Quartz glass crucible and manufacturing method thereof
A quartz glass crucible ( 1 ) has a structure wherein a peak of a distribution of a total concentration of Na, K, and Ca in a depth direction from an inner surface ( 10 i ) of the crucible is present at a position deeper than the inner surface ( 10 i ). In an exemplary embodiment, the quartz glass crucible is capable of improving the yield of a silicon single crystal by suppressing peeling-off of brown rings.
1. A quartz glass crucible characterized in that a peak of a distribution of a total concentration of Na, K, and Ca in a depth direction from an inner surface of the crucible is present at a position within a depth range of 16 μm or more than 32 μm or less from the inner surface, and
the peak value of the total concentration of Na, K, and Ca within the range of 16 μm or more and 32 μm or less from the inner surface is 2 times or more and 19 times or less an average value of the total concentration of Na, K, and Ca within a depth range of 0 μm or more and 8 μm or less from the inner surface.
2. The quartz glass crucible according to claim 1 , wherein
an average value of the total concentration of Na, K, and Ca within the depth range of 32 μm or more and 1000 μm or less from the inner surface is 0.6 times or more and 1 time or less the average value of the total concentration of Na, K, and Ca within a depth range of 0 μm or more and 8 μm or less from the inner surface.
3. The quartz glass crucible according to claim 2 , wherein
the total concentration of Na, K, and Ca within the depth range of 32 μm or more and 1000 μm or less from the inner surface has a negative concentration gradient with the depth direction as a positive direction.
4. The quartz glass crucible according to claim 3 , wherein
an average value of a total concentration of Li, Al, Na, K, and Ca within the depth range of 0 μm or more and 8 μm or less from the crucible inner surface is 3.6×10 16 atoms/cc or more and 5.5×10 17 atoms/cc or less.
5. The quartz glass crucible according to claim 3 comprising:
a transparent layer made of silica glass containing no bubbles and constituting the inner surface; and
a bubble layer made of silica glass containing a large number of bubbles and provided outside the transparent layer, wherein
a thickness of the transparent layer is 1 mm or more.
6. The quartz glass crucible according to claim 2 , wherein
an average value of a total concentration of Li, Al, Na, K, and Ca within the depth range of 0 μm or more and 8 μm or less from the crucible inner surface is 3.6×10 16 atoms/cc or more and 5.5×10 17 atoms/cc or less.
7. The quartz glass crucible according to claim 2 comprising:
a transparent layer made of silica glass containing no bubbles and constituting the inner surface; and
a bubble layer made of silica glass containing a large number of bubbles and provided outside the transparent layer, wherein
a thickness of the transparent layer is 1 mm or more.
8. The quartz glass crucible according to claim 1 , wherein
an average value of a total concentration of Li, Al, Na, K, and Ca within the depth range of 0 μm or more and 8 μm or less from the crucible inner surface is 3.6×10 16 atoms/cc or more and 5.5×10 17 atoms/cc or less.
9. The quartz glass crucible according to claim 1 comprising:
a transparent layer made of silica glass containing no bubbles and constituting the inner surface; and
a bubble layer made of silica glass containing a large number of bubbles and provided outside the transparent layer, wherein
a thickness of the transparent layer is 1 mm or more.
10. A quartz glass crucible characterized in that a peak of a distribution of a total concentration of Na, K, and Ca in a depth direction from an inner surface of the crucible is present at a position within a depth range of 16 μm or more or more and 32 μm or less from the inner surface, and
an average value of the total concentration of Na, K, and Ca within a depth range of 32 μm or more and 1000 μm or less from the inner surface is 0.6 time or more and 1 time or less the average value of the total concentration of Na, K, and Ca within a depth range of 0 μm or more and 8 μm or less from the inner surface.
11. The quartz glass crucible according to claim 10 , wherein
a total concentration of Na, K, and Ca within the depth range of 32 μm or more and 1000 μm or less form the inner surface has a negative concentration gradient with the depth direction as a positive direction.
12. The quartz glass crucible according to claim 10 , wherein an average value of a total concentration of Li, Al, Na, K, and Ca within the depth range of 0 μm or more and 8 μm or less from the crucible inner surface is 3.6×10 16 atoms/cc or more and 5.5×10 17 atoms/cc or less.
13. The quartz glass crucible according to claim 10 , comprising:
a transparent layer made of silica glass containing no bubbles and constituting the inner surface; and
a bubble layer made of silica glass containing bubbles and provided outside the transparent layer, wherein
a thickness of the transparent layer is 1 mm or more.
14. A quartz glass crucible characterized in that a peak of a distribution of a total concentration of Na, K, and Ca in a depth direction from an inner surface of the crucible is present at a position within a depth range of 16 μm or more and 32 μm or less from the inner surface, and
an average value of at total concentration of Li, Al, Na, and Ca within a depth range of 0 μm or more and 8 μm or less form the crucible inner surface is 3.6×10 16 atoms/cc or more and 5.5×10 17 atoms/cc or less.
15. The quartz glass crucible according to claim 14 comprising:
a transparent layer made of silica glass containing no bubbles and constituting the inner surface; and
a bubble layer made of silica glass containing bubbles and provided outside the transparent layer, wherein
a thickness of the transparent layer is 1 mm or more.