Pattern inspection/measurement device, and pattern inspection/measurement program
An object of the disclosure is to provide a pattern inspection and measurement apparatus that can accurately specify a corner point formed on a sample. The pattern inspection and measurement apparatus according to the disclosure specifies a pair of corner points as a corner pair candidate on design data, and specifies a corner point on an actually formed shape pattern in accordance with a relative relation between the corner pair candidate on the design data and the corner pair candidate in the shape pattern (see FIG. 13 ).
1 . A pattern inspection and measurement apparatus for inspecting or measuring a shape pattern formed on a sample, the apparatus comprising:
a computer system configured to detect a corner pattern including a corner point in the shape pattern based on a captured image of the shape pattern, wherein
the computer system acquires a coordinate and a shape of the corner pattern from design data of the shape pattern,
the computer system specifies two corner points whose distance between each other is within a predetermined distance, as a corner pair candidate based on the coordinate and the shape of the corner pattern acquired from the design data, and
the computer system specifies coordinates of the two corner points on the shape pattern forming the corner pair candidate in accordance with a relative relation between a position of the shape pattern forming the corner pair candidate and a position of the corner pair candidate on the design data.
2 . The pattern inspection and measurement apparatus according to claim 1 , wherein
the computer system extracts a first corner point and a second corner point from the corner patterns, and
the computer system excludes at least one of the first corner point and the second corner point from the corner pair candidate in a case where a distance between the first corner point and the second corner point is less than a first threshold.
3 . The pattern inspection and measurement apparatus according to claim 1 , wherein
the computer system extracts, as an internal corner point pair in one corner pattern forming a closed area formed by connecting line segments, two corner points, whose adjacent corner points are excluded, in the one corner pattern, and
the computer system specifies the extracted internal corner point pair as the corner pair candidate.
4 . The pattern inspection and measurement apparatus according to claim 3 , wherein
when extracting the internal corner point pair,
the computer system performs a search, on the design data, within only a range in which there are two corner points whose adjacent corner points are excluded in the closed area formed by connection the line segments.
5 . The pattern inspection and measurement apparatus according to claim 3 , wherein
the design data is data in which a two-dimensional shape is recorded,
the computer system distinguishes, in the shape patterns, between a protruding shape pattern formed by protruding along a normal direction of a two-dimensional plane and a depressed shape pattern formed by depression, and
the computer system extracts the internal corner point pair for each of the protruding shape pattern and the depressed shape pattern.
6 . The pattern inspection and measurement apparatus according to claim 3 , wherein
the computer system extracts, as a non-target pair, corner points whose distance between each other is less than a first threshold among the corner points,
the computer system extracts, as a dense corner group, corner points whose distance between each other is equal to or greater than the first threshold and less than a second threshold among the corner points,
the computer system specifies, as the corner pair candidate, two corner points having the smallest distance between each other among corner points obtained by excluding the non-target pair and the dense corner group from the internal corner point pairs,
the computer system specifies, as the corner pair candidate, two corner points having the smallest distance between each other among the corner points in the internal corner point pairs and in the dense corner group, or the computer system extracts one point from the dense corner group among the corner points in the internal corner point pairs and in the dense corner group, and specifies the extracted corner point as the corner pair candidate.
7 . The pattern inspection and measurement apparatus according to claim 1 , wherein
the computer system extracts, as an external corner point pair, a first corner point in one of two corner patterns each forming a closed area formed by connecting line segments and a second point in another one of the two corner patterns and arranged in a manner of facing the first corner point, and
the computer system specifies the extracted external corner point pair as the corner pair candidate.
8 . The pattern inspection and measurement apparatus according to claim 7 , wherein
when extracting the external corner point pair,
the computer system performs a search, on the design data, within only a range in which there are two corner points arranged in a manner of facing each other, among corner points respectively located in the two corner patterns each forming the closed area formed by connecting line segments.
9 . The pattern inspection and measurement apparatus cording to claim 7 , wherein
the design data is data in which a two-dimensional shape is recorded,
the computer system distinguishes, in the shape patterns, between a protruding shape pattern formed by protruding along a normal direction of a two-dimensional plane and a depressed shape pattern formed by depression, and
the computer system extracts the external corner point pair for each of the protruding shape pattern and the depressed shape pattern.
10 . The pattern inspection and measurement apparatus according to claim 7 , wherein
the computer system extracts, as a non-target pair, corner points whose distance between each other is less than a first threshold among the corner points,
the computer system extracts, as a dense corner group, corner points whose distance between each other is equal to or greater than the first threshold and less than a second threshold among the corner points,
the computer system specifies, as the corner pair candidate, two corner points having the smallest distance between each other among corner points obtained by excluding the non-target pair and the dense corner group from the external corner point pairs,
the computer system specifies, as the corner pair candidate, two corner points having the smallest distance between each other among the corner points in the external corner point pairs and in the dense corner group, or the computer system extracts one point from the dense corner group among the corner points in the external corner point pairs and in the dense corner group, and specifies the extracted corner point as the corner pair candidate.
11 . The pattern inspection and measurement apparatus according to claim 1 , wherein
the computer system extracts a third pattern and a fourth pattern from the corner patterns, and
the computer system excludes at least one of the third pattern and the fourth pattern from the corner pair candidate in a case where a line segment recorded in the design data intersects a line segment connecting the third pattern and the fourth pattern.
12 . The pattern inspection and measurement apparatus according to claim 1 , wherein
the computer system calculates and outputs a distance between two corner points, whose coordinates are specified, as a distance between the two corner points forming the corner pair candidate.
13 . The pattern inspection and measurement apparatus according to claim 12 , wherein
the computer system specifies a plurality of the corner pair candidates, and
in a case where a distance between one corner point forming a first corner pair candidate and one corner point forming a second corner pair candidate, among the plurality of corner pair candidates, is within a reference threshold, and a distance between another corner point forming the first corner pair candidate and another corner point forming the second corner pair candidate is within the reference threshold,
the computer system extracts, among all combinations of the corner points in the first corner pair candidate and the corner points in the second corner pair candidate, only corner points having the smallest distance between each other, and excludes the other corner points from the corner pair candidates.
14 . The pattern inspection and measurement apparatus according to claim 12 , wherein
the computer system includes a screen interface configured to display, on a screen, two corner points forming the corner pair candidate and a distance between the corner points.
15 . A pattern inspection and measurement program for causing a computer to execute processing of inspecting or measuring a shape pattern formed on a sample, the pattern inspection and measurement program causing the computer to execute:
a step of detecting a corner pattern including a corner point in the shape pattern, based on a captured image of the shape pattern, wherein
the step of detecting the corner pattern includes the following steps executed by the computer:
acquiring a coordinate and a shape of the corner pattern from design data of the shape pattern;
specifying two corner points whose distance between each other is within a predetermined distance, as a corner pair candidate based on the coordinate and the shape of the corner pattern acquired from the design data; and
forming the corner pair candidate in accordance with a relative relation between a position of the shape pattern forming the corner pair candidate and a position of the corner pair candidate on the design data.