Susceptor manufacturing method and susceptor manufactured by the same
The present disclosure relates to a method of manufacturing a susceptor. The present disclosure may provide a method of manufacturing a susceptor in which a cap-type bushing structure or tube structure is applied to a bonding structure of a base substrate and an insulating plate, so that the bonding structure can withstand or prevent the increase in pressure inside a gas flow path during a curing process, thereby preventing clogging of a gas hole in a high-power susceptor or the like for a high aspect ratio contact (HARC) processes, and minimizing the occurrence of arcing by reducing contamination around the gas hole. In addition, the present disclosure may also provide a susceptor manufactured by the method.
1 . A method of manufacturing a susceptor, the method comprising:
inserting a tube structure into a groove formed at an end of a gas flow path extending into a gas hole in an insulating plate;
forming a bonding layer by using a bonding agent to a level equal to or lower than a height of an end of the tube structure;
bonding a base substrate to the bonding layer by inserting the tube structure into a gas flow path in the base substrate; and
removing the tube structure.
2 . The method of claim 1 , wherein, in the inserting of the tube structure, a bushing structure having a through hole is first inserted into the groove, and then the tube structure is inserted inside the bushing structure.
3 . The method of claim 2 , wherein the bushing structure is made of ceramic which is a same material as the insulating plate.
4 . The method of claim 2 , wherein the bushing structure has a height that extends to a level equal to or higher than an end of the groove in the insulating plate.
5 . The method of claim 1 , wherein the tube structure is made of a plastic material.
6 . The method of claim 1 , wherein the tube structure has a diameter that is equal to or less than a diameter of the groove formed at the end of the gas flow path extending into the gas hole in the insulating plate.
7 . The method of claim 2 , wherein the tube structure has a diameter that is equal to or less than a diameter of the through hole in the bushing structure.