CMOS-compatible graphene structures, interconnects and fabrication methods
An MLG (multilayer graphene) device layer structure is connected with a via. The structure includes an M1 MLG interconnect device layer upon a dielectric layer. Interlayer dielectric isolates the M1 MLG interconnect device layer. An M2 MLG interconnect device layer is upon the interlayer dielectric. A metal via penetrates through the M2 MLG interconnect device layer, the interlayer dielectric and the M1 MLG interconnect device layer and makes edge contact throughout the thickness of both M1 MLG and M2 MLG layers. A method diffuses carbon from a solid phase graphene precursor through a catalyst layer to deposit MLG on a dielectric or metal layer via application of mechanical pressure at a diffusion temperature to form MLG layers.
1 . A method for forming MLG (multilayer graphene) device layers connected with a via at CMOS (complementary metal oxide semiconductor) compatible process temperatures directly onto dielectric or a metal layer, comprising:
providing a dielectric or metal layer;
depositing a metal or metal alloy catalyst layer on the dielectric or metal layer;
depositing a solid phase graphene precursor on the catalyst layer; and
diffusing carbon from the graphene precursor through the catalyst layer to deposit MLG on the dielectric or metal layer via application of diffusion pressure at a diffusion temperature to form an M1 MLG layer;
removing the catalyst layer;
depositing interlayer dielectric on the M1 MLG layer;
forming an M2 MLG layer on the interlayer dielectric via the depositing a catalyst layer, depositing a solid phase graphene precursor and diffusing carbon;
opening a via hole through the entirety of the M2 MLG, interlayer dielectric and M1 MLG layer to form a via hole; and
depositing via metal in the via hole to make edge contact throughout the thickness of both M1 MLG and M2 MLG layers.
2 . The method of claim 1 , wherein the diffusion pressure is ˜65-80 psi of pressure and the diffusion temperature is at least about 200° C.
3 . The method of claim 1 , wherein the graphene precursor is graphite powder.
4 . The method of claim 1 , wherein the graphene precursor is amorphous carbon.
5 . The method of claim 1 , wherein the graphene precursor is graphite slurry.
6 . The method of claim 1 , comprising annealing the catalyst at a temperature of less than 500° C. prior to depositing the solid phase graphene precursor.
7 . The method of claim 1 , wherein the via metal is one of Co, Ru, and W.
8 . The method of claim 7 , wherein the via metal is Co.
9 . The method of claim 1 , wherein the catalyst layer is Ni.
10 . The method of claim 1 , wherein the dielectric layer and the interlayer dielectric comprise SiO 2 .
11 . A method for forming MLG (multilayer graphene) on a metal surface, the method comprising:
forming an amorphous carbon barrier layer on the metal surface;
depositing a metal or metal alloy catalyst layer on the amorphous carbon barrier layer;
depositing a solid phase graphene precursor on the catalyst layer; and
diffusing carbon from the graphene precursor through the catalyst layer to deposit MLG on the metal surface via application of diffusion pressure at a diffusion temperature.
12 . The method of claim 11 , wherein the metal surface is Cu.
13 . The method of claim 11 , wherein the catalyst layer is Ni.
14 . The method of claim 11 , comprising patterning and doping the MLG.
15 . An MLG (multilayer graphene) device layer structure connected with a via, comprising:
an M1 MLG interconnect device layer upon a dielectric layer;
interlayer dielectric isolating the M1 MLG interconnect device layer;
an M2 MLG interconnect device layer upon the interlayer dielectric; and
a metal via through the M2 MLG interconnect device layer, the interlayer dielectric and the M1 MLG interconnect device layer, the metal via making edge contact throughout the thickness of both M1 MLG and M2 MLG layers.
16 . The device layer structure of claim 15 , wherein the M1 MLG layer and the M2 MLG layer are patterned.
17 . The device layer structure of claim 15 , wherein the dielectric layer and the interlayer dielectric comprise SiO 2 .
18 . The device layer structure of claim 15 , wherein the M1 MLG layer and the M2 MLG layer are doped.