IP Library › Granted Patent US 12,273,987
Granted Patent B1
US 12,273,987 · App. 18/125,214 · Granted Apr 8, 2025

Decoupled tunable plasma system for the dissociation of molecular fluids

Inventor: Kamal Hadidi (Sudbury, MA)
H05H1/24H05H2245/10
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Quick Facts
Patent No.
US 12,273,987
App. No.
18/125,214
Granted
Apr 8, 2025
Kind
B1
Abstract

The present technology is directed to a system for controlling the electron energy distribution function in an atmospheric and near-atmospheric low-temperature plasma by subjecting the generated plasma to a repetitive nanosecond-pulsed voltage that is completely decoupled from the means that generated the plasma (i.e., decoupled from an electron-beam). The repetitive nanosecond-pulsed voltage generates a nanosecond-pulsed electric field that affects the energy of the electrons in the plasma without affecting the energy of the ions.

Claims (20)

1. A low temperature plasma system for processing of molecular fluids where the plasma is generated at atmospheric pressure or slightly above or slightly below by an electron beam and comprising the followings:

a. a chamber where the electrons are produced at low pressure and where the pressure is between 10 −3 to 10 −6 torr;

b. a window covered by a metallic foil that separates the low-pressure chamber where the electrons are produced from the atmosphere and the electrons are accelerated through the metallic foil;

c. a channel through which a feedstock fluid or a mixture of feedstock fluids flow and that receives the high energy electrons generated in the vacuum chamber and accelerated through the metallic foil;

d. a chamber electric assembly that powers the generation of electrons in the low pressure chamber and the acceleration of these electrons through the window

e. a channel electric assembly that is decoupled from the chamber electric assembly and that supplies nanosecond pulsed voltage to a system of electrodes when activated and where the electric assembly produces a nanosecond pulsed voltage with a repetitive rate; and

f. a system of electrodes in the channel that is isolated from the ground and that is electrically connected to the channel electric assembly.

2. The system of claim 1 where the duration of the pulsed voltage is between 0.1 and 100 nanoseconds.

3. The system of claim 1 , where the fluid is a gas.

4. The system of claim 1 where the fluid is a vapor.

5. The system of claim 1 , where the fluid flowing through the channel is one of the following gases or a mixture of any of them: methane, oxygen, nitrogen, carbon dioxide, hydrogen, water vapor, hydrogen peroxide.

6. The system of claim 1 , where the duration of the voltage delivered by the channel electric assembly is between 0.01 and 10 nanoseconds.

7. The system of claim 1 , where the channel through which the fluid flows is made of multiple input channels.

8. The system of claim 1 , where the chamber electric assembly extracts electrons from the chamber to the channel in a continuous manner.

9. The system of claim 1 , where the extraction voltage of the electrons is between 10 kvolt and 1 Mvolt.

10. The system of claim 1 , where the chamber electric assembly extracts electrons from the chamber to the channel in a pulsed manner.

11. The system of claim 1 , where the channel electric assembly has a repetition rate between 500 Hz and 100 MHz.

12. The system of claim 1 , where the channel electric assembly has a repetition rate between 1 kHz and 1 MHz.

13. The system of claim 1 , with a catalyst material placed in the channel adjacent to the plasma.

14. The system of claim 13 , where the catalysts comprise a heating element to increase its temperature.

Continuity (1)
Provisional Application 63322878 · Mar 23, 2022
References Cited (18)
US 8664561B2 · Hadidi et al. · 2014 [cited by applicant]
JP 2008135286A · 2008 [cited by examiner]
Donovan et al. “Recent Advances in the Chemistry of Electronically Excited Atoms.” Chem. Rev. 70(1970): 489-516. [cited by applicant]
Husain et al. “Collisional Quenching of Electronically Excited Nitrogen Atoms, N(22DJ,22PJ) by Time-resolved Atomic Absorption Spectroscopy.” Farad. Disc. Chem. Soc. 53(1972): 201-210. [cited by applicant]
Kerscher et al. “Low-carbon hydrogen production via electron beam plasma methane pyrolysis: Techno-economic analysis and carbon footprint assessment.” Int. J. Hydrogen Energy. 46(2021): 19897-19912. [cited by applicant]
Laporta et al. “Electron-impact resonant vibrational excitation and dissociation processes involving vibrationaly excited N2 molecules.” Plasma Sources Sci. Technol. 23(2014): 065002. [cited by applicant]
Lin et al. “Reactions of Metastable Nitrogen Atoms.” J. Chem. Phys. 55.8(1971): 3760-3770. [cited by applicant]
Matzing et al. “Chemistry of the electron beam process and its application to emission control.” Pure Appl. Chem. 68.5 (1996): 1089-1092. [cited by applicant]
Richardson et al. “Modeling intense-electron-beam generated plasmas using a rigid-beam approximation.” Phys. Plasmas. 28(2021): 093508. [cited by applicant]
Rouwenhurst et al. “From the Birkeland-Eyde process towards energy-efficient plasma-based NOX synthesis: a techno-economic analysis.” Energy Environ. Sci. 14.5(2021): 2520-2534. [cited by applicant]
Smith et al. “Preference for Vibrational over Translational Energy in a Gas-Surface Reaction.” Science. 304(2004): 992-995. [cited by applicant]
Snoeckx et al. “Plasma technology—a novel solution for CO2 converstion?” Chem. Soc. Rev. 46(2017): 5805-5863. [cited by applicant]
Suzuki et al. “Radiation Treatment of Exhaust Gases (VII).” J. Nuc. Sci. Technol. 15.8(1978): 597-601. [cited by applicant]
Walton et al. “Electron Beam Generated Plasmas for Ultra Low Te Processing.” Ecs J. Solid State Sci. Technol. 4.6 (2015): N5033-N5040. [cited by applicant]
Wang et al. “Nitrogen Fixation by Gliding Arc Plasma: Better Insight by Chemical Kinetics Modelling.” Chem. Sus. Chem. 10(2017): 2145-2157. [cited by applicant]
Weiss et al. “Energy Required to Produce One Ion Pair for Several Gases.” Phys. Rev. 98.6(1955): 1828-1831. [cited by applicant]
Wolford et al. “NOx removal with multiple pulsed electron beam free of catalysts or reagents.” Phys. Chem. Phys. 15(2013): 4422-4427. [cited by applicant]
Young et al. “The excitation and quenchng of N(2P).” J. Chem. Phys. 63(1975): 1150-1153. [cited by applicant]