Integrated heater and temperature measurement

1. A method for controlling a temperature of a device under test, comprising:

during a heating mode of a heating-sensing element:

sending, using a controller, one or more control signals to a drive voltage circuit, and

generating, using the drive voltage circuit, power provided to the heating-sensing element; and

during a sensing mode of the heating-sensing element:

sending, using a current circuit, a current to the heating-sensing element,

determining, using a sense circuit, a voltage drop across the heating-sensing element, and

determining, using the controller, the temperature of the heating-sensing element based on the current and the voltage drop,

wherein the heating-sensing element is operated in the heating mode and the sensing mode during different portions of a time period.

2. The method of claim 1 , wherein determining the temperature of the device under test comprises:

determining a resistance of the heating-sensing element based on the current and the voltage drop, wherein the temperature of the device under test is related to the determined resistance.

3. The method of claim 1 , wherein a duration of the heating mode varies dynamically based on a difference between the determined temperature and a set point temperature.

4. The method of claim 1 , wherein a duration of the sensing mode is pre-determined.

5. The method of claim 1 , wherein the heating-sensing element is operated in an off mode during a portion of the time period.

6. The method of claim 1 , further comprising:

dynamically adjusting properties of the heating mode based on the determined temperature.

7. The method of claim 6 , wherein adjusting the properties of the heating mode comprises:

decreasing a duration of the heating mode for a low temperature difference between the determined temperature and a set point temperature;

increasing the duration of the heating mode for a high temperature difference between the determined temperature and the set point temperature; or

maintaining the duration of the heating mode for a zero temperature difference between the determined temperature and the set point temperature.

8. The method of claim 1 , wherein the time period is 200 μs.

9. The method of claim 1 , wherein the heating-sensing element is included in a plurality of heating-sensing elements of an integrated heater and temperature measurement device, wherein the plurality of heating-sensing elements operate in the sensing mode at the same time.

10. The method of claim 1 , wherein the heating-sensing element is included in a plurality of heating-sensing elements of an integrated heater and temperature measurement device, wherein the plurality of heating-sensing elements operate in an off mode at the same time.

11. The method of claim 1 , further comprising:

determining whether one or more criteria have been met, wherein the one or more criteria comprise: the determined temperature of the device under test being greater than a temperature threshold, a power of the device under test being greater than a power threshold, the heating-sensing element being shorted, or the heating-sensing element being an open circuit.

12. The method of claim 1 , the method further comprising:

in accordance with meeting the one or more criteria, during the heating mode of the heating-sensing element, preventing the drive voltage circuit from providing power to the heating-sensing element.

13. An integrated heater and temperature measurement device, comprising:

one or more heating-sensing elements configured to operate in a heating mode and a sensing mode during different portions of a time period; and

one or more heating-sensing circuits, wherein at least one of the one or more heating-sensing circuits comprises:

a drive voltage circuit configured to provide power to the one or more heating-sensing elements to generate heat during the heating mode;

a current circuit configured to send a current to a corresponding heating-sensing element during the sensing mode;

a sense voltage circuit configured to determine a voltage drop across the corresponding heating-sensing element; and

a controller configured to determine a temperature of the corresponding heating-sensing element based on the voltage drop.

14. The integrated heater and temperature measurement device of claim 13 , further comprising:

one or more sets of pins coupled to the one or more heating-sensing elements, wherein a number of the one or more sets of pins is equal to a number of the one or more heating-sensing elements.

15. The integrated heater and temperature measurement device of claim 13 , further comprising:

a first layer of insulating material, wherein the at least one heating-sensing element is disposed on the first layer of insulating material;

a second layer of insulating material disposed on the at least one heating-sensing element;

a shield disposed on the second layer of insulating material; and

a third layer of insulating material disposed on the shield.

16. The integrated heater and temperature measurement device of claim 13 , wherein the one or more heating-sensing elements comprise:

a first heating-sensing element configured to heat and determine a temperature of a first zone of a device under test; and

a second heating-sensing element configured to heat and determine a temperature of a second zone of the device under test.

17. The integrated heater and temperature measurement device of claim 13 , wherein the one or more heating-sensing elements comprise at least one controller that dynamically adjusts one or more properties of the heating mode, the sensing mode, the time period, or a combination thereof based on the determined temperature.

18. The integrated heater and temperature measurement device of claim 13 , wherein the one or more heating-sensing circuits are coupled to the one or more heating-sensing elements using 4-wire connections.

19. The integrated heater and temperature measurement device of claim 18 , wherein each 4-wire connection comprises wires coupled to 2-wire connections, each 2-wire connection split outside of the respective heating-sensing element.

20. The integrated heater and temperature measurement device of claim 18 , wherein each 4-wire connection comprises wires coupled to 2-wire connections, each 2-wire connection split inside of the respective heating-sensing element.

21. The integrated heater and temperature measurement device of claim 13 , wherein a zone corresponding to the respective heating-sensing element is smaller than the heating-sensing element.

22. The integrated heater and temperature measurement device of claim 13 , wherein the controller is further configured to determine whether one or more criteria have been met, the one or more criteria comprising: the determined temperature of the device under test being greater than a temperature threshold, a power of the device under test being greater than a power threshold, the heating-sensing element being shorted, or the heating-sensing element being an open circuit.

23. The integrated heater and temperature measurement device of claim 22 , wherein the one or more heating-sensing circuits comprise:

a failsafe circuit configured to, in accordance with meeting the one or more criteria, during the heating mode of the heating-sensing element, prevent the drive voltage circuit from providing power to the heating-sensing element.