IP Library › Granted Patent US 12,653,000
Granted Patent B2
US 12,653,000 · App. 18/484,178 · Granted Jun 9, 2026

Substrate holding member

Inventors: Kazuaki Ooyachi (Nagoya, JP); Hiroyuki Nakamura (Nagoya, JP)
Assignee: NITERRA CO., LTD.
H10P72/78H10P72/7614H10P72/7624
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Quick Facts
Patent No.
US 12,653,000
App. No.
18/484,178
Granted
Jun 9, 2026
Kind
B2
Abstract

A substrate holding member includes a flat-plate-shaped base body that has at least one vent hole and a grooved portion, the at least one vent hole opening in an upper surface, the grooved portion communicating with the at least one vent hole and opening in a lower surface; a plurality of upper-surface convex portions that are formed so as to protrude upward from the upper surface of the base body; and an upper-surface ring-shaped convex portion that is formed in a ring shape along an outer periphery of the upper surface of the base body so as to protrude upward from the upper surface, wherein a cross-sectional area of the grooved portion in a direction perpendicular to a flow path direction is 1.2 mm 2 or greater.

Claims (49)

1 . A substrate holding member comprising:

a flat-plate-shaped base body that has at least one vent hole and grooved portions, the at least one vent hole opening in an upper surface of the base body, the grooved portions communicating with the at least one vent hole and opening in a lower surface of the base body;

a plurality of upper-surface convex portions that are formed so as to protrude upward from the upper surface of the base body; and

an upper-surface ring-shaped convex portion that is formed in a ring shape along an outer periphery of the upper surface of the base body so as to protrude upward from the upper surface,

wherein a cross-sectional area of the grooved portions in a direction perpendicular to a flow path direction is 1.2 mm 2 or greater;

in top view, the grooved portions are arc-shaped; and

the number of grooved portions is two or more.

2 . The substrate holding member according to claim 1 , further comprising:

a plurality of first lower-surface convex portions that are formed so as to protrude downward from an upper end surface of the grooved portions.

3 . The substrate holding member according to claim 2 ,

wherein the first lower-surface convex portions are arranged when W/2 is 1.0 mm or greater, where W is a width of the grooved portions.

4 . The substrate holding member according to claim 3 , further comprising:

a first lower-surface ring-shaped convex portion that is formed so as to protrude downward from the lower surface of the base body in such a manner as to surround the grooved portions along an edge of the grooved portions;

a second lower-surface ring-shaped convex portion that is formed so as to protrude downward from the lower surface of the base body in such a manner as to surround the first lower-surface ring-shaped convex portion; and

a plurality of second lower-surface convex portions that are arranged in at least a region between the first lower-surface ring-shaped convex portion and the second lower-surface ring-shaped convex portion, and that are formed so as to protrude downward from the lower surface of the base body.

5 . The substrate holding member according to claim 2 , further comprising:

a first lower-surface ring-shaped convex portion that is formed so as to protrude downward from the lower surface of the base body in such a manner as to surround the grooved portions along an edge of the grooved portions;

a second lower-surface ring-shaped convex portion that is formed so as to protrude downward from the lower surface of the base body in such a manner as to surround the first lower-surface ring-shaped convex portion; and

a plurality of second lower-surface convex portions that are arranged in at least a region between the first lower-surface ring-shaped convex portion and the second lower-surface ring-shaped convex portion, and that are formed so as to protrude downward from the lower surface of the base body.

6 . The substrate holding member according to claim 1 , further comprising:

a first lower-surface ring-shaped convex portion that is formed so as to protrude downward from the lower surface of the base body in such a manner as to surround the grooved portions along an edge of the grooved portions;

a second lower-surface ring-shaped convex portion that is formed so as to protrude downward from the lower surface of the base body in such a manner as to surround the first lower-surface ring-shaped convex portion; and

a plurality of second lower-surface convex portions that are arranged in at least a region between the first lower-surface ring-shaped convex portion and the second lower-surface ring-shaped convex portion, and that are formed so as to protrude downward from the lower surface of the base body.

7 . The substrate holding member according to claim 1 , further comprising:

wherein the depth of the grooved portions is more than 0.8 mm and 1.8 mm or less.

8 . A substrate holding member comprising:

a flat-plate-shaped base body that has at least one vent hole and a grooved portion, the at least one vent hole opening in an upper surface of the base body, the grooved portion communicating with the at least one vent hole and opening in a lower surface of the base body;

a plurality of upper-surface convex portions that are formed so as to protrude upward from the upper surface of the base body; and

an upper-surface ring-shaped convex portion that is formed in a ring shape along an outer periphery of the upper surface of the base body so as to protrude upward from the upper surface,

wherein a cross-sectional area of the grooved portion in a direction perpendicular to a flow path direction is 1.2 mm 2 or greater; and

the width of the grooved portion is more than 2.0 mm and 4.0 mm or less.

9 . The substrate holding member according to claim 8 , further comprising:

wherein the depth of the grooved portion is more than 0.8 mm and 1.8 mm or less.

10 . The substrate holding member according to claim 8 , further comprising:

a plurality of first lower-surface convex portions that are formed so as to protrude downward from an upper end surface of the grooved portion.

11 . The substrate holding member according to claim 10 ,

wherein the first lower-surface convex portions are arranged when W/2 is 1.0 mm or greater, where W is a width of the grooved portion.

12 . The substrate holding member according to claim 11 , further comprising:

a first lower-surface ring-shaped convex portion that is formed so as to protrude downward from the lower surface of the base body in such a manner as to surround the grooved portion along an edge of the grooved portion;

a second lower-surface ring-shaped convex portion that is formed so as to protrude downward from the lower surface of the base body in such a manner as to surround the first lower-surface ring-shaped convex portion; and

a plurality of second lower-surface convex portions that are arranged in at least a region between the first lower-surface ring-shaped convex portion and the second lower-surface ring-shaped convex portion, and that are formed so as to protrude downward from the lower surface of the base body.

13 . The substrate holding member according to claim 10 , further comprising:

a first lower-surface ring-shaped convex portion that is formed so as to protrude downward from the lower surface of the base body in such a manner as to surround the grooved portion along an edge of the grooved portion;

a second lower-surface ring-shaped convex portion that is formed so as to protrude downward from the lower surface of the base body in such a manner as to surround the first lower-surface ring-shaped convex portion; and

a plurality of second lower-surface convex portions that are arranged in at least a region between the first lower-surface ring-shaped convex portion and the second lower-surface ring-shaped convex portion, and that are formed so as to protrude downward from the lower surface of the base body.

14 . The substrate holding member according to claim 8 , further comprising:

a first lower-surface ring-shaped convex portion that is formed so as to protrude downward from the lower surface of the base body in such a manner as to surround the grooved portion along an edge of the grooved portion;

a second lower-surface ring-shaped convex portion that is formed so as to protrude downward from the lower surface of the base body in such a manner as to surround the first lower-surface ring-shaped convex portion; and

a plurality of second lower-surface convex portions that are arranged in at least a region between the first lower-surface ring-shaped convex portion and the second lower-surface ring-shaped convex portion, and that are formed so as to protrude downward from the lower surface of the base body.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 10, 2023
From: OOYACHI, KAZUAKI; NAKAMURA, HIROYUKI
To: NITERRA CO., LTD.
Reel/Frame 065174/0132 →
Priority Claims (1)
JP 2022-163652 · Oct 12, 2022 · national
Continuity (1)
Related Publication 20240128117A1 · Apr 18, 2024
References Cited (6)
US 20170345701A1 · Ishino · 2017 [cited by examiner]
JP 2003152060A · 2003 [cited by applicant]
JP 2017212343A · 2017 [cited by applicant]
JP 2021141212A · 2021 [cited by examiner]
Japan Patent Office, Office Action (Notice of Reasons for Refusal) issued in corresponding Application No. 2022-163652 issued Nov. 4, 2025. [cited by applicant]
Japan Patent Office, Office Action (Decision of Refusal) issued in corresponding Application No. JP 2022-163652 issued Mar. 10, 2026. [cited by applicant]