IP Library Granted Patent US 11,869,821
Granted Patent B2
US 11,869,821 · App. 17/879,272 · Granted Jan 9, 2024

Semiconductor package having molding layer with inclined side wall

Inventors: Yeongkwon Ko (Hwaseong-si, KR); Seunghun Shin (Cheonan-si, KR); Junyeong Heo (Suwon-si, KR)
Assignee: SAMSUNG ELECTRONICS CO., LTD.
H01L23/3128H01L21/561H01L23/481H01L25/0652H01L25/0657H01L25/50H01L2225/06541
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Quick Facts
Patent No.
US 11,869,821
App. No.
17/879,272
Granted
Jan 9, 2024
Kind
B2
Abstract

A semiconductor package includes: a first semiconductor chip including a first surface and a second surface opposite to each other and including first through electrodes; at least a second semiconductor chip stacked on the first surface of the first semiconductor chip and comprising second through electrodes electrically connected to the first through electrodes; and a molding layer contacting the first surface of the first semiconductor chip and a side wall of the at least one second semiconductor chip and including a first external side wall connected to and on the same plane as a side wall of the first semiconductor chip, wherein the first external side wall of the molding layer extends to be inclined with respect to a first direction orthogonal to the first surface of the first semiconductor chip, and both the external first side wall of the molding layer and the side wall of the first semiconductor chip have a first slope that is the same for both the first external side wall of the molding layer and the side wall of the first semiconductor chip.

Claims (65)

1. A semiconductor package comprising:

a first semiconductor chip comprising a first surface and a second surface opposite to each other;

at least one second semiconductor chip stacked on the first surface of the first semiconductor chip; and

a molding layer contacting the first surface of the first semiconductor chip and a side wall of the at least one second semiconductor chip,

wherein an external side wall of the molding layer comprises:

a first external side wall portion extending from a lower end of the molding layer adjacent to the first semiconductor chip, to a first height to be inclined outward with respect to a vertical direction perpendicular to the first surface of the first semiconductor chip; and

a second external side wall portion extending from the first height to a second height to be inclined inward with respect to the vertical direction,

wherein the first external side wall portion of the molding layer extends, as a first slope, from the lower end of the molding layer to the first height, and

wherein the side wall of the at least one second semiconductor chip is not parallel to the first external side wall portion of the molding layer and the second external side wall portion of the molding layer.

2. The semiconductor package of claim 1 , wherein:

a side wall of the first semiconductor chip is entirely exposed to an outside of the semiconductor package, and

the side wall of the at least one second semiconductor chip is covered by the molding layer so as not to be exposed to the outside of the semiconductor package.

3. The semiconductor package of claim 1 , wherein, when viewed from a cross-section of the semiconductor package, a width of the semiconductor package in a direction parallel to the first surface of the first semiconductor chip gradually increases from the lower end of the molding layer to the first height and gradually decreases from the first height to the second height.

4. The semiconductor package of claim 1 , wherein the second external side wall portion extends with a second slope from the first height to the second height, and

wherein the external side wall of the molding layer further comprises a third external side wall portion extending with a third slope, which is different from the first slope and the second slope, from the second height to a third height.

5. The semiconductor package of claim 1 , wherein a side wall of the first semiconductor chip comprises:

an upper part connected to the first external side wall portion of the molding layer and extending with the same first slope as the first external side wall portion of the molding layer; and

a lower part having a slope different from the first slope.

6. The semiconductor package of claim 1 , wherein:

the at least one second semiconductor chip comprises a plurality of semiconductor chips stacked in the vertical direction, and

an uppermost semiconductor chip of the plurality of semiconductor chips is exposed to an outside of the semiconductor package.

7. The semiconductor package of claim 1 , wherein:

the first semiconductor chip comprises first through electrodes,

the at least one second semiconductor chip further comprises second through electrodes, and

the semiconductor package further comprises:

connection bumps disposed between the first semiconductor chip and the at least one second semiconductor chip, and electrically connecting between the first through electrodes and the second through electrodes; and

an insulating adhesive layer disposed between the first semiconductor chip and the at least one second semiconductor chip and surrounding the connection bumps.

8. The semiconductor package of claim 1 , wherein a first angle of inclination made between the first external side wall portion of the molding layer and the vertical direction is about 0.5° to about 5°.

9. A semiconductor package comprising:

a first semiconductor chip comprising a first surface and a second surface opposite to each other;

at least one second semiconductor chip stacked on the first surface of the first semiconductor chip; and

a molding layer contacting the first surface of the first semiconductor chip and a side wall of the at least one second semiconductor chip,

wherein an external side wall of the molding layer comprises:

a first external side wall portion extending with a first slope from a lower end of the molding layer adjacent to the first semiconductor chip to a first height;

a second external side wall portion extending with a second slope, which is different from the first slope, from the first height to a second height; and

a third external side wall portion extending with a third slope, which is different from the first slope and the second slope, from the second height to a third height.

10. The semiconductor package of claim 9 , wherein:

the first external side wall portion of the molding layer extends from the lower end of the molding layer to the first height to be inclined outward with respect to a vertical direction perpendicular to the first surface of the first semiconductor chip; and

the second external side wall portion of the molding layer extends from the first height to the second height to be inclined inward with respect to the vertical direction.

11. The semiconductor package of claim 10 , wherein an angle between the third external side wall portion of the molding layer and the vertical direction is less than an angle between the second external side wall portion of the molding layer and the vertical direction.

12. The semiconductor package of claim 9 , wherein the first semiconductor chip comprises a side wall having the same first slope as the first external side wall portion of the molding layer.

13. The semiconductor package of claim 9 , wherein a side wall of the first semiconductor chip comprises:

an upper part connected to the first external side wall portion of the molding layer and having the same first slope as the first external side wall portion of the molding layer; and

a lower part having a fourth slope different from the first slope.

14. The semiconductor package of claim 13 , wherein an angle between the upper part of the side wall of the first semiconductor chip and a vertical direction perpendicular to the first surface of the first semiconductor chip is greater than an angle between the lower part of the side wall of the first semiconductor chip and the vertical direction.

15. The semiconductor package of claim 14 , wherein:

the side wall of the first semiconductor chip is entirely exposed to an outside of the semiconductor package, and

the side wall of the at least one second semiconductor chip is covered by the molding layer so as not to be exposed to the outside of the semiconductor package.

16. The semiconductor package of claim 9 , wherein, when viewed from a cross-section of the semiconductor package, a width of the molding layer in a direction parallel to the first surface of the first semiconductor chip gradually increases from the lower end of the molding layer to the first height and gradually decreases from the first height to the second height.

17. A semiconductor package comprising:

an interposer;

a first semiconductor device mounted on the interposer;

a second semiconductor device mounted on the interposer so as to be spaced apart horizontally from the first semiconductor device and electrically connected to the first semiconductor device through the interposer; and

a package molding layer provided on the interposer and covering a side wall of the first semiconductor device and a side wall of the second semiconductor device,

wherein the first semiconductor device comprises: a first semiconductor chip comprising a first surface and a second surface opposite to each other; at least one second semiconductor chip mounted on the first semiconductor chip; and a molding layer covering a side wall of the at least one second semiconductor chip,

wherein the molding layer comprises a first side wall extending to be inclined with respect to a vertical direction orthogonal to the first surface of the first semiconductor chip,

wherein a side wall of the package molding layer is connected to a side wall of the interposer, and

wherein at least one of the side wall of the package molding layer and the side wall of the interposer extends to be inclined with respect to the vertical direction.

18. The semiconductor package of claim 17 , wherein the first side wall of the molding layer comprises:

a first external side wall portion extending with a first slope from a lower end of the molding layer adjacent to the first semiconductor chip, to a first height; and

a second external side wall portion extending with a second slope, which is different from the first slope, from the first height to a second height.

19. The semiconductor package of claim 18 , wherein the first side wall of the molding layer further comprises a third external side wall portion extending with a third slope, which is different from the first slope and second slope, from the second height to a third height.

20. The semiconductor package of claim 17 , wherein a side wall of the first semiconductor chip comprises:

an upper part connected to the first side wall of the molding layer and having a third slope; and

a lower part having a fourth slope different from the third slope.

Priority Claims (1)
KR 10-2020-0066025 · Jun 1, 2020 · national
Continuity (2)
Continuation 17141290 · Jan 5, 2021
Related Publication 20220375808A1 · Nov 24, 2022
Cited By (2)
US 12,469,836 US 12,471,296