Semiconductor device and semiconductor module
A semiconductor device includes first member that includes a switch made of a semiconductor element made from an elemental semiconductor. The first member is joined to a second member including a radio-frequency circuit including a semiconductor element made from a compound semiconductor. The switch and the radio-frequency circuit are connected by a path. The path includes an inter-member connection wire made of a metal pattern arranged on an interlayer insulating film extending from a surface of the second member to a surface of the first member or a conductive member allowing a current to flow in a direction crossing an interface where the first member and the second member are joined.
1. A semiconductor device comprising:
a first member including a switch made of a semiconductor element made from an elemental semiconductor;
a second member including a radio-frequency circuit including a semiconductor element made from a compound semiconductor, the second member joined to the first member; and
a path connecting the switch and the radio-frequency circuit,
wherein the path includes an inter-member connection wire made of a metal pattern arranged on an interlayer insulating film extending from a surface of the second member to a surface of the first member or a conductive member allowing a current to flow across a surface joining the first member and the second member.
2. The semiconductor device according to claim 1 , wherein
the radio-frequency circuit includes a differential amplifier circuit, and
the semiconductor device further comprises a variable capacitance circuit connected between a pair of wires, the variable capacitance circuit being configured to allow transmission of a differential signal into the differential amplifier circuit, the variable capacitance circuit includes a capacitor and the switch, and capacitance between the pair of the wires is changed by turning on or off of the switch.
3. The semiconductor device according to claim 2 , wherein
the capacitor included in the variable capacitance circuit is disposed in the first member.
4. The semiconductor device according to claim 2 , further comprising:
a first balun configured to convert a single-end signal into a differential signal to be input into the differential amplifier circuit; and
a second balun configured to convert a differential signal output from the differential amplifier circuit into a single-end signal.
5. The semiconductor device according to claim 4 , wherein
the first balun and the second balun are disposed in the first member.
6. The semiconductor device according to claim 4 , further comprising:
a driver-stage amplifier circuit configured to output a single-end signal to be input into the first balun.
7. The semiconductor device according to claim 4 , further comprising:
a power-stage differential amplifier circuit configured to amplify a signal output from the differential amplifier circuit and output a differential signal to be input into the second balun.
8. The semiconductor device according to claim 5 , further comprising:
a driver-stage amplifier circuit configured to output a single-end signal to be input into the first balun.
9. The semiconductor device according to claim 5 , further comprising:
a power-stage differential amplifier circuit configured to amplify a signal output from the differential amplifier circuit and output a differential signal to be input into the second balun.
10. A semiconductor module comprising:
a semiconductor device including a first member including a switch made of a semiconductor element made from an elemental semiconductor and a second member including a radio-frequency circuit including a semiconductor element made from a compound semiconductor, the second member joined to the first member, the semiconductor device further including a first conductive protrusion connected to the switch and a second conductive protrusion connected to the radio-frequency circuit;
a module substrate on which the semiconductor device is mounted; and
a path connecting the switch and the radio-frequency circuit, the path including the first conductive protrusion, a wire disposed on the module substrate, and the second conductive protrusion.
11. The semiconductor module according to claim 10 , wherein
the radio-frequency circuit includes a differential amplifier circuit, and
the semiconductor module further comprises a variable capacitance circuit connected between a pair of wires, the variable capacitance circuit being configured to allow transmission of a differential signal into the differential amplifier circuit, the variable capacitance circuit includes a capacitor and the switch, and capacitance between the pair of the wires is changed by turning on or off of the switch.
12. The semiconductor module according to claim 11 , wherein
the capacitor included in the variable capacitance circuit is disposed in the first member.
13. The semiconductor module according to claim 11 , further comprising:
a first balun configured to convert a single-end signal into a differential signal to be input into the differential amplifier circuit; and
a second balun configured to convert a differential signal output from the differential amplifier circuit into a single-end signal.
14. The semiconductor module according to claim 13 , wherein
the first balun and the second balun are disposed in the first member.
15. The semiconductor module according to claim 13 , further comprising:
a driver-stage amplifier circuit configured to output a single-end signal to be input into the first balun.
16. The semiconductor module according to claim 13 , further comprising:
a power-stage differential amplifier circuit configured to amplify a signal output from the differential amplifier circuit and output a differential signal to be input into the second balun.
17. The semiconductor module according to claim 14 , further comprising:
a driver-stage amplifier circuit configured to output a single-end signal to be input into the first balun.
18. The semiconductor module according to claim 14 , further comprising:
a power-stage differential amplifier circuit configured to amplify a signal output from the differential amplifier circuit and output a differential signal to be input into the second balun.