Mounting device, and method for detecting degree of parallelism of mounting device
In this method for detecting a degree of parallelism of a mounting device: a triangular pin is arranged at a point A on a placement surface of a stage; a mounting head is lowered, and a height of the mounting head when a holding surface comes into contact with a tip end of the triangular pin is detected using an encoder, after which the triangular pin is moved to a point B and the mounting head is lowered; the height of the mounting head when the holding surface comes into contact with the tip end of the triangular pin is detected by the encoder; and the degree of parallelism between the placement surface of the stage and the holding surface of the mounting head is calculated on the basis of the detected heights at point A and point B.
1 . A method for detecting a degree of parallelism of a mounting device mounting a semiconductor chip to a mounted body, the method comprising:
a preparation step of preparing the mounting device, the mounting device comprising: a stage, comprising a placement surface on which the mounted body is placed; a mounting head, sucking and holding the semiconductor chip by using a holding surface facing the placement surface of the stage, and moving in Z direction that moves toward or away from the placement surface of the stage; and an encoder, detecting a height of the mounting head;
a height detection step of, at a plurality of measurement positions, repetitively executing an operation of disposing a measurement tool of a predetermined height at one of the measurement positions on the placement surface of the stage, lowering the mounting head and detecting a height of the mounting head by using the encoder at a time when the holding surface contacts an upper end of the measurement tool and then moving the measurement tool to another one of the measurement positions on the placement surface, and at the measurement positions, detecting a plurality of heights of the mounting head at the time when the holding surface contacts the upper end of the measurement tool;
a degree of parallelism calculation step of calculating a degree of parallelism between the placement surface of the stage and the holding surface of the mounting head based on the heights that are detected.
2 . The method as claimed in claim 1 , wherein the measurement positions are within a range facing the holding surface within the placement surface, and
in the degree of parallelism calculation step, a difference of the heights at the measurement positions is calculated, and an absolute value of the difference is calculated as the degree of parallelism.
3 . The method as claimed in claim 2 , wherein the measurement positions are located at four positions arranged in a lattice shape in X direction and Y direction, and
in the degree of parallelism calculation step,
a first set X difference between a pair of heights at a pair of positions of a first set arranged in X direction and a second set X difference between a pair of heights at a pair of positions of a second set arranged in X direction are calculated,
an average between the first set X difference and the second set X difference is calculated as an X difference,
an absolute value of the X difference is calculated as an X direction degree of parallelism,
a third set Y difference between a pair of heights at a pair of positions of a third set arranged in Y direction and a fourth set Y difference between a pair of heights at a pair of positions of a fourth set arranged in Y direction are calculated,
an average between the third set Y difference and the fourth set Y difference is calculated as a Y difference,
an absolute value of the Y difference is calculated as a Y direction degree of parallelism,
the degree of parallelism is calculated as a sum of the X direction degree of parallelism and the Y direction degree of parallelism.
4 . The method as claimed in claim 3 , wherein the holding surface is a square surface,
the measurement positions correspond to four corners of the holding surface.
5 . The method as claimed in claim 2 , wherein the measurement positions comprise a pair of positions arranged in X direction and another pair of positions arranged in Y direction, and
in the degree of parallelism calculation step,
an X direction degree of parallelism is calculated as an absolute value of a difference between a pair of heights at the pair of positions arranged in X direction,
a Y direction degree of parallelism is calculated as an absolute value of a difference between another pair of heights at the another pair of positions arranged in Y direction, and
the degree of parallelism is calculated as a sum of the X direction degree of parallelism and the Y direction degree of parallelism.
6 . A mounting device, mounting a semiconductor chip to a mounted body, the mounting device comprising:
a stage, comprising a placement surface on which the mounted body is placed;
a mounting head, sucking and holding the semiconductor chip by using a holding surface facing the placement surface of the stage, and moving in Z direction that moves toward or away from the placement surface of the stage; and
an encoder, detecting a height of the mounting head;
a measurement tool, having a predetermined height and disposed on the placement surface of the stage;
an actuator, moving the measurement tool within the placement surface; and
a controller, adjusting movement of the mounting head and movement of the measurement tool, and calculating a degree of parallelism between the placement surface of the stage and the holding surface of the mounting head based on a height of the mounting head detected by using the encoder,
wherein the controller is configured to:
at a plurality of measurement positions, repetitively execute an operation of disposing the measurement tool at one of the measurement positions on the placement surface of the stage by using the actuator, lower the mounting head and detect a height of the mounting head by using the encoder at a time when the holding surface contacts an upper end of the measurement tool and then moving the measurement tool to another one of the measurement positions on the placement surface by using the actuator, and at the measurement positions, detect a plurality of heights of the mounting head at the time when the holding surface contacts the upper end of the measurement tool, and
calculate the degree of parallelism between the placement surface of the stage and the holding surface of the mounting head based on the heights that are detected.
7 . The mounting device as claimed in claim 6 , wherein the measurement positions are within a range facing the holding surface within the placement surface, and
the controller is configured to:
calculate a difference of the heights at the measurement positions, and calculate an absolute value of the difference as the degree of parallelism.