IP Library Granted Patent US 12,444,643
Granted Patent B2
US 12,444,643 · App. 17/938,875 · Granted Oct 14, 2025

Method and apparatus for positioning optical isolator assembly with replaceable motor assembly

Inventors: Yaojun Xu (San Jose, CA); Rudy F. Garcia (Union City, CA)
Assignee: KLA Corporation
H01L21/68742B23K3/08H01L21/68785
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,444,643
App. No.
17/938,875
Granted
Oct 14, 2025
Kind
B2
Abstract

An apparatus includes a lifting device and a motor assembly. The lifting device is disposed in a lifting device housing and is configured to adjust a vertical position of an optical component connected to the lifting device. The motor assembly is disposed in a motor housing and is configured to drive the lifting device to adjust the vertical position of the optical component. The lifting device housing, the motor housing, and the optical component are disposed in an ultra-high vacuum chamber of an enclosure. In the case of motor failure, the motor housing can be disconnected from the lifting device housing, and the motor assembly can be decoupled from the lifting device, such that the motor assembly can be replaced.

Claims (23)

1. An apparatus comprising:

an optical component;

an ultra-high vacuum chamber of an enclosure;

a lifting device disposed in a lifting device housing, the lifting device being configured to adjust a vertical position of the optical component at a first connection; and

a motor assembly disposed in a motor housing, the motor assembly being configured to drive the lifting device to adjust the vertical position of the optical component;

wherein the motor housing is detachably connected to the lifting device housing, the motor assembly is detachably coupled to the lifting device, and the lifting device housing, the motor housing, and the optical component are disposed in the ultra-high vacuum chamber of the enclosure.

2. The apparatus of claim 1 , wherein the motor assembly comprises:

a stepper motor; and

a gearhead driven by the stepper motor and coupled to an input drive shaft of the lifting device;

wherein the stepper motor is configured to drive the input drive shaft via the gearhead to adjust the vertical position of the optical component.

3. The apparatus of claim 2 , wherein the gearhead is coupled to the input drive shaft by a coupling.

4. The apparatus of claim 3 , wherein the coupling comprises:

a first coupler connected to the gearhead, the first coupler comprising a first tongue extending in an axial direction;

a second coupler connected to the input drive shaft, the second coupler comprising a second tongue extending in the axial direction; and

a central disc sandwiched between the first coupler and the second coupler, wherein a first side of the central disc comprises a first groove configured to receive the first tongue of the first coupler, and a second side of the central disc comprises a second groove configured to receive the second tongue of the second coupler.

5. The apparatus of claim 4 , wherein the first groove and the second groove are oriented 90 degrees relative to each other.

6. The apparatus of claim 2 , wherein the lifting device housing comprises an input port, the gearhead being coupled to the input drive shaft in the input port.

7. The apparatus of claim 6 , wherein the input port is centrally disposed in a cylindrical protrusion of the lifting device housing, and the motor housing surrounds the cylindrical protrusion when connected to the lifting device housing.

8. The apparatus of claim 1 , further comprising a vacuum seal disposed between the lifting device housing and the motor housing.

9. The apparatus of claim 8 , wherein the vacuum seal is disposed in a sealing groove of the lifting device housing.

10. The apparatus of claim 1 , wherein the lifting device is disposed in a low vacuum chamber of the lifting device housing.

11. The apparatus of claim 1 , wherein the enclosure comprises an access panel, and the motor housing and the motor assembly are removable from the ultra-high vacuum chamber via the access panel.

12. The apparatus of claim 1 , wherein the lifting device is connected to the optical component by a vibration isolator.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 20, 2023
From: XU, YAOJUN; GARCIA, RUDY F.
To: KLA CORPORATION
Reel/Frame 063392/0095 →
Continuity (2)
Provisional Application 63256668 · Oct 18, 2021
Related Publication 20230122832A1 · Apr 20, 2023
References Cited (19)
US 5855681A · Maydan · 1999 [cited by examiner]
US 6441884B1 · Takahashi et al. · 2002 [cited by applicant]
US 10983443B2 · Krone et al. · 2021 [cited by applicant]
US 11927621B2 · Snow · 2024 [cited by examiner]
US 20170207384A1 · Tokuda et al. · 2017 [cited by applicant]
US 20180101105A1 · Freimann et al. · 2018 [cited by applicant]
US 20180191958A1 · Kusunose · 2018 [cited by applicant]
US 20210048756A1 · Marks et al. · 2021 [cited by applicant]
US 20220262632A1 · Yahata · 2022 [cited by examiner]
US 20220316066A1 · Santiago · 2022 [cited by examiner]
US 20220319896A1 · Liang · 2022 [cited by examiner]
CN 105759392A · 2016 [cited by applicant]
DE 102016210698A1 · 2017 [cited by applicant]
KR 101226219B1 · 2013 [cited by applicant]
TW 201003170A · 2010 [cited by applicant]
WIPO, International Search Report for International Application No. PCT/US2022/046345, Feb. 8, 2023. [cited by applicant]
WIPO, Written Opinion of the International Searching Authority for International Application No. PCT/US2022/046345, Feb. 8, 2023. [cited by applicant]
TIPO, Office Action issued for ROC (Taiwan) Patent Application No. 111139370, Jun. 20, 2025, see X/Y/A references at p. 8. [cited by applicant]
EPO, Extended European Search Report issued for European Application No. 22884272.0, Jul. 4, 2025. [cited by applicant]