IP Library Granted Patent US 12,650,443
Granted Patent B2
US 12,650,443 · App. 17/909,740 · Granted Jun 9, 2026

Detection device for scanning probe microscope

Inventor: Benjamin Walter (Lille, FR)
Assignee: VMICRO
G01Q70/16G01Q70/02G01Q70/08
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Quick Facts
Patent No.
US 12,650,443
App. No.
17/909,740
Granted
Jun 9, 2026
Kind
B2
Abstract

A detection device to be inserted in a holder of a scanning probe microscope is provided. The detection device comprises a probe comprising a support, a lever extending from the support, a tip positioned at one end of the lever, opposite from said support. The probe has dimensions that are small in comparison with the holder and the detection device comprises an adapter secured to the probe so as to adapt said probe to fit the holder. The adapter is secured to the probe by bonding comprising at least one adhesive or by assembly comprising a filler material used to secure said adapter to said probe during a brazing operation.

Claims (29)

1 . A detection device intended for insertion in a mount of a scanning probe microscope, said detection device comprising a probe, having:

a support;

a lever extending from the support;

a tip positioned at one end of the lever, opposite said support;

wherein since the probe has reduced dimensions with respect to the mount, the detection device further comprises an adapter secured to the probe configured for adapting said probe to the mount, wherein said adapter is secured to said probe via gluing means comprising at least one glue or via joining means comprising a filler used to secure said adapter to said probe during a brazing operation, and

wherein the support of the probe comprising a base intended to be supported by the mount, said base having a base length L′ and a base width W′, such that L′>W′, wherein said adapter has an adapter width W at least 1 mm greater than the base width W′ of said support of the probe, and said adapter presents a width less than 1.6 mm.

2 . The detection device as claimed in claim 1 , wherein the probe is secured to the adapter via the base of said probe, said base then being supported by the mount by way of said adapter.

3 . The detection device as claimed in claim 1 , wherein the adapter comprises a recess intended to receive said probe.

4 . The detection device as claimed in claim 3 , wherein the adapter having a thickness e, and wherein the recess passes through said thickness e of the adapter.

5 . The detection device as claimed in claim 3 , wherein a lateral surface of the support of the probe is secured to the adapter in the recess.

6 . The detection device as claimed in claim 1 , wherein the gluing means comprise an epoxy glue or an acrylic glue.

7 . The detection device as claimed in claim 1 , wherein the material of the adapter is selected from a list of materials comprising:

a silicon substrate;

a metal;

a semiconductor;

a ceramic;

a polymer; and

a fiberglass-reinforced epoxy resin of FR4 type.

8 . The detection device as claimed in claim 1 , wherein the adapter comprises at least one electrical track.

9 . The detection device as claimed in claim 1 , wherein the support of the probe has another surface referred to as an upper surface, opposite the base, the lever of the probe continuing said upper surface.

10 . The detection device as claimed in claim 9 , wherein the support of the probe has a lateral surface connecting the upper surface of the support to the base, the lever of the probe continuing said lateral surface.

11 . A scanning probe microscope having the detection device as claimed in claim 1 .

12 . A detection device intended for insertion in a mount of a scanning probe microscope, said detection device comprising a probe, having:

a support;

a lever extending from the support; and

a tip positioned at one end of the lever, opposite said support;

wherein since the probe has reduced dimensions with respect to the mount, the detection device further comprises an adapter secured to the probe configured for adapting said probe to the mount, wherein said adapter is secured to said probe via gluing means comprising at least one glue or via joining means comprising a filler used to secure said adapter to said probe during a brazing operation, and

wherein said detection device further comprises at least one discharge slot, said at least one discharge slot being intended to discharge excess glue.

13 . A scanning probe microscope having the detection device as claimed in claim 12 .

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 14, 2023
From: WALTER, BENJAMIN
To: VMICRO
Reel/Frame 063330/0776 →
Priority Claims (1)
FR 2002307 · Mar 9, 2020 · national
Continuity (1)
Related Publication 20230184809A1 · Jun 15, 2023
References Cited (12)
US 5705814A · Young · 1998 [cited by examiner]
US 6176122B1 · Shimizu et al. · 2001 [cited by applicant]
US 6415653B1 · Matsuyama · 2002 [cited by examiner]
US 10578644B2 · Baur et al. · 2020 [cited by applicant]
DE 102015210159A1 · 2016 [cited by applicant]
EP 0444697A2 · 1991 [cited by applicant]
EP 1544865A1 · 2005 [cited by applicant]
JP 2008003034A · 2008 [cited by examiner]
KR 20180137425A · 2018 [cited by examiner]
WO 9318525A1 · 1993 [cited by applicant]
F. J. Giessibl and C. F. Quate , “Exploring the nanoworld with atomic force microscopy”, Physics Today, Dec. 2006, pp. 44-50. [cited by applicant]
[Retrieved on Nov. 21, 2024]. Retrieved from the Internet: <URL: https://www.larousse.fr/dictionnaires/francais/berceau/8832. [cited by applicant]