IP Library Granted Patent US 12,106,983
Granted Patent B2
US 12,106,983 · App. 17/336,932 · Granted Oct 1, 2024

Annealing device and annealing method

Inventor: Teppei Tanaka (Kanagawa, JP)
Assignee: SUMITOMO HEAVY INDUSTRIES, LTD.
H01L21/67248B23K26/354H01L21/268H01L21/67115H01L22/26
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Quick Facts
Patent No.
US 12,106,983
App. No.
17/336,932
Granted
Oct 1, 2024
Kind
B2
Abstract

There is provided an annealing device including a heating unit that heats a surface of an annealing object to temporarily melt an outer layer portion, a sensor that detects thermal radiation light from the annealing object heated by the heating unit, and a processing unit that estimates an annealing result of the annealing object on the basis of a waveform showing a temporal change in an intensity of the thermal radiation light detected by the sensor.

Claims (25)

1. An annealing device comprising:

a heating unit that heats a surface of an annealing object to temporarily melt an outer layer portion;

a sensor that detects thermal radiation light from the annealing object heated by the heating unit; and

a processing unit that estimates an annealing result of the annealing object on a basis of a waveform showing a temporal change in an intensity of the thermal radiation light detected by the sensor,

wherein the waveform includes a peak corresponding to a start of melting and a peak corresponding to complete solidification, and

the processing unit estimates a melting depth of the outer layer portion of the annealing object on a basis of a melting time from the peak to the peak.

2. The annealing device according to claim 1 ,

wherein the processing unit obtains a melting time of the outer layer portion of the annealing object on a basis of a characteristic shape of the waveform showing the temporal change in the intensity of the thermal radiation light detected by the sensor.

3. An annealing device comprising:

a heating unit that heats a surface of an annealing object to temporarily melt an outer layer portion;

a sensor that detects thermal radiation light from the annealing object heated by the heating unit; and

a processing unit that estimates an annealing result of the annealing object on a basis of a waveform showing a temporal change in an intensity of the thermal radiation light detected by the sensor,

wherein the processing unit estimates a melting depth of the outer layer portion of the annealing object on a basis of an area of the waveform showing the temporal change in the intensity of the thermal radiation light detected by the sensor.

4. The annealing device according to claim 2 , further comprising:

a display unit that displays an image,

wherein the heating unit moves a heating spot on the surface of the annealing object, and

the processing unit associates a position in the surface of the annealing object with the estimated melting depth and displays a distribution of the melting depth on the display unit.

5. The annealing device according to claim 1 ,

wherein the processing unit determines a quality of the annealing result on a basis of the intensity of the thermal radiation light detected by the sensor.

6. An annealing method comprising:

heating a part of a surface of an annealing object to melt an outer layer portion; and

estimating an annealing result of the annealing object on a basis of a waveform showing a temporal change in an intensity of thermal radiation light from a heated spot of the annealing object,

wherein the waveform includes a peak corresponding to a start of melting and a peak corresponding to complete solidification, and

the annealing method further comprises:

estimating a melting depth of the outer layer portion of the annealing object on a basis of a melting time from the peak to the peak.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 28, 2022
From: TANAKA, TEPPEI
To: SUMITOMO HEAVY INDUSTRIES, LTD.
Reel/Frame 061242/0777 →
Priority Claims (1)
JP 2018-226435 · Dec 3, 2018 · national
Continuity (2)
Continuation PCTJP2019045461 · Nov 20, 2019
Related Publication 20210287921A1 · Sep 16, 2021