Solar cell and manufacturing method thereof, photovoltaic module, and photovoltaic system
A solar cell and a manufacturing method thereof, a photovoltaic module, and a photovoltaic system. The manufacturing method includes: providing a substrate; and dividing a second surface of the substrate into a first region, a second region, and an isolation region; sequentially stacking a first tunnel oxide layer, a first intrinsic amorphous silicon layer, a second tunnel oxide layer, and a second intrinsic amorphous silicon layer on the second surface of the substrate; removing the second intrinsic amorphous silicon layer and the second tunnel oxide layer located in the second region; doping the first intrinsic amorphous silicon layer and the second intrinsic amorphous silicon layer located in the first region with a first element, to obtain a first doped layer and a second doped layer respectively; doping the first intrinsic amorphous silicon layer located in the second region with a second element, to obtain a third doped layer; and forming an isolation structure in the isolation region, to isolate the first tunnel oxide layer located in the first region from the first tunnel oxide layer located in the second region and isolate the first doped layer and the second doped layer located in the first region from the third doped layer located in the second region.
1. A manufacturing method for a solar cell, comprising:
providing a substrate, wherein the substrate has a first surface and a second surface arranged oppositely, and the second surface includes a first region, a second region, and an isolation region located between the first region and the second region;
sequentially stacking a first tunnel oxide layer, a first intrinsic amorphous silicon layer, a second tunnel oxide layer, and a second intrinsic amorphous silicon layer on the second surface of the substrate and in a direction away from the substrate, wherein each of the first tunnel oxide layer, the first intrinsic amorphous silicon layer, the second tunnel oxide layer, and the second intrinsic amorphous silicon layer is partially located in each of the first region, the second region and the isolation region;
removing the second intrinsic amorphous silicon layer and the second tunnel oxide layer located in the second region;
doping the first intrinsic amorphous silicon layer and the second intrinsic amorphous silicon layer located in the first region with a first element, to obtain a first doped layer and a second doped layer respectively; and doping the first intrinsic amorphous silicon layer located in the second region with a second element, to obtain a third doped layer; and
forming an isolation structure in the isolation region, to isolate the first tunnel oxide layer located in the first region from the first tunnel oxide layer located in the second region and isolate the first doped layer and the second doped layer located in the first region from the third doped layer located in the second region.
2. The manufacturing method for the solar cell according to claim 1 , further comprising:
prior to the removing the second intrinsic amorphous silicon layer and the second tunnel oxide layer located in the second region,
sequentially stacking a doping source layer and a first protective layer on a side of the second intrinsic amorphous silicon layer facing away from the substrate, wherein the doping source layer is configured to provide the first element required for doping.
3. The manufacturing method for the solar cell according to claim 2 , wherein the removing the second intrinsic amorphous silicon layer and the second tunnel oxide layer located in the second region, specifically comprises:
removing, by laser, the first protective layer, the doping source layer, and part of the second intrinsic amorphous silicon layer facing away from the second tunnel oxide layer that are located in the second region; and
removing, by a wet process, the remaining second intrinsic amorphous silicon layer located in the second region and adjacent to the second tunnel oxide layer and the second tunnel oxide layer located in the second region.
4. The manufacturing method for the solar cell according to claim 3 , wherein the removing, by a wet process, the remaining second intrinsic amorphous silicon layer located in the second region and adjacent to the second tunnel oxide layer and the second tunnel oxide layer located in the second region, specifically comprises:
removing, by the wet process, the remaining second intrinsic amorphous silicon layer located in the second region and adjacent to the second tunnel oxide layer;
forming a mask layer on a side of the first protective layer located in the first region facing away from the substrate;
removing, by the wet process, the second tunnel oxide layer located in the second region; and
removing the mask layer.
5. The manufacturing method for the solar cell according to claim 3 , wherein the doping the first intrinsic amorphous silicon layer and the second intrinsic amorphous silicon layer located in the first region with a first element, to obtain a first doped layer and a second doped layer respectively; and doping the first intrinsic amorphous silicon layer located in the second region with a second element, to obtain a third doped layer, specifically comprises:
at a preset temperature, doping, by the doping source layer, the first intrinsic amorphous silicon layer and the second intrinsic amorphous silicon layer with the first element for a preset duration, to obtain the first doped layer and the second doped layer respectively; and
doping the first intrinsic amorphous silicon layer located in the second region with the second element, to obtain the third doped layer.
6. The manufacturing method for the solar cell according to claim 5 , further comprising: subsequent to the doping the first intrinsic amorphous silicon layer and the second intrinsic amorphous silicon layer located in the first region with a first element, to obtain a first doped layer and a second doped layer respectively; and doping the first intrinsic amorphous silicon layer located in the second region with a second element, to obtain a third doped layer,
removing the doping source layer and the first protective layer.
7. The manufacturing method for the solar cell according to claim 1 , further comprising: prior to the removing the second intrinsic amorphous silicon layer and the second tunnel oxide layer located in the second region,
forming a second protective layer on a side of the second intrinsic amorphous silicon layer facing away from the substrate.
8. The manufacturing method for the solar cell according to claim 7 , wherein the removing the second intrinsic amorphous silicon layer and the second tunnel oxide layer located in the second region, specifically comprises:
removing, by laser, the second protective layer located in the second region and part of the second intrinsic amorphous silicon layer facing away from the second tunnel oxide layer; and
removing, by a wet process, the remaining second intrinsic amorphous silicon layer located in the second region and adjacent to the second tunnel oxide layer and the second tunnel oxide layer located in the second region.
9. The manufacturing method for the solar cell according to claim 8 , wherein the removing, by a wet process, the remaining second intrinsic amorphous silicon layer located in the second region and adjacent to the second tunnel oxide layer and the second tunnel oxide layer located in the second region, specifically comprises:
removing, by the wet process, the remaining second intrinsic amorphous silicon layer located in the second region and adjacent to the second tunnel oxide layer;
forming a mask layer on a side of the second protective layer located in the first region facing away from the substrate;
removing, by the wet process, the second tunnel oxide layer located in the second region; and
removing the mask layer.
10. The manufacturing method for the solar cell according to claim 8 , wherein the doping the first intrinsic amorphous silicon layer and the second intrinsic amorphous silicon layer located in the first region with a first element, to obtain a first doped layer and a second doped layer respectively; and doping the first intrinsic amorphous silicon layer located in the second region with a second element, to obtain a third doped layer, specifically comprises:
doping the first intrinsic amorphous silicon layer located in the second region with the second element, to obtain the third doped layer;
forming a third protective layer on a side of the third doped layer facing away from the substrate; and
removing the second protective layer located in the first region, and doping the first intrinsic amorphous silicon layer and the second intrinsic amorphous silicon layer located in the first region with the first element, to obtain the first doped layer and the second doped layer.
11. The manufacturing method for the solar cell according to claim 10 , further comprising: subsequent to the doping the first intrinsic amorphous silicon layer and the second intrinsic amorphous silicon layer located in the first region with a first element, to obtain a first doped layer and a second doped layer respectively; and doping the first intrinsic amorphous silicon layer located in the second region with a second element, to obtain a third doped layer,
removing the third protective layer.
12. The manufacturing method for the solar cell according to claim 1 , further comprising: subsequent to the forming an isolation structure in the isolation region, to isolate the first tunnel oxide layer located in the first region from the first tunnel oxide layer located in the second region and isolate the first doped layer and the second doped layer located in the first region from the third doped layer located in the second region,
forming a first passivation antireflection layer on a side of the second doped layer and the third doped layer facing away from the substrate, the first passivation antireflection layer covering at least a surface on the side of the second doped layer and the third doped layer facing away from the substrate; and forming a second passivation antireflection layer on the first surface of the substrate.
13. The manufacturing method for the solar cell according to claim 12 , further comprising:
forming a first electrode on a side of the first passivation antireflection layer located in the first region facing away from the substrate, the first electrode being connected to the second doped layer; and
forming a second electrode on a side of the first passivation antireflection layer located in the second region facing away from the substrate, the second electrode being connected to the third doped layer.
14. The manufacturing method for the solar cell according to claim 1 , wherein thicknesses of the first tunnel oxide layer and the second tunnel oxide layer both range from 1 nm to 2 nm; and thicknesses of the first doped layer, the second doped layer, and the third doped layer all range from 50 nm to 500 nm.