Annealing device and annealing method
There is provided an annealing device including a heating unit that heats a surface of an annealing object to temporarily melt an outer layer portion, a sensor that detects thermal radiation light from the annealing object heated by the heating unit, and a processing unit that estimates an annealing result of the annealing object on the basis of a waveform showing a temporal change in an intensity of the thermal radiation light detected by the sensor.
1. An annealing device comprising:
a heating unit that heats a surface of an annealing object to temporarily melt an outer layer portion;
a sensor that detects thermal radiation light from the annealing object heated by the heating unit; and
a processing unit that estimates an annealing result of the annealing object on a basis of a waveform showing a temporal change in an intensity of the thermal radiation light detected by the sensor,
wherein the waveform includes a peak corresponding to a start of melting and a peak corresponding to complete solidification, and
the processing unit estimates a melting depth of the outer layer portion of the annealing object on a basis of a melting time from the peak to the peak.
2. The annealing device according to claim 1 ,
wherein the processing unit obtains a melting time of the outer layer portion of the annealing object on a basis of a characteristic shape of the waveform showing the temporal change in the intensity of the thermal radiation light detected by the sensor.
3. An annealing device comprising:
a heating unit that heats a surface of an annealing object to temporarily melt an outer layer portion;
a sensor that detects thermal radiation light from the annealing object heated by the heating unit; and
a processing unit that estimates an annealing result of the annealing object on a basis of a waveform showing a temporal change in an intensity of the thermal radiation light detected by the sensor,
wherein the processing unit estimates a melting depth of the outer layer portion of the annealing object on a basis of an area of the waveform showing the temporal change in the intensity of the thermal radiation light detected by the sensor.
4. The annealing device according to claim 2 , further comprising:
a display unit that displays an image,
wherein the heating unit moves a heating spot on the surface of the annealing object, and
the processing unit associates a position in the surface of the annealing object with the estimated melting depth and displays a distribution of the melting depth on the display unit.
5. The annealing device according to claim 1 ,
wherein the processing unit determines a quality of the annealing result on a basis of the intensity of the thermal radiation light detected by the sensor.
6. An annealing method comprising:
heating a part of a surface of an annealing object to melt an outer layer portion; and
estimating an annealing result of the annealing object on a basis of a waveform showing a temporal change in an intensity of thermal radiation light from a heated spot of the annealing object,
wherein the waveform includes a peak corresponding to a start of melting and a peak corresponding to complete solidification, and
the annealing method further comprises:
estimating a melting depth of the outer layer portion of the annealing object on a basis of a melting time from the peak to the peak.