having a second thermal energy flow path from where the thermal management apparatus contacts the second thermal interface material, the first thermal energy flow path having a lower thermal resistivity than the second thermal energy flow path; and

a flange portion extending perpendicularly from a support portion of the thermal management apparatus and away from the main portion, the flange portion coupled to the stiffener via a first fastener capturing a first spring and a second fastener capturing a second spring, wherein the stiffener is configured to apply a downward force between the first separate island and the second component.

8. The system of claim 7 , wherein the first component is an optical device, a photonic device, or a combination thereof, and the second component is an electrical device.

9. The system of claim 7 , wherein:

the thermal management apparatus further comprises:

an integral island portion integrally formed with the main portion; and

a third thermal interface material disposed between the first separate island and the main portion;

the integral island portion contacts the first thermal interface material;

the first thermal energy flow path is through the integral island portion and the main portion; and

the second thermal energy flow path is through the first separate island, the third thermal interface material, and the main portion.

10. The system of claim 7 , wherein:

the thermal management apparatus further comprises:

a second separate island attached to the main portion, the second separate island being spring-biased against the main portion;

a third thermal interface material disposed between the second separate island and the main portion; and

a fourth thermal interface material disposed between the first separate island and the main portion;

the second separate island contacts the first thermal interface material;

the first thermal energy flow path is through the second separate island, the third thermal interface material, and the main portion;

the first separate island contacts the second thermal interface material; and

the second thermal energy flow path is through the first separate island, the fourth thermal interface material, and the main portion.

11. The system of claim 7 further comprising a printed circuit board, the heterogeneous integration module being attached to the printed circuit board.

12. The system of claim 11 further comprising:

a first heat exchanger attached to the thermal management apparatus, the first heat exchanger comprising a fluid pump, a compressor, or a combination thereof; and

a second heat exchanger disposed on the printed circuit board, the second heat exchanger comprising a serpentine pipe and fins, the serpentine pipe being attached to and extending through the fins, the serpentine pipe being fluidly coupled with the first heat exchanger.

13. The system of claim 12 , wherein the first heat exchanger includes an internal volume through which fluid is to flow, the internal volume permitting pooling of the fluid in operation.

14. The system of claim 7 , wherein the heterogeneous integration module further comprises:

the package substrate, wherein the stiffener is mechanically attached to the package substrate, and

wherein:

the wiring substrate is an interposer;

the first component and the second component are each attached to the interposer;

the interposer is attached to the package substrate;

the stiffener is laterally around the interposer; and

the support portion extends perpendicularly from the main portion, and the flange portion extends away from the main portion;

the main portion is in thermal communication with the first component and the second component.

15. A method for forming a heterogeneous integration module, the method comprising:

assembling a first component and a second component on a wiring substrate; and

securing a thermal management apparatus in thermal communication with the first component and the second component, the thermal management apparatus comprising:

a monolithic main portion overlying the first component and the second component;

a first separate island attached to the main portion, and contacting a first thermal interface material disposed on the second component, the first separate island being spring-biased against the main portion, the thermal management apparatus having a first thermal energy flow path for thermal energy generated by the first component and having a second thermal energy flow path for thermal energy generated by the second component, the first thermal energy flow path having a lower thermal resistivity than the second thermal energy flow path; and

a flange portion extending perpendicularly from a support portion of the thermal management apparatus and away from the main portion, the flange portion coupled to a stiffener via a first fastener capturing a first spring and a second fastener capturing a second spring, wherein the stiffener is configured to be attached to a package substrate and apply a downward force between the first separate island and the second component.

16. The method of claim 15 , wherein the first component is an optical device, a photonic device, or a combination thereof, and the second component is an electrical device.

17. The method of claim 15 , wherein:

the thermal management apparatus further comprises:

an integral island portion integrally formed with the main portion; and

the first thermal energy flow path is through the integral island portion and the main portion; and

the second thermal energy flow path is through the first separate island, the first thermal interface material, and the main portion.

18. The method of claim 15 , wherein:

the thermal management apparatus further comprises:

a second separate island attached to the main portion, the second separate island being spring-biased against the main portion;

a second thermal interface material disposed between the second separate island and the main portion; and

a third thermal interface material disposed between the second separate island and the main portion;

the first thermal energy flow path is through the second separate island, the second thermal interface material, and the main portion; and

the second thermal energy flow path is through the first separate island, the third thermal interface material, and the main portion.

19. The method of claim 15 , wherein:

assembling the first component and the second component on the wiring substrate comprises:

attaching the first component and the second component to an interposer, the interposer being the wiring substrate; and

attaching the interposer to the package substrate; and

securing the thermal management apparatus comprises:

attaching the stiffener to the package substrate; and

attaching the thermal management apparatus to the stiffener.

20. The apparatus of claim 1 further comprising:

the package substrate, wherein the stiffener is mechanically attached to the package substrate, and wherein:

the wiring substrate is attached to the package substrate,

the first separate island is attached to the main portion along a periphery of the first separate island via a third fastener and a fourth fastener,

the first separate island being spring-biased against the main portion via a first spring captured by the third fastener and a second spring captured by the fourth fastener, and

the third fastener, the fourth fastener, the first spring, and the second spring are disposed outside a periphery of the second component.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 1, 2021
From: REFAI-AHMED, GAMAL; RAMALINGAM, SURESH; CHANG, KEN; RAJ, MAYANK; XIE, CHUAN; FRANS, YOHAN
To: XILINX, INC.
Reel/Frame 055442/0469 →
Continuity (1)
Related Publication 20210305127A1 · Sep 30, 2021
Cited By (27)
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