IP Library › Granted Patent US 12,594,580
Granted Patent B2
US 12,594,580 · App. 18/350,825 · Granted Apr 7, 2026

Altering and enhancing resonator performances using free to fixed boundary ratio (FFBR) topology

Inventors: Haleh Nazemi (LaSalle, CA); Arezoo Emadi (Windsor, CA)
Assignee: University of Windsor
B06B1/0607B06B1/0292
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,594,580
App. No.
18/350,825
Granted
Apr 7, 2026
Kind
B2
Abstract

A resonator and/or transducer comprising at least one deflectable membrane, a fixed substrate, and at least one cavity defined between the at least one deflectable membrane and the fixed substrate. A Free to Fixed Boundary Ratio (FFBR) of the deflectable membrane is selected to optimize a characteristic of the resonator and/or transducer, such as resonant frequency, displacement, operating voltage, electromechanical coupling coefficient, or mass sensitivity.

Claims (53)

1 . A method comprising:

determining a Free to Fixed Boundary Ratio (FFBR) of a reference device;

determining a reference characteristic of the reference device;

comparing the reference characteristic to a target characteristic; and

fabricating a modified device that has a different FFBR than the FFBR of the reference device;

wherein the FFBR of the modified device is selected to provide a modified characteristic of the modified device that is closer to the target characteristic than the reference characteristic is to the target characteristic;

wherein the reference device and the modified device each have at least one deflectable membrane, a fixed substrate, and at least one cavity defined between the at least one deflectable membrane and the fixed substrate; and

wherein the reference device and the modified device each comprise at least one of: a resonator and a transducer.

2 . The method according to claim 1 , wherein the reference device and the modified device each comprise an electromechanical resonator.

3 . The method according to claim 1 , wherein the reference device and the modified device each comprise at least one of: a Capacitive Micromachined Ultrasonic Transducer (CMUT); a Multiple Moving Membrane Capacitive Micromachined Ultrasonic Transducer (M3-CMUT); a Piezoelectric Micromachined Ultrasonic Transducer (PMUT), a Piezoelectric resonator, a Capacitive resonator, a Microelectromechanical systems (MEMS) piezoelectric ultrasonic transducer, a MEMS sensor, a MEMS transducer, a Mass Resonator Sensor, a MEMS Gas Sensor, a Capacitive-Based Gas Sensor, and a MEMS Resonator.

4 . The method according to claim 1 , wherein the reference device and the modified device each comprise a Capacitive Micromachined Ultrasonic Transducer (CMUT).

5 . The method according to claim 1 , wherein the reference characteristic, the target characteristic, and the modified characteristic each comprise a resonant frequency.

6 . The method according to claim 1 , wherein the reference characteristic, the target characteristic, and the modified characteristic each comprise a magnitude of displacement of the at least one deflectable membrane.

7 . The method according to claim 1 , wherein the reference characteristic, the target characteristic, and the modified characteristic each comprise a degree of sensitivity.

8 . The method according to claim 1 , wherein the reference characteristic, the target characteristic, and the modified characteristic each comprise an operating voltage.

9 . The method according to claim 1 , wherein the reference characteristic, the target characteristic, and the modified characteristic each comprise a surface area of the at least one deflectable membrane.

10 . The method according to claim 1 , wherein the reference characteristic, the target characteristic, and the modified characteristic each comprise a mass tolerance.

11 . The method according to claim 1 , wherein the reference characteristic, the target characteristic, and the modified characteristic each comprise a mass sensitivity.

12 . The method according to claim 1 , wherein the reference characteristic, the target characteristic, and the modified characteristic each comprise an electromechanical coupling coefficient.

13 . The method according to claim 1 , wherein the FFBR of the modified device is selected to provide the modified characteristic that is closer to the target characteristic, while maintaining a second characteristic of the modified device within a target range relative to a second reference characteristic of the reference device.

14 . The method according to claim 13 , wherein the second characteristic of the modified device and the second reference characteristic of the reference device are substantially the same.

15 . The method according to claim 13 , wherein the second characteristic and the second reference characteristic each comprise at least one of:

a shape of the at least one deflectable membrane;

a surface area of the at least one deflectable membrane;

a perimeter length of the at least one deflectable membrane;

a width of the at least one deflectable membrane;

a length of the at least one deflectable membrane;

a thickness of the at least one deflectable membrane;

a resonant frequency;

a magnitude of displacement of the at least one deflectable membrane;

a shape of the at least one deflectable membrane;

a degree of sensitivity;

an operating voltage;

a mass tolerance; and

a mass sensitivity.

16 . A device comprising:

at least one deflectable membrane;

a fixed substrate; and

at least one cavity defined between the at least one deflectable membrane and the fixed substrate;

wherein a Free to Fixed Boundary Ratio (FFBR) of the at least one membrane is selected to optimize a characteristic of the device; and

wherein the device comprises at least one of: a resonator and a transducer.

17 . The device according to claim 16 , wherein the device comprises an electromechanical resonator.

18 . The device according to claim 16 , wherein the device comprises at least one of: a Capacitive Micromachined Ultrasonic Transducer (CMUT); a Multiple Moving Membrane Capacitive Micromachined Ultrasonic Transducer (M3-CMUT); a Piezoelectric Micromachined Ultrasonic Transducer (PMUT), a Piezoelectric resonator, a Capacitive resonator, a Microelectromechanical systems (MEMS) piezoelectric ultrasonic transducer, a MEMS sensor, a MEMS transducer, a Mass Resonator Sensor, a MEMS Gas Sensor, a Capacitive-Based Gas Sensor, and a MEMS Resonator.

19 . The device according to claim 16 , wherein the characteristic comprises at least one of:

a resonant frequency;

a magnitude of displacement of the at least one deflectable membrane;

a degree of sensitivity;

an operating voltage;

a surface area of the at least one deflectable membrane;

a mass tolerance;

a mass sensitivity; and

an electromechanical coupling coefficient.

20 . The device according to claim 16 , further comprising a sensing material that is attached to the at least one deflectable membrane.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 12, 2023
From: NAZEMI, HALEH; EMADI, AREZOO
To: UNIVERSITY OF WINDSOR
Reel/Frame 064221/0700 →
Continuity (2)
Provisional Application 63390656 · Jul 20, 2022
Related Publication 20240024918A1 · Jan 25, 2024
References Cited (43)
US 8952595B2 · Huang · 2015 [cited by applicant]
US 9039976B2 · Sparks et al. · 2015 [cited by applicant]
US 9238250B2 · Kandori et al. · 2016 [cited by applicant]
US 9321080B2 · Tagaki et al. · 2016 [cited by applicant]
US 9660554B2 · Muang · 2017 [cited by applicant]
US 9925561B2 · Emadi et al. · 2018 [cited by applicant]
US 10084394B2 · Kandori et al. · 2018 [cited by applicant]
US 10857567B2 · Singh et al. · 2020 [cited by applicant]
US 20110023582A1 · Kupnik et al. · 2011 [cited by applicant]
US 20140225476A1 · Degertekin et al. · 2014 [cited by applicant]
US 20140360272A1 · Kandori · 2014 [cited by applicant]
US 20160077058A1 · Akiyama et al. · 2016 [cited by applicant]
US 20170326591A1 · Apte et al. · 2017 [cited by applicant]
US 20180202976A1 · Saji · 2018 [cited by applicant]
US 20190299251A1 · Chen et al. · 2019 [cited by applicant]
US 20240024918A1 · Nazemi · 2024 [cited by examiner]
CN 110560350 · 2019 [cited by applicant]
WO 2017198666 · 2017 [cited by applicant]
Lee et al., CMUT as a Chemical Sensor for DMMP Detection, IEEE, pp. 434-439, 2008. [cited by applicant]
Haller, et al., A Surface Micromachined Electrostatic Ultrasonic Air Transducer, IEEE Transactions on UltraSonics, Ferroelectrics, and Frequency Control, vol. 43, No. 1, Jan. 1, 1996. [cited by applicant]
Nazemi, A Miniaturized Chemical Vapor Detector Using MEMS Flexible Platform, University of Windsor, Thesis, 2019. [cited by applicant]
Lee et al., Mesoporous Thin-Film on Highly-Sensitive Resonant Chemical Sensor for Relative Humidity and CO2 Detection, Analytical Chemistry, 2012, 84, 3063-3066. [cited by applicant]
Barauskas et al., Greenhouse Gas Molecule CO2 Detection Using a Capacitive Micromachined Ultrasound Transducer, Analytical Chemistry, 2016, 88, 6662-6665. [cited by applicant]
Nazemi et al., Advanced Micro-and Nano Gas Sensor Technology: A Review, Sensors, 2019. [cited by applicant]
Brenner et al., Advances in Capacitive Micromachined Ultrasonic Transducers, Micromachines, 2019. [cited by applicant]
Hu et al., A boundary condition correction for the clamped constraint of elastic plate/beam theory, International Journal of Solids and Structures 124, 2017, 229-234. [cited by applicant]
Nathani et al., Capacitive Based Micromachined Resonators for Low Level Mass Detection, Micromachines, 2021. [cited by applicant]
Prud'Homme et al., Comparison between Linear and Branched Polyethylenimine and Reduced Graphene Oxide Coatings as a Capture Layer for Micro Resonant CO2 Gas Concentration Sensors, Sensors, 2020. [cited by applicant]
Philips Engineering Solutions, Capacitive Micromachined Ultrasonic Transducers, 2023. [cited by applicant]
Ergun et al., Capacitive Micromachined Ultrasonic Transducers: Fabrication Technology, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 52, No. 12, Dec. 2005. [cited by applicant]
Ahmed et al., Investigation of stresses at the fixed end of deep cantilever beams, Computers and Structures 69, 1998, 329-338. [cited by applicant]
Lee et al., Highly Sensitive Detection of DMMP Using a CMUT-based Chemical Sensor, IEEE Sensors, 2010. [cited by applicant]
Wang et al., Capacitive micromachined ultrasound transducers for intravascular ultrasound imaging, Microsystems & Nanoengineering, 2020. [cited by applicant]
Khuri-Yakub, et al., Capacitive micromachined ultrasonic transducers for medical imaging and therapy, J Micromech Microeng., May 2011. [cited by applicant]
Park et al., Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen, Applied Physics Letters, 2007. [cited by applicant]
Philips, CMUT: a versatile ultrasonic platform developed by Philips, 2019. [cited by applicant]
Cowen et al., PolyMUMPs Design Handbook, 2011. [cited by applicant]
Yoon et al., A Capacitive Micromachined Ultrasonic Transducer-Based Resonant Sensor Array for Portable Volatile Organic Compound Detection with Wireless Systems, Sensors, 2019. [cited by applicant]
American College of Emergency Physicians, Technology CMUT—Capacitive Micromachined Ultrasound Transducers: A Primer, Jun. 12, 2020. [cited by applicant]
Khuri-Yakub et al., The Capacitive Micromachined Ultrasonic Transducer (CMUT) as a Chem/Bio Sensor, IEEE Ultrasonics Symposium, 2007. [cited by applicant]
Ergun et al., Capacitive Micromachined Ultrasonic Transducers: Theory and Technology, Journal of Aerospace Engineering, Apr. 2003. [cited by applicant]
Ilkhechi, Transparent capacitive micromachined ultrasonic transducer (CMUT) arrays for real-time photoacoustic applications, Optics Express, vol. 28, No. 9, Apr. 27, 2020. [cited by applicant]
Molgaard et al., Sensitivity Optimization of Wafer Bonded Gravimetric CMUT Sensors, IEEE Journal of Microelectromechanical Systems, 2018. [cited by applicant]