Granted Patent
Utility
US 4,328,068 · App. 06/171,271
Method for end point detection in a plasma etching process
Inventor:
Bernard J. Curtis
Patented Case
View Patent ↗
Granted: May 4, 1982
Filed: Jul 22, 1980
Inventor
Bernard J. Curtis
Assignee (at issue)
RCA Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.