Photoelectric conversion panel
A photoelectric conversion panel includes a thin-film transistor provided in a first region, a photoelectric conversion element provided in the first region, a first organic film having a first groove portion provided in a second region, a second organic film having a second groove portion provided in the second region and in a position different from that of the first groove portion, a first inorganic film formed so as to cover the first organic film and cover an inner surface of the first groove portion, and a second inorganic film formed so as to cover the second organic film and cover an inner surface of the second groove portion.
1. A photoelectric conversion panel comprising:
a thin-film transistor provided in a first region;
a photoelectric conversion element provided in the first region and formed at a higher layer than the thin-film transistor;
a first organic film covering the thin-film transistor and having a first groove portion provided in a second region differing from the first region;
a second organic film covering the photoelectric conversion element and having a second groove portion provided in the second region and in a position different from that of the first groove portion in a plan view;
a first inorganic film formed so as to cover the first organic film and cover an inner surface of the first groove portion;
a second inorganic film formed so as to cover the second organic film and cover an inner surface of the second groove portion; and
a protection element electrically connected to at least one of the thin-film transistor and the photoelectric conversion element and provided in the second region, wherein
the first inorganic film has a first opening formed in a position above the protection element,
the second inorganic film has a second opening formed in a position above the protection element,
the first groove portion has a frame shape surrounding both the first opening and the second opening in the plan view, and
the second groove portion has, in the plan view, a frame shape surrounding both the first opening and the second opening within or outside the first groove portion having the frame shape.
2. The photoelectric conversion panel according to claim 1 , wherein
the frame shape of the first groove portion further surrounds the first region in the plan view, and
the frame shape of the second groove portion further surrounds the first region within or outside the first groove portion having the frame shape.
3. The photoelectric conversion panel according to claim 1 , wherein the second inorganic film makes contact with the first inorganic film at a bottom of the second groove portion.
4. A photoelectric conversion panel comprising:
a thin-film transistor provided in a first region;
a photoelectric conversion element provided in the first region and formed at a higher layer than the thin-film transistor;
a first organic film covering the thin-film transistor and having a first groove portion provided in a second region differing from the first region;
a second organic film covering the photoelectric conversion element and having a second groove portion provided in the second region and in a position different from that of the first groove portion in a plan view;
a first inorganic film formed so as to cover the first organic film and cover an inner surface of the first groove portion;
a second inorganic film formed so as to cover the second organic film and cover an inner surface of the second groove portion; and
a protection element electrically connected to at least one of the thin-film transistor and the photoelectric conversion element and provided in the second region,
wherein
the first inorganic film has a first through hole formed in a position above the protection element,
the second inorganic film has a second through hole formed in a position above the protection element, and
the first groove portion and the second groove portion are both provided between each of the first and second through holes and the first region in the plan view.
5. The photoelectric conversion panel according to claim 4 , wherein the protection element is composed of a diode.