Helical slow-wave structures with integrated couplers of THz radiation: devices and methods of fabrication
An antenna comprising: input and output coaxial horn antennas coupled with a self-assembled helical slow-wave structure cradled in a groove in a silicon-on-insulator wafer.
1 . A device comprising: input and output coaxial horn antennas coupled with a self-assembled helical slow-wave structure cradled in a trench in a silicon-on-insulator wafer.
2 . The device of claim 1 wherein said trench is V-shaped.
3 . The device of claim 2 further including metal strips integrated within the horn antennas to improve the coupling of the electromagnetic wave into and out of the helix.
4 . The device of claim 3 wherein said coaxial horn antennas, are used as couplers and are integrated on the backside of said SOI wafer and said self-assembled helical slow-wave structure are located on the top side of said SOI wafer.
5 . The device of claim 1 wherein said trench is in the shape of a truncated pyramid.