IP Library › Granted Patent US 4,179,311
Granted Patent Utility
US 4,179,311 · App. 05/945,361

Method of stabilizing semiconductor device by converting doped poly-Si to polyoxides

Inventor: Terry G. Athanas
Patented Case View Patent ↗
Granted: Dec 18, 1979 Filed: Sep 25, 1978
Inventor
Terry G. Athanas
Assignee (at issue)
Mostek Corporation

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Quick Facts
Patent No.
US 4,179,311
App. No.
05/945,361
Filed
1978-09-25
Granted
1979-12-18
Kind
A