Semiconductor device and electronic system including the same
A peripheral circuit structure may include peripheral circuits and peripheral circuit lines on a semiconductor substrate, a semiconductor layer including cell array and connection regions on the peripheral circuit structure, a stack including electrodes stacked on the semiconductor layer having a stepwise structure on the connection region, and a planarization insulating layer covering the stack, vertical structures on the cell array region penetrating the stack, including a data storage pattern, a dam group including insulating dams on the connection region penetrating the stack, penetration plugs penetrating the insulating dams and connected to respective peripheral circuit lines, the dam group including a first insulating dam farthest from the cell array region, the first insulating dam including first and second sidewall portions spaced apart, a difference between upper and lower thicknesses of the second sidewall portion of the first insulating dam is larger than that of the first sidewall portion.
1. A semiconductor device, comprising
a peripheral circuit structure on a semiconductor substrate, the peripheral circuit structure including peripheral circuits and peripheral circuit lines;
a semiconductor layer on the peripheral circuit structure, the semiconductor layer including a cell array region and a connection region;
a stack including electrodes stacked on the semiconductor layer, and having a stepwise structure on the connection region;
a planarization insulating layer covering the stack;
vertical structures on the cell array region, penetrating the stack, each of which includes a data storage pattern;
separation structures extending in a first direction and penetrating the stack;
cell contact plugs on the connection region penetrating the planarization insulating layer, and connected to respective ones of the electrodes;
a dam group including insulating dams on the connection region, penetrating the stack and arranged in the first direction; and
penetration plugs, which penetrate the insulating dams and are connected to respective ones of the peripheral circuit lines,
wherein the dam group includes a first insulating dam, which is farthest from the cell array region,
the first insulating dam includes a first sidewall portion and a second sidewall portion, which are spaced apart from each other in the first direction, and
a difference between an upper thickness and a lower thickness of the second sidewall portion of the first insulating dam is larger than a difference between an upper thickness and a lower thickness of the first sidewall portion.
2. The semiconductor device of claim 1 , wherein the upper thickness of the second sidewall portion of the first insulating dam is larger than the upper thickness of the first sidewall portion of the first insulating dam.
3. The semiconductor device of claim 1 , wherein
the first insulating dam further includes a third sidewall portion and a fourth sidewall portion connecting the first sidewall portion to the second sidewall portion, and
an upper thickness of the third sidewall portion and an upper thickness of the fourth sidewall portion are equal to the upper thickness of the second sidewall portion.
4. The semiconductor device of claim 1 , wherein the difference between the upper thickness and the lower thickness of the second sidewall portion is about 1.1 to 1.5 times the difference between the upper thickness and the lower thickness of the first sidewall portion.
5. The semiconductor device of claim 1 , wherein the lower thickness of the second sidewall portion is equal to the lower thickness of the first sidewall portion.
6. The semiconductor device of claim 1 , wherein the dam group includes a plurality of dam groups in a second direction crossing the first direction.
7. The semiconductor device of claim 1 , further comprising
mold patterns, which are in the insulating dam, and each of which is located at the same level as a corresponding one of the electrodes,
wherein the penetration plugs penetrate the mold patterns.
8. The semiconductor device of claim 1 , wherein each of the insulating dams is connected to at least one of the electrodes.
9. The semiconductor device of claim 1 , further comprising
a conductive support layer between the semiconductor layer and the stack,
wherein a lower portion of the first insulating dam is connected to the conductive support layer.
10. The semiconductor device of claim 1 , wherein
the dam group further includes a second insulating dam spaced apart from the first insulating dam with the cell contact plugs interposed therebetween,
the second insulating dam includes a third sidewall portion and a fourth sidewall portion spaced apart from each other in the first direction, and
a difference between an upper thickness and a lower thickness of the fourth sidewall portion of the second insulating dam is equal to a difference between an upper thickness and a lower thickness of the third sidewall portion.
11. The semiconductor device of claim 10 , wherein the difference between the upper thickness and the lower thickness of the second sidewall portion of the first insulating dam is larger than the difference between the upper thickness and the lower thickness of the fourth sidewall portion of the second insulating dam.
12. The semiconductor device of claim 10 , wherein a number of the electrodes in contact with the first insulating dam is smaller than the number of the electrodes in contact with the second insulating dam.
13. The semiconductor device of claim 1 , further comprising
an insulating penetration pattern penetrating the semiconductor layer,
wherein the penetration plugs penetrate the insulating penetration pattern.
14. The semiconductor device of claim 1 , wherein at least one of the separation structures is spaced apart from the first insulating dam in the first direction.
15. A semiconductor device, comprising:
a peripheral circuit structure including peripheral circuits and peripheral circuit lines on a semiconductor substrate;
a semiconductor layer on the peripheral circuit structure, the semiconductor layer including a cell array region and a connection region;
a stack including electrodes stacked on the semiconductor layer, and having a stepwise structure on the connection region;
a planarization insulating layer covering the stack;
a source conductive pattern on the cell array region and between the substrate and the stack;
dummy structures on the connection region penetrating the stack;
a conductive support layer between the stack and the source conductive pattern;
vertical structures on the cell array region penetrating the stack, and each of which includes a data storage pattern;
separation structures extending in a first direction and penetrating the stack;
cell contact plugs on the connection region penetrating the planarization insulating layer and connected to respective ones of the electrodes;
a dam group including insulating dams arranged in the first direction on the connection region and penetrating the stack; and
penetration plugs penetrating the insulating dams and connected to the respective ones of peripheral circuit lines,
wherein the dam group includes a first insulating dam which is farthest from the cell array region,
the first insulating dam includes a first sidewall portion and a second sidewall portion spaced apart from each other in the first direction, and
a difference between an upper thickness and a lower thickness of the second sidewall portion of the first insulating dam is larger than a difference between an upper thickness and a lower thickness of the first sidewall portion.
16. The semiconductor device of claim 15 , wherein the upper thickness of the second sidewall portion of the first insulating dam is larger than the upper thickness of the first sidewall portion of the first insulating dam.
17. The semiconductor device of claim 15 , wherein the difference between the upper thickness and the lower thickness of the second sidewall portion is about 1.1 to 1.5 times the difference between the upper thickness and the lower thickness of the first sidewall portion.
18. The semiconductor device of claim 15 , wherein a lower portion of the first insulating dam is connected to the conductive support layer.
19. The semiconductor device of claim 15 , wherein the lower thickness of the second sidewall portion is equal to the lower thickness of the first sidewall portion.
20. An electronic system, comprising:
a semiconductor device including
a peripheral circuit structure including peripheral circuits and peripheral circuit lines on a semiconductor substrate,
a semiconductor layer on the peripheral circuit structure, the semiconductor layer including a cell array region and a connection region,
a stack including electrodes stacked on the semiconductor layer, and having a stepwise structure on the connection region,
a planarization insulating layer covering the stack,
vertical structures on the cell array region penetrating the stack, each of which includes a data storage pattern, and separation structures extending in a first direction and penetrating the stack,
cell contact plugs on the connection region penetrating the planarization insulating layer and connected to respective ones of the electrodes,
a dam group including insulating dams arranged in the first direction on the connection region penetrating the stack, and
penetration plugs penetrating the insulating dams and connected to respective ones of the peripheral circuit lines; and
a controller electrically connected to the semiconductor device through an input/output pad to control the semiconductor device,
wherein the dam group includes a first insulating dam which is farthest from the cell array region,
the first insulating dam includes a first sidewall portion and a second sidewall portion spaced apart from each other in the first direction, and
a difference between an upper thickness and a lower thickness of the second sidewall portion of the first insulating dam is larger than a difference between an upper thickness and a lower thickness of the first sidewall portion.