Isolation transformer
An isolation transformer includes an insulation layer, a transformer, and a capacitor. The transformer includes first and second coils separated from each other in a thickness-wise direction of the insulation layer. The capacitor includes a first capacitor electrode and a second capacitor electrode. The insulation layer includes thin films and interlayer insulation films alternately stacked in the direction. The thin films include first and second thin films separated from each other in the direction. The interlayer insulation films include a first interlayer insulation film located next to the first thin film in the direction and a second interlayer insulation film located next to the second thin film in the direction. The first capacitor electrode is formed between the first thin film and the first interlayer insulation film. The second capacitor electrode is formed between the second thin film and the second interlayer insulation film.
1. An isolation transformer, comprising:
an insulation layer;
a transformer embedded in the insulation layer and including a first coil and a second coil separated from each other in a thickness-wise direction of the insulation layer, the first coil including a first signal terminal and a first ground terminal and being configured to receive a low voltage through the first signal terminal, and the second coil including a second signal terminal and a second ground terminal and being configured to receive a high voltage through the second signal terminal; and
a capacitor including a first capacitor electrode and a second capacitor electrode, the first capacitor electrode being arranged between the first coil and the second coil and being connected to the first ground terminal, and the second capacitor electrode being arranged between the first capacitor electrode and the second coil and connected to the second ground terminal, wherein
the insulation layer includes thin films and interlayer insulation films alternately stacked in the thickness-wise direction,
the thin films include a first thin film and a second thin film separated from each other in the thickness-wise direction,
the interlayer insulation films include a first interlayer insulation film located next to the first thin film in the thickness-wise direction and a second interlayer insulation film located next to the second thin film in the thickness-wise direction,
the first capacitor electrode is formed between the first thin film and the first interlayer insulation film, and
the second capacitor electrode is formed between the second thin film and the second interlayer insulation film.
2. The isolation transformer according to claim 1 , wherein
the first thin film is arranged between the first capacitor electrode and the first coil, and
the second thin film is arranged between the second capacitor electrode and the second coil.
3. The isolation transformer according to claim 1 , wherein
the first interlayer insulation film is arranged between the first capacitor electrode and the first coil,
the second interlayer insulation film and the second coil are located at opposite sides of the second capacitor electrode, and
at least one of the interlayer insulation films is arranged between the second thin film and the second coil.
4. The isolation transformer according to claim 1 , further comprising:
a chip main surface and a chip back surface facing opposite directions in the thickness-wise direction, wherein the first coil is located closer to the chip back surface than the second coil is;
a first ground electrode arranged on the chip main surface; and
a first voltage interconnect connecting the first ground electrode to the first coil and the first capacitor electrode, wherein
the first voltage interconnect includes a via including a barrier film arrange on a wall surface of a via hole formed in the insulation layer, and
the barrier film of the via and at least one of the first capacitor electrode and the second capacitor electrode are formed from a same material.
5. The isolation transformer according to claim 1 , wherein at least one of the first capacitor electrode and the second capacitor electrode includes a nonmagnetic material.
6. The isolation transformer according to claim 1 , wherein
as viewed in the thickness-wise direction, the first capacitor electrode is annular and open and includes a first slit extending in a direction from a center of the first coil toward an outer side of the first coil, and
as viewed in the thickness-wise direction, the second capacitor electrode is annular and open and includes a second slit extending in a direction from a center of the second coil toward an outer side of the second coil.
7. The isolation transformer according to claim 1 , wherein
the first coil includes a spiral first coil wiring, the first ground terminal connected to one end of the first coil wiring, and the first signal terminal connected to another end of the first coil wiring, and
the second coil includes a spiral second coil wiring, the second ground terminal connected to one end of the second coil, and the second signal terminal connected to another end of the second coil wiring.
8. The isolation transformer according to claim 7 , wherein
as viewed in the thickness-wise direction, the first capacitor electrode includes a first electrode wiring overlapping the first coil wiring, a first capacitor end overlapping the first signal terminal, and a first capacitor ground terminal overlapping the first ground terminal, and
as viewed in the thickness-wise direction, the second capacitor electrode includes a second electrode wiring overlapping the second coil wiring, a second capacitor end overlapping the second signal terminal, and a second capacitor ground terminal overlapping the second ground terminal.
9. The isolation transformer according to claim 8 , wherein
the first electrode wiring is set to be equal to the first coil wiring in ratio of wiring width to wiring spacing, and
the second electrode wiring is set to be equal to the second coil wiring in ratio of wiring width to wiring spacing.
10. The isolation transformer according to claim 7 , wherein
the first capacitor electrode is plate-shaped and continuous from an inner end of the first coil wiring to an outer end of the first coil wiring as viewed in the thickness-wise direction, and
the second capacitor electrode is plate-shaped and continuous from an inner end of the second coil wiring to an outer end of the second coil wiring as viewed in the thickness-wise direction.
11. The isolation transformer according to claim 8 , wherein as viewed in the thickness-wise direction, an outer end of the second electrode wiring is located at either an outer side of an outer end of the second coil wiring or a same position as an outer end of the second coil wiring.
12. The isolation transformer according to claim 11 , wherein as viewed in the thickness-wise direction, an inner end of the second electrode wiring is located at either a same position as an inner end of the second coil wiring or an inner side of an inner end of the second coil wiring.
13. The isolation transformer according to claim 11 , wherein as viewed in the thickness-wise direction, an outer end of the first electrode wiring is located at either an outer side of an outer end of the first coil wiring or a same position as an outer end of the first coil wiring.
14. The isolation transformer according to claim 13 , wherein as viewed in the thickness-wise direction, an inner end of the first electrode wiring is located at a same position as an inner end of the first coil wiring.
15. The isolation transformer according to claim 13 , wherein as viewed in the thickness-wise direction, an inner end of the first electrode wiring is located at an inner side of an inner end of the first coil wiring.
16. The isolation transformer according to claim 4 , further comprising:
a dummy coil pattern arranged around the second coil and connected to the second coil.