Plate with flow channel
A plate includes: a main body; a flow channel provided in the main body and configured to flow inert gas therein; a cover configured to cover a surface of the main body where the flow channel is formed; a buried member buried in an opening of the flow channel, the buried member including a buried portion fixed to the flow channel and made of dense ceramic, and a flow portion held by the buried portion and configured to let the inert gas flow from an inside to an outside of the main body, at least a part of the flow portion being made of porous ceramic; and a plurality of through holes provided in the flow portion. A ratio of a diameter of an outer circumference of the buried portion to a diameter of a smallest circle among circles including all of the through holes is 1.2 or higher.
1 . A plate comprising:
a main body;
a flow channel provided in the main body and configured to flow inert gas therein;
a cover configured to cover a surface of the main body where the flow channel is formed;
a buried member buried in an opening of the flow channel, the buried member including
a buried portion fixed to the flow channel and made of dense ceramic having a porosity equal or lower than 20%, and
a flow portion held by the buried portion and configured to let the inert gas flow from an inside to an outside of the main body, the flow portion being made of porous ceramic; and
an insulating adhesive configured to fix the buried member to the main body,
wherein a ratio of a diameter of an outer circumference of the buried portion to a diameter of a circular region enclosing all of the through holes is 1.2 or higher,
the pores of the porous ceramic are configured to allow the inert gas flow from the inside to the outside of the main body, and
the flow portion has an exposed surface on an outside surface of the main body.
2 . The plate according to claim 1 , wherein the buried portion has a shape in which a diameter of an outer shape is decreased from a side exposed to the outside toward an opposite side.
3 . The plate according to claim 2 , wherein
the opening of the flow channel has a stepped hole shape, and
the outer shape of the buried portion has a protruded shape corresponding to the shape of the opening.
4 . The plate according to claim 1 , wherein the buried member has an insulating property.
5 . The plate according to claim 1 , wherein
the buried portion includes a second through hole configured to make the flow portion and the flow channel communicate with each other, and
a formed region of the second through hole and a formed region of the plurality of through holes in the flow portion are arranged at different positions when viewed in a penetrating direction.
6 . The plate according to claim 1 , wherein the cover is configured to cover a part of the buried portion.
7 . The plate according to claim 1 , wherein the ratio of the diameter of the outer circumference of the buried portion to the diameter of the circular region enclosing all of the through holes is 1.5 or higher.