Granted Patent
Utility
US 4,204,942 · App. 05/950,356
Apparatus for multilayer thin film deposition
Inventor:
Day Chahroudi
Patented Case
View Patent ↗
Granted: May 27, 1980
Filed: Oct 11, 1978
Inventor
Day Chahroudi
Assignee (at issue)
Heat Mirror Associates
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.