Substrate processing apparatus
Described herein is a technique capable of suppressing the effects of plasma on a film or a structure formed on a substrate. According to the technique, electrode for generating plasma includes protrusion provided with gas flow path inserted in holes of showerhead to uniformly supply gas in plasma state toward a substrate.
1. A substrate processing apparatus comprising:
a process chamber where a substrate is processed;
a substrate support unit configured to support the substrate;
a gas supply unit configured to supply a gas to the substrate via a buffer chamber;
an electrode comprising a protrusion, wherein a gas flow channel in communication with the buffer chamber is provided in the protrusion, the gas flow channel is configured to supply the gas to the process chamber, and the electrode is disposed under the buffer chamber;
an insulating plate comprising a first hole provided adjacent to the gas flow channel, wherein the insulating plate is disposed under the electrode, and the protrusion is inserted in the first hole;
a dispersion unit comprising a second hole disposed adjacent to the first hole to be in communication with the gas flow channel, wherein the dispersion unit is disposed under the insulating plate, the protrusion is inserted in the second hole, and a distance between a front end of the protrusion and a lower end of the second hole is greater than a diameter of the second hole;
a power supply unit electrically connected to the electrode; and
a control unit configured to: control the gas supply unit to supply the gas into a plasma generation region in the second hole at a downstream side of the insulating plate; and control the power supply unit to supply electrical power to the electrode to generate a plasma of the gas in the plasma generation region.
2. The substrate processing apparatus of claim 1 , wherein the dispersion unit is electrically grounded, and the plasma generation region in the second hole is provided adjacent to the insulating plate.
3. The substrate processing apparatus of claim 1 , wherein a diameter of the first hole is smaller than that of the second hole.
4. The substrate processing apparatus of claim 2 , wherein a diameter of the first hole is smaller than that of the second hole.
5. The substrate processing apparatus of claim 1 , wherein the protrusion comprises a third hole at a side surface thereof facing an inner wall of the second hole.
6. The substrate processing apparatus of claim 2 , wherein the protrusion comprises a third hole at a side surface thereof facing an inner wall of the second hole.
7. The substrate processing apparatus of claim 3 , wherein the protrusion comprises a third hole at a side surface thereof facing an inner wall of the second hole.
8. The substrate processing apparatus of claim 4 , wherein the protrusion comprises a third hole at a side surface thereof facing an inner wall of the second hole.
9. The substrate processing apparatus of claim 1 , further comprising a sensor disposed between the electrode and the power supply unit, wherein the sensor is configured to measure an impedance or a current.
10. The substrate processing apparatus of claim 1 , further comprising:
a bias electrode provided in the substrate support unit; and
a bias adjusting unit connected to the bias electrode.
11. The substrate processing apparatus of claim 1 , wherein the protrusion has a cylindrical shape.
12. The substrate processing apparatus of claim 11 , wherein the front end of the protrusion has a spherical shape or a hemispherical shape.
13. The substrate processing apparatus of claim 1 , wherein the front end of the protrusion has a spherical shape or a hemispherical shape.
14. The substrate processing apparatus of claim 1 , wherein a gas flow channel configured to supply the gas into the second hole is provided between the electrode and the insulating plate.
15. The substrate processing apparatus of claim 1 , wherein the process chamber comprises a gas introduction hole provided at a sidewall thereof.
16. The substrate processing apparatus of claim 2 , further comprising:
a bias electrode provided in the substrate support unit; and
a bias adjusting unit connected to the bias electrode.
17. The substrate processing apparatus of claim 5 , wherein the front end of the protrusion has a spherical shape or a hemispherical shape.