Dielectric tuning of negative capacitance in dual channel field effect transistors
A transistor structure includes a semiconductor substrate; an NFET channel structure atop the substrate; a PFET channel structure atop the substrate; a first dielectric atop the PFET channel structure; a second dielectric atop the NFET channel structure; a shared internal metal gate atop the dielectrics; a shared ferroelectric layer atop the shared internal metal gate; and a shared external gate electrode atop the shared ferroelectric layer. The first and second dielectrics are doped with different metals that provide differing overall work functions for the PFET and the NFET. A method for making a transistor structure includes depositing a shared dielectric onto an NFET channel structure and a PFET channel structure, and converting the shared dielectric to a first high-k dielectric atop the PFET channel structure and a second high-k dielectric atop the NFET channel structure. The first high-k dielectric and the second high-k dielectric are doped with different metals.
1 . A complementary metal-oxide-semiconductor field effect transistor structure, comprising:
a semiconductor substrate;
an NFET channel structure directly atop and contacting the substrate;
a PFET channel structure directly atop and contacting the substrate, the PFET channel structure adjacent the NFET channel structure;
a first dielectric directly atop and contacting the PFET channel structure;
a second dielectric directly atop and contacting the NFET channel structure, the second dielectric directly adjacent the first dielectric;
a shared internal metal gate directly atop and contacting the first and second dielectrics, wherein the first dielectric is sandwiched between the PFET channel structure and the shared internal metal gate and the second dielectric is sandwiched between the NFET channel structure and the shared internal metal gate;
a shared ferroelectric layer directly atop and contacting the shared internal metal gate; and
a shared external gate electrode directly atop and contacting the shared ferroelectric layer,
wherein the first and second dielectrics are doped with different metals that provide differing overall work functions of the PFET and the NFET.
2 . The structure of claim 1 , wherein the shared ferroelectric layer comprises a material selected from the group consisting of: hafnium zirconium oxide, hafnium silicon oxide, hafnium aluminum oxide.
3 . The structure of claim 1 , wherein the shared internal metal gate comprises titanium nitride.
4 . The structure of claim 1 , wherein the shared external gate electrode comprises a material selected from the group consisting of: titanium, tungsten, tantalum, aluminum.
5 . The structure of claim 1 , wherein the first and second dielectrics are high-k dielectrics.
6 . The structure of claim 5 , wherein the first dielectric comprises hafnium with aluminum as a dopant.
7 . The structure of claim 6 , wherein the second dielectric comprises hafnium with a group 2 A metal as a dopant.
8 . The structure of claim 6 , wherein the second dielectric comprises hafnium with a group 3 B metal as a dopant.
9 . The structure of claim 5 , wherein the first dielectric comprises zirconium with aluminum as a dopant.
10 . The structure of claim 9 , wherein the second dielectric comprises zirconium with a group 2 A metal as a dopant.
11 . The structure of claim 9 , wherein the second dielectric comprises zirconium with a group 3 B metal as a dopant.
12 . The structure of claim 1 , wherein the NFET channel comprises silicon and the PFET channel comprises a silicon-germanium alloy.
13 . A method for fabricating a complementary metal-oxide-semiconductor field effect transistor structure, the method comprising:
forming an NFET channel structure and a PFET channel structure directly on a common substrate, the PFET channel structure adjacent the NFET channel structure;
depositing a shared dielectric directly onto the NFET channel structure and the PFET channel structure;
converting the shared dielectric to a first high-k dielectric directly atop the PFET channel structure and a second high-k dielectric directly atop the NFET channel structure and directly adjacent the first high-k dielectric, by doping the first high-k dielectric and the second high-k dielectric with different metals;
depositing directly onto the first and second high-k dielectrics a shared internal metal gate, wherein the first high-k dielectric is sandwiched between the PFET channel structure and the shared internal metal gate and the second high-k dielectric is sandwiched between the NFET channel structure and the shared internal metal gate;
depositing directly onto the shared internal metal gate a ferroelectric layer; and
depositing directly onto the ferroelectric layer a shared external gate electrode.
14 . The method of claim 13 , wherein doping the first high-k dielectric and the second high-k dielectric comprises doping the first high-k dielectric with aluminum and doping the second high-k dielectric with a material selected from the list consisting of Group 2 A and Group 3 B metals.
15 . The method of claim 13 , wherein depositing the shared dielectric comprises depositing hafnium oxide.
16 . The method of claim 13 wherein depositing the shared dielectric comprises depositing zirconium oxide.
17 . The method of claim 13 , wherein converting the shared dielectric to the first high-k dielectric comprises depositing aluminum and thermally annealing.
18 . The method of claim 13 , wherein depositing the shared internal metal gate comprises depositing titanium nitride.
19 . The method of claim 13 , wherein depositing the ferroelectric layer comprises depositing a hafnium oxide.
20 . The method of claim 13 , wherein depositing the shared external gate electrode comprises depositing a material selected from the group consisting of titanium nitride, tantalum, and tungsten.