IP Library Granted Patent US 12,643,333
Granted Patent B2
US 12,643,333 · App. 17/408,708 · Granted Jun 2, 2026

3D package for semiconductor thermal management

Inventors: Christopher Chua (San Jose, CA); Joerg Martini (San Francisco, CA); Mark Teepe (Palo Alto, CA); Yu Wang (San Jose, CA); Qian Wang (Mountain View, CA)
Assignee: Genesee Valley Innovations, LLC
B41J2/455B41J2/45B41J2/451H01S5/02315H01S5/02326H01S5/0233H01S5/0239H01S5/02423H01S5/183H01S5/4012H01S5/4018H01S5/4025H01S5/423H01S5/02438
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Quick Facts
Patent No.
US 12,643,333
App. No.
17/408,708
Granted
Jun 2, 2026
Kind
B2
Abstract

A 3D package for semiconductor thermal management can include a 3D submount forming a mechanical block including at least one embedded channel formed within the mechanical block and configured to accept cooling liquid therethrough, a first tubular connection for providing cooling liquid to the at least one embedded channel, and a second tubular connection for removing cooling liquid from the at least one embedded channel. Integrated slots can be provided for accepting and mounting semiconductor components. Mounting holes can be formed in the mechanical block for securing optical elements. At least one semiconductor laser array die can be secured to the mechanical block at the integrated slots, wherein the at least one semiconductor laser array die is kept cool by the cooling liquid flowing through the at least one embedded channel.

Claims (32)

1 . A 3D package for semiconductor thermal management as part of a printing system, comprising:

a 3D submount forming a mechanical block including at least one embedded channel formed within the mechanical block and configured to accept a cooling liquid therethrough, a first tubular connection for providing the cooling liquid to the at least one embedded channel, and a second tubular connection for removing cooling liquid from the at least one embedded channel;

at least one semiconductor laser array die, wherein the at least one semiconductor laser array die is kept cool by the cooling liquid flowing through the at least one embedded channel;

a lens array and mounting holes formed in the mechanical block for securing the lens array aligned with the at least one semiconductor laser array die to produce imaging with light from pixels of the at least one semiconductor laser array die onto a blanket cylinder associated with the printing system;

a vapor extraction unit mounted to a vapor extraction mount coupled to the 3D mechanical block and placed close to a focus area of the lens array, wherein the vapor extraction unit extracts fountain solution vapor generated by selective laser heating from a plurality of independently addressable surface emitting lasers;

wherein the at least one semiconductor laser array die further comprises the plurality of independently addressable surface emitting lasers arranged in a linear array on a common substrate chip and including a common cathode and a dedicated channel associated with an address trace line for each laser of the plurality of independently addressable surface emitting lasers operating at a power level reaching 50 mW and requiring thermal management; and

wherein each independently addressable semiconductor laser among the plurality of independently addressable surface emitting lasers further comprises at least one aperture operable in common with an associated address trace line to attain a larger effective aperture size, and wherein the at least one aperture further comprises a non-symmetric aperture shape configured to fit within a pitch of each address trace line associated with each channel for each of the plurality of independently addressable surface emitting lasers.

2 . The 3D package of claim 1 , wherein the address trace line associated with each of the plurality of independently addressable surface emitting lasers is fabricated to be at no more than a 22 micrometer pitch with respect to each other.

3 . The 3D package of claim 1 , wherein the address trace line is fabricated at a width that allows low sheet resistance and negligible voltage drops when electrified with a signal during operation of the semiconductor laser array.

4 . The 3D package of claim 1 , further comprising an electrical contact pad associated with the address trace line for each independently addressable semiconductor laser, wherein each electrical contact pad is configured to accept wire bonding.

5 . The 3D package of claim 1 , wherein the plurality of independently addressable surface emitting lasers are arranged along two rows with one set of address lines coming in from a top of the common substrate chip and are connecting to a first row of independently addressable surface emitting lasers and another set of address lines coming in from the bottom of the common substrate chip and are connecting to a second row of independently addressable surface emitting lasers.

6 . The 3D package of claim 5 , further comprising a driver circuit attached to each of a top row and a bottom row of a wire bonding to the electrical pads associated with each of the top row and bottom row.

7 . The 3D package claim 5 , wherein the first and second rows are offset with respect to each other to form an interdigitated linear array of light emitters on nor more than a 22 micrometer pitch.

8 . The 3D package of claim 5 , wherein the common substrate chip is fabricated at 21 mm long by 2 mm wide and contains at least 1000 independently addressable surface emitting lasers.

9 . The 3D package of claim 5 , further comprising more than one common substrate chip tiled and stitched together side-by-side to provide an at least 11-inch wide, 1200 pdi imager.

10 . The 3D package of claim 5 , further comprising more than one common substrate chip tiled and stitched together in a staggered arrangement to provide an at least 11-inch wide, 1200 pdi imager with timing delays associated with each of the more than one common substrate chip in the staggered arrangement.

11 . A 3D package for semiconductor thermal management, comprising:

a 3D submount forming a mechanical block including at least one embedded channel formed within the mechanical block and configured to accept a cooling liquid therethrough, a first tubular connection for providing the cooling liquid to the at least one embedded channel, and a second tubular connection for removing cooling liquid from the at least one embedded channel;

at least one semiconductor laser array die secured to the mechanical block, wherein the at least one semiconductor laser array die is kept cool by the cooling liquid flowing through the at least one embedded channel;

a lens array and mounting holes formed in the mechanical block for securing the lens array aligned with the at least one semiconductor laser array die to produce imaging with light from pixels of the at least one semiconductor laser array die onto a blanket cylinder associated with the printing system;

a vapor extraction unit mounted to a vapor extraction mount coupled to the 3D mechanical block and placed close to a focus area of the lens array, wherein the vapor extraction unit extracts fountain solution vapor generated by selective laser heating from a plurality of independently addressable surface emitting lasers;

wherein the at least one semiconductor laser array die further comprises the plurality of independently addressable surface emitting lasers arranged in a linear array on a common substrate chip and including a common cathode and a dedicated channel associated with an address trace line for each laser of the plurality of independently addressable surface emitting lasers; and

wherein each independently addressable semiconductor laser among the plurality of independently addressable surface emitting lasers further comprises at least one aperture operable in common with an associated address trace line to attain a larger effective aperture size, and wherein the at least one aperture further comprises a non-symmetric aperture shape configured to fit within a pitch of each address trace line associated with each channel for each of the plurality of independently addressable surface emitting lasers.

12 . The 3D package of claim 11 , wherein the address trace line associated with each of the plurality of independently addressable surface emitting lasers is fabricated to be at no more than a 22 micrometer pitch with respect to each other.

13 . A 3D package for semiconductor thermal management, comprising:

a 3D submount forming a mechanical block including at least one embedded channel formed within the mechanical block and configured to accept a cooling liquid therethrough, a first tubular connection for providing the cooling liquid to the at least one embedded channel, and a second tubular connection for removing cooling liquid from the at least one embedded channel;

at least one semiconductor laser array die secured to the mechanical block, wherein the at least one semiconductor laser array die is kept cool by the cooling liquid flowing through the at least one embedded channel;

a lens array and mounting holes formed in the mechanical block for securing the lens array aligned with the at least one semiconductor laser array die to produce imaging with light from pixels of the at least one semiconductor laser array die onto a blanket cylinder associated with the printing system;

a vapor extraction unit mounted to a vapor extraction mount coupled to the 3D mechanical block and placed close to a focus area of the lens array, wherein the vapor extraction unit extracts fountain solution vapor generated by selective laser heating from a plurality of independently addressable surface emitting lasers;

wherein the at least one semiconductor laser array die further comprises the plurality of independently addressable surface emitting lasers arranged in a linear array on a common substrate chip and including a common cathode and a dedicated channel associated with an address trace line for each laser of the plurality of independently addressable surface emitting lasers; and

wherein each independently addressable semiconductor laser among the plurality of independently addressable surface emitting lasers further comprises at least more than one aperture operable in common with an associated address trace line to attain a larger effective aperture size.

14 . The 3D package of claim 13 , wherein each of the more than one aperture of the plurality of surface emitting lasers further comprises a non-symmetric aperture shape configured to fit within a pitch of each address trace line associated with each channel for each of the plurality of independently addressable surface emitting lasers.

Assignments (8)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 31, 2025
From: XEROX CORPORATION
To: GENESEE VALLEY INNOVATIONS, LLC
Reel/Frame 073225/0116 →
SECOND LIEN NOTES PATENT SECURITY AGREEMENT Recorded Jul 2, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 071785/0550 →
FIRST LIEN NOTES PATENT SECURITY AGREEMENT Recorded Apr 11, 2025
From: XEROX CORPORATION
To: U.S. BANK TRUST COMPANY, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 070824/0001 →
SECURITY INTEREST Recorded Feb 13, 2024
From: XEROX CORPORATION
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 066741/0001 →
SECURITY INTEREST Recorded Nov 20, 2023
From: XEROX CORPORATION
To: JEFFERIES FINANCE LLC, AS COLLATERAL AGENT
Reel/Frame 065628/0019 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVAL OF US PATENTS 9356603, 10026651, 10626048 AND INCLUSION OF US PATENT 7167871 PREVIOUSLY RECORDED ON REEL 064038 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT. Recorded Jun 28, 2023
From: PALO ALTO RESEARCH CENTER INCORPORATED
To: XEROX CORPORATION
Reel/Frame 064161/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 20, 2023
From: PALO ALTO RESEARCH CENTER INCORPORATED
To: XEROX CORPORATION
Reel/Frame 064038/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 23, 2021
From: CHUA, CHRISTOPHER; MARTINI, JOERG; TEEPE, MARK; WANG, YU; WANG, QIAN
To: PALO ALTO RESEARCH CENTER INCORPORATED
Reel/Frame 057258/0445 →
Continuity (1)
Related Publication 20230054034A1 · Feb 23, 2023
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