Granted Patent
Utility
US 4,325,077 · App. 06/151,296
Automatic wafer alignment system
Inventor:
Richard M. Dunham
Patented Case
View Patent ↗
Granted: Apr 13, 1982
Filed: May 19, 1980
Inventor
Richard M. Dunham
Assignee (at issue)
GCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.