Manufacturing method of transparent ultra-thin film and transparent ultra-thin film produced thereby
View Patent ↗The present disclosure provides a method for manufacturing a transparent ultra-thin film including the steps of (a) supplying different PUA precursors to two silicon masters, respectively, and then curing the PUA precursors by irradiation with ultraviolet ray, (b) separating a PUA mold formed by curing the different PUA precursors from the two silicon masters, (c) supplying perfluoropolyether (PFPE) precursor between the PUA molds, and then curing the PEPE precursor by irradiation with the ultraviolet ray, and (d) separating the PUA mold to prepare an ultra-thin film in which the PFPE precursor is cured, and a transparent ultra-thin film manufactured thereby.
1 . A method for manufacturing a transparent ultra-thin film comprising the steps of:
(a) supplying a soft PUA precursor to a first silicon master having a silicon base and a plurality of silicon convex members on a surface of the silicon base, and curing the soft PUA precursor by irradiation with an ultraviolet ray, and supplying a hard-PUA precursor having a lower elastic modulus than that of the soft-PUA precursor to a second silicon master having a silicon base and a plurality of silicon convex members on a surface of the silicon base, and
curing the hard-PUA precursor by irradiation with the ultraviolet ray;
(b) separating a soft-PUA mold having a concave member formed on a surface of the soft-PUA mold by curing the soft-PUA precursor from the first silicon master, and separating a hard-PUA mold having a concave member formed on a surface of the hard-PUA mold by curing the hard-PUA precursor from the second silicon master;
(c) supplying a perfluoropolyether precursor between the concave member of the soft-PUA mold and the concave member of the hard-PUA mold, and then curing the perfluoropolyether precursor by irradiation with the ultraviolet ray; and
(d) separating an ultra-thin film having upper and lower convex members formed by curing the perfluoropolyether precursor from the soft-PUA mold and the hard-PUA mold,
wherein the step (d) includes the steps of:
(d1) separating the soft-PUA mold from the ultra-thin film:
(d2) supplying a solvent to an edge of the ultra-thin film, and
(d3) separating the hard-PUA mold from the ultra thin film.
2 . The method of claim 1 , wherein in the step (a), the silicon base of each of the first silicon master and the second silicon master is formed in a flat plate shape having a predetermined thickness, and the plurality of silicon convex members of each of the first silicon master and the second silicon master are coupled to an upper surface of the silicon base to form a matrix.