Filter structure and substrate treating system including filter structure
A filter structure includes a housing having an inlet and an outlet; a first filter embedded in the housing and including a polymer membrane for filtering a first fluid flowing from the inlet into the housing; and a second filter embedded in the housing, filtering a second fluid filtered by the first filter, and including mesoporous silica nanoparticles (MSN).
1 . A filter structure, comprising:
a housing having an inlet and an outlet;
a first filter in the housing and including a polymer membrane for filtering a first fluid flowing from the inlet into the housing; and
a second filter in the housing, filtering a second fluid filtered by the first filter, and including mesoporous silica nanoparticles (MSN),
wherein the second filter includes a tube having a non-linear flow path.
2 . The filter structure of claim 1 , wherein a third fluid filtered by the second filter is discharged through the outlet of the housing.
3 . The filter structure of claim 1 , wherein mesoporous silica nanoparticles included in the second filter have a particle size of about 50 nm to about 500 nm, and a pore size of about 5 nm to about 20 nm.
4 . The filter structure of claim 1 , wherein a surface area per unit weight of mesoporous silica nanoparticles included in the second filter is about 500 m 2 /g to about 1400 m 2 /g.
5 . The filter structure of claim 1 , wherein mesoporous silica nanoparticles included in the second filter include a functional group on a surface thereof.
6 . The filter structure of claim 5 , wherein the functional group includes one or more of a thiol group and an amine group.
7 . The filter structure of claim 1 , wherein the tube having a non-linear flow path is filled with the mesoporous silica nanoparticles.
8 . The filter structure of claim 7 , wherein a membrane or a syringe filter having a pore size smaller than a particle size of mesoporous silica nanoparticles is included on at least both ends of the tube having a non-linear flow path.
9 . The filter structure of claim 1 ,
wherein the second filter includes a porous support and a thin film provided on the porous support, and
wherein the thin film includes mesoporous silica nanoparticles of about 50 wt % to about 80 wt % based on a total weight of the thin film.
10 . The filter structure of claim 9 , wherein the thin film is provided on both surfaces of the porous support.
11 . The filter structure of claim 9 , wherein a thickness of the thin film is about 200 nm to about 500 nm.
12 . The filter structure of claim 9 , wherein mesoporous silica nanoparticles included in the thin film have a particle size of about 50 nm to about 200 nm, and have a pore size of about 10 nm to about 20 nm.
13 . The filter structure of claim 9 ,
wherein the porous support includes polysulfone, and
wherein the thin film includes polyamide.
14 . A substrate treating system, comprising:
a process chamber performing a semiconductor process on a substrate;
a supply source supplying fluid to the process chamber; and
a filter structure disposed between the supply source and the process chamber,
wherein the filter structure includes:
a first filter primarily filtering a first fluid supplied from the supply source and including a polymer membrane; and
a second filter secondarily filtering a second fluid filtered by the first filter and including mesoporous silica nanoparticles having a functional group on a surface thereof,
wherein the second filter includes a tube having a non-linear flow path.
15 . The substrate treating system of claim 14 , wherein the second filter removes one or more of metals, organic molecules, chemical dyes and oils included in the second fluid.
16 . The substrate treating system of claim 14 , wherein mesoporous silica nanoparticles include one or more functional groups of a thiol group and an amine group on a surface thereof.
17 . The substrate treating system of claim 14 , wherein the first filter includes one or more of ultra-high-molecular-weight polyethylene (UPE), high-density polyethylene (HDPE), polytetrafluoroethylene (PTFE) and nylon.
18 . A filter structure, comprising:
a first filter filtering fluid and including a polymer membrane; and
a second filter filtering fluid passing through the first filter,
wherein the second filter includes mesoporous silica nanoparticles having a particle size of about 50 nm to about 500 nm and a pore size of about 5 nm to about 20 nm and including one or more of functional groups of a thiol group and an amine group on a surface thereof, and
wherein the second filter includes a tube having a non-linear flow path.
19 . The filter structure of claim 18 , wherein the first filter and the second filter are connected to each other in series.
20 . The filter structure of claim 18 , further comprising:
a third filter connected to the first filter in series and including mesoporous silica nanoparticles,
wherein the first filter filters fluid filtered by the third filter.