Treatment liquid discharge assembly and treatment liquid discharge method
The present invention relates to a treatment liquid discharge assembly and a treatment liquid discharge method, and the treatment liquid discharge assembly includes a drain manifold connected to at least one discharge line of the substrate treatment apparatus and configured to define a predetermined accommodation space to temporarily accommodate a treatment liquid, and a drain pipe connected to a bottom surface of the accommodation space, in which the drain pipe defines a level difference with a predetermined height in the accommodation space of the drain manifold, and the drain pipe protrudes by the predetermined height from a bottom surface of the accommodation space toward an upper side of the accommodation space to define a buffer space in which the treatment liquid.
1 . A treatment liquid discharge assembly for a substrate treatment apparatus comprising:
a drain manifold connected to at least one discharge line of the substrate treatment apparatus and configured to define an accommodation space to temporarily accommodate a treatment liquid discharged from a substrate treatment process in the substrate treatment apparatus; and
a drain pipe connected to a bottom surface of the accommodation space to discharge the treatment liquid, which is accommodated in the accommodation space of the drain manifold, to the outside,
wherein the drain pipe includes a bottom end portion extending through a bottom surface of the accommodation space and an upper end portion extending into the accommodation space, the upper end portion being located at a predetermined height above the bottom surface of the accommodation space and below an upper side of the accommodation space to define a buffer space in which the treatment liquid, which is discharged from the substrate treatment apparatus and collected in the accommodation space, is temporarily accommodated, until the treatment liquid reaches a level corresponding to the predetermined height in the accommodation space, and then discharged,
wherein the treatment liquid discharge assembly further comprises an auxiliary drain pipe connected to a portion of the bottom surface of the accommodation space corresponding to the buffer space to discharge the treatment liquid containing the stripped suspended materials accommodated in the buffer space in the accommodation space of the drain manifold.
2 . The treatment liquid discharge assembly of claim 1 , wherein the drain manifold defines the accommodation space, and
wherein the drain manifold is configured in at least one of a polygonal container shape or a cylindrical shape.
3 . The treatment liquid discharge assembly of claim 1 , wherein the drain manifold comprises an inclined wall portion formed to be inclined at a predetermined angle with respect to the bottom surface of the accommodation space and provided on at least a part of a lower side of a lateral surface of the drain manifold so that a width of the drain manifold gradually and linearly decreases toward the bottom surface to which the drain pipe is connected.
4 . The treatment liquid discharge assembly of claim 3 , wherein the inclined wall portion is formed to be inclined from an upper end to a lower end thereof in a direction toward the upper end portion of the drain pipe extending into the accommodation space.
5 . The treatment liquid discharge assembly of claim 2 , wherein the drain manifold comprises a curved wall portion formed in a convexly curved shape and provided on at least a part of a lower side of a lateral surface of the drain manifold so that a width of the drain manifold gradually and non-linearly decreases toward the bottom surface to which the drain pipe is connected.
6 . The treatment liquid discharge assembly of claim 5 , wherein the curved wall portion is formed such that an inclination angle of an imaginary tangential line, which is externally in contact with a wall surface, gradually decreases with respect to the bottom surface of the accommodation space from an upper end to a lower end thereof.
7 . The treatment liquid discharge assembly of claim 1 , wherein the auxiliary drain pipe comprises an on-off valve provided in an inlet part connected to the bottom surface of the accommodation space to selectively open or close the auxiliary drain pipe.
8 . The treatment liquid discharge assembly of claim 1 , wherein the drain manifold comprises a liquid particle counter installed in the buffer space and configured to measure a content of the stripped suspended materials contained in the treatment liquid accommodated in the buffer space.
9 . The treatment liquid discharge assembly of claim 7 , wherein the drain manifold further comprises a discharge control unit configured to apply a control signal to the on-off valve to discharge the treatment liquid, which is accommodated in the buffer space, through the auxiliary drain pipe when the content of the stripped suspended materials measured by the liquid particle counter exceeds a preset reference value.
10 . The treatment liquid discharge assembly of claim 1 , wherein the drain manifold comprises a buffer wall part formed to surround the upper end portion of the drain pipe extending into the accommodation space in the buffer space and configured to divide the buffer space into a first space and a second space.
11 . The treatment liquid discharge assembly of claim 10 , wherein the buffer wall part is formed at a height higher than the predetermined height of the upper end portion of the drain pipe above the bottom surface of the accommodation space.
12 . A treatment liquid discharge assembly for a substrate treatment apparatus comprising:
a drain manifold connected to at least one discharge line of the substrate treatment apparatus, formed in a polygonal container shape or a cylindrical shape, and configured to define an accommodation space therein to temporarily accommodate a treatment liquid discharged from a substrate treatment process in the substrate treatment apparatus through the at least one discharge line; and
a drain pipe connected to a bottom surface of the accommodation space to discharge the treatment liquid, which is accommodated in the accommodation space of the drain manifold, to the outside,
wherein the drain pipe includes a bottom end portion extending through a bottom surface of the accommodation space and an upper end portion extending into the accommodation space, the upper end portion being located at a predetermined height above the bottom surface of the accommodation space and below an upper side of the accommodation space to define a buffer space in which the treatment liquid, which is discharged from the substrate treatment apparatus and collected in the accommodation space, is temporarily accommodated, until the treatment liquid reaches a level corresponding to the predetermined height in the accommodation space, and then discharged,
wherein the treatment liquid, which is temporarily accommodated in the buffer space of the drain manifold, is discharged to the outside through the drain pipe,
wherein the treatment liquid discharge assembly further comprises an auxiliary drain pipe connected to a portion of the bottom surface of the accommodation space corresponding to the buffer space to discharge the treatment liquid containing the stripped suspended materials accommodated in the buffer space in the accommodation space of the drain manifold.