Mass transfer device and mass transfer method
Provided are a mass transfer device and a mass transfer method. The mass transfer device is provided with multiple channels, a first opening of each channel is arranged on a first surface of the mass transfer device, a second opening of each channel is arranged on a second surface of the mass transfer device, and the distances between the channels are gradually increased along a direction from the first surface to the second surface. In the provided mass transfer method, through a laser irradiation mode, the Micro-LEDs are separated from the first substrate and enter the channels of the mass transfer device through the first openings, and falling into Micro-LED to-be-installed positions on a second substrate through the second openings of the channels, thereby transferring the Micro-LEDs from the first substrate to the second substrate.
1. A mass transfer device, wherein the mass transfer device is provided with multiple channels of which two ends are opened, each channel comprises a first opening and a second opening, the first opening of each channel is arranged on a first surface of the mass transfer device, the second opening of each channel is arranged on a second surface opposite to the first surface, and distances between the channels are gradually increased along a direction from the first surface to the second surface.
2. The mass transfer device as claimed in claim 1 , wherein the channels are straight lines.
3. A mass transfer method, applied to the mass transfer device as claimed in claim 1 , and used for transferring Micro-LEDs from a first substrate to a second substrate, wherein the mass transfer method comprises:
placing the first substrate with multiple Micro-LEDs above the first surface of the mass transfer device, and making each Micro-LED on the first substrate respectively correspond to each first opening on the mass transfer device;
placing the second substrate below the second surface of the mass transfer device, and making each Micro-LED to-be-installed position on the second substrate respectively correspond to each second opening on the mass transfer device; and
irradiating one side, away from the Micro-LEDs, of the first substrate by using a laser, so that the multiple Micro-LEDs are separated from the first substrate and respectively entering the channels of the mass transfer device through the first openings, and falling into the Micro-LED to-be-installed positions on the second substrate via the second openings;
wherein the first substrate is a transparent substrate.
4. The mass transfer method as claimed in claim 3 , wherein the second substrate is provided with a connection material, after the Micro-LEDs falling into the Micro-LED to-be-installed positions on the second substrate, the method further comprises:
fixing the Micro-LEDs on the second substrate by the connection material.
5. The mass transfer method as claimed in claim 4 , wherein the connection material is a welding flux.
6. The mass transfer method as claimed in claim 3 , wherein a material of a portion, connected with the first substrate, of the Micro-LED is GaN.
7. The mass transfer method as claimed in claim 6 , wherein the first substrate is a growing substrate of the Micro-LEDs.
8. The mass transfer method as claimed in claim 3 , wherein the Micro-LEDs are connected with the first substrate by photolytic glue.
9. The mass transfer method as claimed in claim 8 , wherein before making the first substrate to be placed above the first surface of the mass transfer device, the method further comprises:
transferring the Micro-LEDs on the growing substrate to the first substrate.
10. The mass transfer method as claimed in claim 9 , when the Micro-LED is in a state of connecting with the first substrate, an existing electrode of the Micro-LED faces to one side away from the first substrate.
11. The mass transfer method as claimed in claim 10 , wherein transferring the Micro-LEDs on the growing substrate to the first substrate comprises:
installing a glue material on a third substrate, and enabling the Micro-LEDs on the growing substrate to be glued to the third substrate by the glue material; and
installing the photolytic glue on the first substrate, and enabling the Micro-LEDs on the third substrate to be glued to the first substrate by the photolytic glue.
12. The mass transfer method as claimed in claim 3 , wherein the second substrate is provided with through holes, before irradiating one side, away from the Micro-LEDs, of the first substrate by using the laser, the method further comprises:
installing a vacuum device below the second substrate, and forming vacuum below the second substrate by the vacuum device.
13. The mass transfer method as claimed in claim 12 , wherein the through holes are installed corresponding to the Micro-LED to-be-installed positions on the second substrate.
14. The mass transfer method as claimed in claim 3 , wherein before irradiating one side, away from the Micro-LEDs, of the first substrate by using the laser, the method further comprises:
installing an electrostatic chuck below the second substrate.
15. The mass transfer method as claimed in claim 14 , wherein a material of the mass transfer device is an anti-static material.
16. A mass transfer method, applied to the mass transfer device as claimed in claim 2 , and used for transferring Micro-LEDs from a first substrate to a second substrate, wherein the mass transfer method comprises:
placing the first substrate with multiple Micro-LEDs above the first surface of the mass transfer device, and making each Micro-LED on the first substrate respectively correspond to each first opening on the mass transfer device;
placing the second substrate below the second surface of the mass transfer device, and making each Micro-LED to-be-installed position on the second substrate respectively correspond to each second opening on the mass transfer device; and
irradiating one side, away from the Micro-LEDs, of the first substrate by using a laser, so that the multiple Micro-LEDs are separated from the first substrate and respectively entering the channels of the mass transfer device through the first openings, and falling into the Micro-LED to-be-installed positions on the second substrate via the second openings;
wherein the first substrate is a transparent substrate.
17. The mass transfer method as claimed in claim 4 , wherein the second substrate is provided with through holes, before irradiating one side, away from the Micro-LEDs, of the first substrate by using the laser, the method further comprises:
installing a vacuum device below the second substrate, and forming vacuum below the second substrate by the vacuum device.
18. The mass transfer method as claimed in claim 5 , wherein the second substrate is provided with through holes, before irradiating one side, away from the Micro-LEDs, of the first substrate by using the laser, the method further comprises:
installing a vacuum device below the second substrate, and forming vacuum below the second substrate by the vacuum device.
19. The mass transfer method as claimed in claim 6 , wherein the second substrate is provided with through holes, before irradiating one side, away from the Micro-LEDs, of the first substrate by using the laser, the method further comprises:
installing a vacuum device below the second substrate, and forming vacuum below the second substrate by the vacuum device.
20. The mass transfer method as claimed in claim 7 , wherein the second substrate is provided with through holes, before irradiating one side, away from the Micro-LEDs, of the first substrate by using the laser, the method further comprises:
installing a vacuum device below the second substrate, and forming vacuum below the second substrate by the vacuum device.