Granted Patent
Utility
US 4,275,289 · App. 06/118,002
Uniformly cooled plasma etching electrode
Inventor:
Herbert A. Lord
Patented Case
View Patent ↗
Granted: Jun 23, 1981
Filed: Feb 4, 1980
Inventor
Herbert A. Lord
Assignee (at issue)
Western Electric Company, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.