IP Library Granted Patent US 12,658,397
Granted Patent B2
US 12,658,397 · App. 17/992,736 · Granted Jun 16, 2026

Photocathode including nanostructures for extended wavelengths

Inventors: Bed Pantha (Chandler, AZ); Jacob J. Becker (Gilbert, AZ); Jon D. Burnsed (Tempe, AZ)
Assignee: L3HARRIS TECHNOLOGIES, INC.
H01J1/34H01J9/12B82Y20/00G02B23/12H01J31/507H01J2201/3423
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Quick Facts
Patent No.
US 12,658,397
App. No.
17/992,736
Granted
Jun 16, 2026
Kind
B2
Abstract

A photocathode. The photocathode includes an absorber. The absorber a p-type bulk active layer and a plurality of nanostructures formed on the p-type bulk active layer. The Photocathode further includes the plurality of nanostructures, such that the plurality of nanostructures are formed at a band bending region between the bulk active layer and the vacuum.

Claims (19)

1 . A photocathode epitaxial structure comprising:

a substrate material;

a p-type bulk active layer formed on the substrate material; and

a plurality of nanostructures formed between the substrate material and the p-type bulk active layer, positioned within a band bending region,

wherein the plurality of nanostructures comprise quantum-confined nanostructures including at least one of quantum wells or quantum dots, and wherein a total thickness of the plurality of nanostructures is less than a thickness of the band bending region.

2 . The photocathode epitaxial structure of claim 1 , wherein the plurality of nanostructures formed between the substrate material and the p-type bulk active layer comprises 2 to 5 nanostructure layers.

3 . The photocathode epitaxial structure of claim 1 , wherein the quantum wells comprise the plurality of nanostructures positioned within the band bending region.

4 . The photocathode epitaxial structure of claim 1 , wherein the quantum dots comprise the plurality of nanostructures positioned within the band bending region.

5 . The photocathode epitaxial structure of claim 1 , wherein the plurality of nanostructures formed between the substrate material and the p-type bulk active layer comprises one or more InGaAsNSb layers and one or more GaAsN layers.

6 . The photocathode epitaxial structure of claim 1 , wherein the plurality of nanostructures formed between the substrate material and the p-type bulk active layer comprises one or more InGaAs layers and one or more GaAsP layers.

7 . The photocathode epitaxial structure of claim 1 , further comprising an InGaP etch stop layer to prevent surface damage.

8 . The photocathode epitaxial structure of claim 1 , further comprising a window layer formed on the p-type bulk active layer.

9 . The photocathode epitaxial structure of claim 1 , wherein the p-type bulk active layer is doped exponentially by p-type impurities with levels of doping increasing away from an interface between the p-type bulk active layer and the substrate material.

10 . A photocathode comprising:

an absorber, the absorber comprising:

a p-type bulk active layer; and

a plurality of nanostructures formed on the p-type bulk active layer; and

wherein the plurality of nanostructures are exposed to a vacuum and are located within a band bending region between the bulk active layer and the vacuum, wherein the plurality of nanostructures are formed between a substrate material and the p-type bulk active layer in an epitaxial structure, and wherein, the plurality of nanostructures are proximate the vacuum.

11 . The photocathode of claim 10 , wherein the plurality of nanostructures comprise at least one of quantum wells or quantum dots located within the band bending region between the bulk active layer and the vacuum.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 22, 2022
From: PANTHA, BED; BECKER, JACOB J.; BURNSED, JON D.
To: L3HARRIS TECHNOLOGIES, INC.
Reel/Frame 061858/0828 →
Continuity (1)
Related Publication 20240170246A1 · May 23, 2024
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