Granted Patent B2

US 12,351,913 · App. 18/148,322 · Granted Jul 8, 2025

Inventors: Tomoki Ishimaru (Yokkaichi Mie, JP); Masaya Toda (Yokkaichi Mie, JP); Kota Takahashi (Yokkaichi Mie, JP); Kenichiro Toratani (Yokkaichi Mie, JP); Kazuhiro Matsuo (Kuwana Mie, JP)

Assignee: Kioxia Corporation

C23C16/45548C23C16/407C23C16/4412C23C16/45527C23C16/45565C23C16/52H01L21/02565H01L21/0262

Abstract

Claims (44)

1. A film forming method using a film forming apparatus including a chamber including a sidewall, a shower head provided in an upper part of the chamber, a holder provided in the chamber holding a substrate, a first gas supply pipe supplying a first gas to the shower head, a first valve provided in the first gas supply pipe, a gas supply portion provided in a region of the chamber other than the shower head, a second gas supply pipe supplying a second gas to the gas supply portion, a second valve provided in the second gas supply pipe, a gas exhaust pipe exhausting a gas from the chamber, and an exhaust device connected to the gas exhaust pipe, the method comprising:

loading a substrate into the chamber;

placing the substrate on the holder;

driving the exhaust device to reduce a pressure in the chamber;

opening the second valve to supply the second gas containing an inert gas from the second gas supply pipe into the chamber through the gas supply portion;

opening the first valve to supply the first gas containing a metal element into the chamber through the shower head;

closing the second valve;

closing the first valve; and

reducing the pressure in the chamber,

wherein the opening the first valve to start supply of the first gas is performed after a first time passes from the opening the second valve to start supply of the second gas, and the closing the first valve to stop supply of the first gas is performed after a second time passes from the closing the second valve to stop supply of the second gas.

2. The film forming method according to claim 1 ,

wherein the film forming apparatus further includes:

a third gas supply pipe supplying a third gas to the shower head; and

a third valve provided in the third gas supply pipe,

and

the film forming method further comprising before the opening the second valve and before the opening the first valve:

reducing a pressure in the chamber by driving the exhaust device;

opening at least one of the third valve and the second valve to supply the second gas containing an inert gas from the second gas supply pipe into the chamber through the gas supply portion or to supply the third gas containing an inert gas into the chamber through the shower head;

closing the at least one of the third valve and the second valve;

determining the first time based on a time taken for the pressure in the chamber to increase to a predetermined pressure after the opening the at least one of the third valve and the second valve; and

determining the second time based on a time taken for the pressure in the chamber to decrease to a predetermined pressure after closing the at least one of the third valve and the second valve at the same time.

3. A film forming method using a film forming apparatus including a chamber, a shower head provided in an upper part of the chamber and a gas supply hole and a gas exhaust hole being provided in the shower head, a holder provided in the chamber holding a substrate, a first gas supply pipe connected to the gas supply hole supplying a first gas to the shower head, a first valve provided in the first gas supply pipe, a first gas exhaust pipe exhausting a gas from the chamber, a second gas exhaust pipe connected to the gas exhaust hole exhausting a gas from the shower head, a second gas supply pipe supplying a second gas to the second gas exhaust pipe, a second valve provided in the second gas supply pipe, a first exhaust device connected to the first gas exhaust pipe, and a second exhaust device connected to the second gas exhaust pipe, the method comprising:

loading a substrate into the chamber;

placing the substrate on the holder;

driving the first exhaust device to reduce a pressure in the chamber;

driving the second exhaust device to reduce a pressure in the shower head;

opening the second valve to supply the second gas containing an inert gas from the second gas supply pipe to the second gas exhaust pipe;

opening the first valve to supply the first gas containing a metal element into the chamber through the shower head;

closing the second valve;

closing the first valve; and

reducing the pressure in the shower head and the pressure in the chamber.

4. The film forming method according to claim 3 ,

wherein the opening the first valve to start supply of the first gas is performed after a first time passes from the opening the second valve to start supply of the second gas, and the closing the first valve to stop supply of the first gas is performed after a second time passes from the closing the second valve to stop supple of the second gas.

5. The film forming method according to claim 4 ,

wherein the film forming apparatus further includes:

a third gas supply pipe supplying a third gas to the shower head; and

a third valve provided in the third gas supply pipe, and

the film forming method further comprising before the opening the second valve and before the opening the first valve:

reducing a pressure in the chamber by driving the first exhaust device,

reducing a pressure in the shower head by driving the second exhaust device,

opening at least one of the third valve and the second valve to supply the second gas containing an inert gas from the second gas supply pipe to the second gas exhaust pipe or to supply the third gas containing an inert gas into the chamber through the shower head,

closing the at least one valve,

determining the first time based on a time taken for the pressure in the shower head to increase to a predetermined pressure after the opening the at least one of the third valve and the second valve, and

determining the second time based on a time taken for the pressure in the shower head to decrease to a predetermined pressure after the closing the at least one of the third valve and the second valve at the same time.

Assignments (1)

Priority Claims (1)

Continuity (1)

References Cited (32)