Miniature combined multi-axis force sensor structure
A miniature combined multi-axis force sensor structure includes a sensor body, a first shell and a second shell, two horizontal main beams and two vertical main beams are arranged on the periphery of an inner round platform in a cross shape, tail ends of the horizontal main beams and the vertical main beams are each connected to a vertical floating beam, and the horizontal floating beams consist of two thin-walled cambered beams; two ends of the horizontal floating beam are each connected to an outer round platform by means of an annular platform; the sensor body is arranged between the first shell and the second shell; strain gauges are stuck on the horizontal main beams and the vertical main beams to form two Wheatstone bridges; and when force/torque acts on the cross beam, the sensor deforms, and the resistance value of strain gauge at corresponding position changes.
1. A miniature combined multi-axis force sensor structure, comprising a sensor body, a first shell and a second shell, wherein the sensor body comprises horizontal main beams, vertical main beams, horizontal floating beams, vertical floating beams, an inner round platform, an outer round platform and strain gauges;
the horizontal main beam and the vertical main beam form a cross beam, the horizontal main beam is horizontally arranged, the horizontal main beam is perpendicular to an axis of the inner round platform, the vertical main beam is vertically arranged, and the vertical main beam is parallel to the axis of the inner round platform;
the horizontal main beams consist of two rectangular thin-walled beams, each thin-walled beam having a rectangular cross section, and central axes of lower surfaces of tail ends of the horizontal main beam are each connected to one vertical floating beam;
the vertical main beams consist of two rectangular thin-walled beams, each thin-walled beam having a rectangular cross section, top surfaces of tail ends of the vertical main beam are each connected to one vertical floating beam, and four main beams are arranged on a periphery of the inner round platform in a cross shape;
the horizontal floating beams consist of two thin-walled cambered beams, two ends of the horizontal floating beam are each connected to the outer round platform by means of an annular platform;
the vertical floating beams consist of four rectangular thin-walled beams; two vertical floating beams are connected to the horizontal main beam, and bottom ends of the two vertical floating beams are connected to a horizontal floating beam annular platform; inner surfaces of the other two vertical floating beams are connected to the vertical main beam, and bottom ends of the other two vertical floating beams are connected to the horizontal floating beam; and the main beams and the vertical floating beams form a T shape;
the inner round platform is of a hollowed cylindrical structure with a circular section, the hollowed structure is used for being connected to an acupuncture needle in a interference fit manner, and a force and a torque act on the cross beam by means of the hollowed structure, the periphery of the inner round platform is connected to the main beams, and the strain gauges are stuck on a surface of the horizontal main beams and a surface of the vertical main beams;
the outer round platform is of a hollowed cylindrical structure with a circular section, and a side wall of the hollowed cylindrical structure is provided with four first fixing holes;
the sensor body is fixed between the first shell and the second shell by means of the first fixing holes, the a side wall of the first cylindrical shell and the a side wall of the second cylindrical shell are each provided with two second fixing holes corresponding to the first fixing holes, and an extension cylinder is arranged below the second shell.
2. A measuring principle of the miniature combined multi-axis force sensor structure according to claim 1 , wherein eight strain gauges are stuck on the horizontal main beams and the vertical main beams to form two Wheatstone bridges, four strain gauges are stuck on an upper surface and a lower surface of the horizontal main beams to form a bridge circuit sensitive to an upper and lower resistance F Z , four strain gauges are stuck on a side surface of the vertical main beams to form a bridge circuit sensitive to a torsional torque M Z , when force/torque acts on the cross beam, the sensor deforms, and a resistance value of the strain gauge at corresponding position changes, causing an output voltage of a corresponding bridge to change, and a value of the force/torque can be obtained by measuring a variation of the voltage.