Granted Patent
Utility
US 4,315,479 · App. 06/126,721
Silicon wafer steam oxidizing apparatus
Inventors:
Monte M. Toole, Robert B. Champagne
Patented Case
View Patent ↗
Granted: Feb 16, 1982
Filed: Jun 27, 1980
Inventors
Monte M. Toole
Robert B. Champagne
Assignee (at issue)
Atomel Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.