Memory device structures that include a capacitor
Structures for a memory device and methods of forming a structure for a memory device. The structure comprises a first transistor including a first gate structure and a first source/drain region, a second transistor including a second gate structure and a second source/drain region, and a capacitor including a first capacitor plate directly coupled to the first source/drain region, a second capacitor plate, and a capacitor dielectric layer between the first capacitor plate and the second capacitor plate.
1 . A structure for a memory device, the structure comprising:
a first transistor including a first gate structure and a first source/drain region;
a second transistor including a second gate structure and a second source/drain region;
a first capacitor including a first capacitor plate directly coupled to the first source/drain region, a second capacitor plate, and a capacitor dielectric layer, the first capacitor laterally positioned between the first transistor and the second transistor; and
a second capacitor including a first capacitor plate directly coupled to the second source/drain region, a second capacitor plate shared with the second capacitor plate of the first capacitor, and a capacitor dielectric layer shared with the capacitor dielectric layer of the first capacitor,
wherein the shared second capacitor plate includes a portion laterally between the first capacitor plate of the first capacitor and the first capacitor plate of the second capacitor, the shared capacitor dielectric layer includes a first portion laterally between the first capacitor plate of the first capacitor and the portion of the shared second capacitor plate, and the capacitor dielectric layer includes a second portion laterally between the first capacitor plate of the second capacitor and the portion of the shared second capacitor plate.
2 . The structure of claim 1 wherein the capacitor dielectric layer comprises a ferroelectric material.
3 . The structure of claim 1 wherein the portion of the second capacitor plate, the first portion of the capacitor dielectric layer, the second portion of the capacitor dielectric layer, the first capacitor plate of the first capacitor, and the first capacitor plate of the second capacitor are positioned laterally between the first source/drain region and the second source/drain region.
4 . The structure of claim 1 further comprising:
a silicon-on-insulator substrate including a semiconductor substrate, a first dielectric layer on the semiconductor substrate, and a semiconductor layer on the first dielectric layer,
wherein the first source/drain region includes a portion of the semiconductor layer.
5 . The structure of claim 4 wherein the shared second capacitor plate and the shared capacitor dielectric layer are positioned in a trench, and the trench includes a first portion in the semiconductor layer.
6 . The structure of claim 5 wherein the trench includes a second portion in the first dielectric layer and a third portion in the semiconductor substrate, and the shared second capacitor plate is in contact with the semiconductor substrate.
7 . The structure of claim 6 further comprising:
a second dielectric layer on the semiconductor layer; and
a first contact in the second dielectric layer, the contact coupled to the shared second capacitor plate.
8 . The structure of claim 7 wherein the first source/drain region includes a raised semiconductor layer on the portion of the semiconductor layer, and further comprising:
a second contact in the second dielectric layer, the second contact coupled by the raised semiconductor layer to the first source/drain region.
9 . A structure for a memory device, the structure comprising:
a first transistor including a first gate structure and a first source/drain region;
a second transistor including a second gate structure and a second source/drain region;
a first capacitor including a first capacitor plate directly coupled to the first source/drain region, a second capacitor plate, and a capacitor dielectric layer between the first capacitor plate of the first capacitor and the second capacitor plate;
a second capacitor including a first capacitor plate directly coupled to the second source/drain region, a second capacitor plate that is shared with the second capacitor plate of the first capacitor, and a capacitor dielectric layer that is shared with the capacitor dielectric layer of the first capacitor, the capacitor dielectric layer the second capacitor between the first capacitor plate of the second capacitor and the second capacitor plate the second capacitor;
a dielectric spacer that surrounds the first gate structure of the first transistor, the dielectric spacer having a first thickness; and
a dielectric layer between the first capacitor plate of the first capacitor and the second capacitor plate of the second capacitor, the dielectric layer having a second thickness that is substantially equal to the first thickness,
wherein the second capacitor plate has a length, and the first capacitor plate of the second capacitor is spaced along the length of the second capacitor plate from the first capacitor plate of the first capacitor.
10 . A method of forming a structure for a memory device, the method comprising:
forming a first transistor including a first gate structure and a first source/drain region;
forming a second transistor including a second gate structure and a second source/drain region;
forming a first capacitor including a first capacitor plate directly coupled to the first source/drain region, a second capacitor plate, and a capacitor dielectric layer, wherein the first capacitor is laterally positioned between the first transistor and the second transistor; and
forming a second capacitor including a first capacitor plate directly coupled to the second source/drain region, a second capacitor plate shared with the second capacitor plate of the first capacitor, and a capacitor dielectric layer shared with the capacitor dielectric layer of the first capacitor,
wherein the shared second capacitor plate includes a portion laterally between the first capacitor plate of the first capacitor and the first capacitor plate of the second capacitor, the shared capacitor dielectric layer includes a first portion laterally between the first capacitor plate of the first capacitor and the portion of the shared second capacitor plate, and the shared capacitor dielectric layer includes a second portion laterally between the first capacitor plate of the second capacitor and the portion of the shared second capacitor plate.
11 . The method of claim 10 wherein forming the first capacitor including the first capacitor plate directly coupled to the first source/drain region, the second capacitor plate, and the capacitor dielectric layer plate comprises:
removing a third gate structure; and
forming the second capacitor plate that includes a portion in a space formed when the third gate structure is removed,
wherein the first capacitor plate and a portion of the capacitor dielectric layer are positioned between the portion of the second capacitor plate and the first source/drain region.
12 . The structure of claim 1 wherein the shared second capacitor plate comprises doped amorphous silicon.
13 . The structure of claim 1 wherein the shared second capacitor plate comprises tungsten.
14 . The structure of claim 1 wherein the first capacitor plate of the first capacitor and the first capacitor plate of the second capacitor comprise doped silicon.
15 . The structure of claim 14 wherein the shared second capacitor plate comprises doped amorphous silicon.
16 . The structure of claim 14 wherein the shared second capacitor plate comprises tungsten.
17 . The structure of claim 1 wherein the first capacitor plate of the first capacitor and the first capacitor plate of the second capacitor comprise titanium.
18 . The structure of claim 17 wherein the shared second capacitor plate comprises doped amorphous silicon.
19 . The structure of claim 17 wherein the shared second capacitor plate comprises tungsten.
20 . The structure of claim 4 wherein the first capacitor plate of the first capacitor is positioned in a first trench, the first capacitor plate of the second capacitor is positioned in a second trench, and the first trench and the second trench penetrate partially through the semiconductor layer.